Air Cylinder

30 42 16 4 10 10 18.5 30.5 42.5 48.5 72.5 90.5 102.5 D-F7lW/J79W D-F7lWV/F79F D-F7BA/F7BAV 10 3.5 10.5 18 30 42 16 4 10 18.5 30.5 42.5 48.5 72.5 90.5 102.5 D-F7NT 10 8.5 15.5 23 35 47 16 9 15 23.5 35.5 47.5 53.5 77.5 95.5 107.5 D-A7l/A80 10 3 10 10 17.5 29.5 41.5 16 3.5 9.5 9.5 18 30 42 48 72 90 102 D-A79W 10 0.5 7.5 15 27 39 16 1 7 15.5 27.5 39.5 45.5 69.5 87.5 99.5 : In the actual

Fluoropolymer Piping Equipment

25 1/2" 42 7 26.5 24 14 28 32 64 61.5 LVN 10 10 LQ3R62-M 3/4" 42.5 52 16 16 LQ3R63-M 1" 53 22 22 50 LQHB 8 30 26 18 36 41 78 74 49 TL TIL Inch Size TLM TILM Model Applicable tubing O.D.

Table of Contents

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

F

Connection thread Model D1 D2 L1 L2 *A M Nylon M5x0.8 KXL04-M5 8 22.5 24 11 4 10.4 13 22 16 2.5 3.5 18 KXL04-01S 12 23 25 16 18 KXL06-01S 25 28 20 6 14 12.8 15 24 17 4 8.6 14 KXL06-02S 28 29 26 18 KXL08-01S 29 32 28 14 KXL08-02S 32 33 34 8 17 15.2 17 27 18.5 6 21.6 38 KXL08-03S 33 34 43 14 KXL10-02S 38 42 69 38 KXL10-03S 39 42 77 10 22 18.5 23.5 32 21 7 30.5 95 12 KXL10-04S 42 43 38 KXL12

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

65 35.2 50.6 [57.6] 49.5 55.1 37.6 (Lead wire length) Approx. 300 61.7 [68.7] Pg7 4.3 105.8 81 86 [88.2] 94.9 87.5 18 18 28 28 18 18 18 18 28 4.3 18 18 28 4.3 9.5 22 9.5 22 22 9.5 22 9.5 4.3 Note) Refer to page 176 for dimensions of connector types. 64 Base Mounted 10-SY3000/5000/7000/9000 Dimensions: Series 10-SY5000 [ ]: AC 2 position double Grommet (G), (H): 10-SY5240(R)-02 G H (A, B

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A MM A1 E1 L1 NDH10 NX I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 22 28 38 44 20 25, 32 40 50, 63 80 100 8.5 10.5 14 18 21 21 10.3 12.8 12 16 21 24 25 30 30 40 50 55 M8 x 1.25 11.5 14 14 20 27 31 34 41 42 56 71 79 Applicable bore (mm) 8 10 10 14 18 22 8 10 18 22 28 32 +0.058 0 0.2 0.4 R1 U1 ND Applicable pin part no. L MM NZ NX Part no.

AC Servo Motor Driver

(CN1-19) SP1(CN1-41) LOP(CN1-45) ST2(CN1-18) ST1(CN1-17) EMG(CN1-42) Input Lit: ON Extinguished: OFF Output SA(CN1-22) TLC(CN1-25) ZSP(CN1-23) SA(CN1-24) RD(CN1-49) ALM(CN1-48) OP(CN1-33) (c) Torque control mode SP2(CN1-16) LOP(CN1-45) RS1(CN1-18) RS2(CN1-17) SON(CN1-15) RES(CN1-19) SP1(CN1-41) EMG(CN1-42) Lit: ON Extinguished: OFF Input Output VLC(CN1-25) ZSP(CN1-23) RD(CN1-49) ALM(CN1-48

NCG/CG1

18 15(16) 17(18) 17(18) 33 40.5 47.5 S + Stroke ZZ + Stroke Note) ( ): Denotes the dimensions for long stroke.

C85

58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 16 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 20 20 66 46 6 32 8 66 50 6.6 40 42 17 19 40 5 25 19 6.6 36 54 5 8 25 24 66 46 6 32 8 66 50 6.6 40 42 17 23 40 5 25 23 6.6 40 54 5 8 6-11-17 17 Series C85 Dimensions [First angle projection] Double acting, Double rod Rubber cushion: C85WE Bore Stroke Without magnet

LX

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

ISO Standard Hydraulic Cylinder

30 14 35 12 22 1/4 103 12 15 18 45 43 40 25 to 800 41.7 M8 x 1 9 12.5 83 62.5 10 M16 x 1.5 73 63 103 34 19 18 31 128 11 22 37 3/8 22 12 19 45 47 50 25 to 800 52.3 M12 x 1.25 11 19 102 74.5 12 M20 x 1.5 74 75 127 42 24 18 37 134 28 14 28 9 42 25 1/2 54 53 63 25 to 800 64.3 M12 x 1.25 13 26 124 89 12 M27 x 2 80 90 161 18 36 50 13 30 39 17 44 32 1/2 136 36 65 68 80 M16 x 1.5 25 to 800 82.7

C85

58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 16 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 20 20 66 46 6 32 8 66 50 6.6 40 42 17 19 40 5 25 19 6.6 36 54 5 8 25 24 66 46 6 32 8 66 50 6.6 40 42 17 23 40 5 25 23 6.6 40 54 5 8 6-11-17 Series C85 Dimensions [First angle projection] Double acting, Double rod Rubber cushion: C85WE Bore Stroke Without magnet,

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-41 VV5Z5-42 Before using, refer to page 3-3-8.

ZP

34 40 Dimensions Dimensions Dimensions Model A 40 50 ZP40H ZP50H B 42 52 C 32 42 Model A 63 80 ZP63H ZP80H B 65 82 C 50 61 D 14.5 16.5 Y 3.5 4.5 Model A 100 125 ZP100H ZP125H B 103 128 C 80 104 ZP HB 40 50 ZP HB ZP HB 63 80 100 125 F F F 4 x 9.5 4 x 8 3 x 6.5 4 x 6 4 x 5 3 x 4 6 G E E Y E 3.5 Y Y 10 6 8 40 18 34 C C C A A A B B B D D D Dimensions Model ZP63HB ZP80HB Dimensions Model ZP100HB

Air Cylinder Series MB

DDH10 (Hole) B DA DB DL DU DC DX DE DO DR DT DS DH Z 32 40 50 63 +0.058 0 54 42 32 22 10 44 14 62 9 6.6 15 7 33 224 10 MB-B03 25 45 160 32, 40 +0.058 0 63 42 32 22 10 44 14 62 9 6.6 15 7 33 235 10 +0.070 0 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 271 14 MB-B05 40 60 190 50, 63 +0.070 0 90 53 43 30 11.5 60 20 81 10.5 9 18 8 45 285 14 80 100 +0.084 0 102 73 64 45 14 86 30 111 12.5 11 22 10

Table of Contents

pressure): VQ7-8-YZ-S-SC 154 154 71.5 82.5 82.5 56(71) 56(71) 49(64) 49(64) 16(20)(B port) 16(20)(A port) 31(42) 31(42) Mounting hole 2-7.5 P R2 R1 VK Manual override A B PB (11) 10 12 (16) 16 (23) (22) 16 VZ 62(72) 75(86) 62(72) 75(86) 50 A VF Cable with connector PA R1 R2 P VFR (L 500) B A Mounting hole 2-7.5 5-3/8, 1/2, 3/4 2-1/8 49(64) 49(64) 44 (58) 44 (58) 18 (20) (20) 18 Indicator

CG1

A CM2 NZ L NX L1 MM R1 ND E1 U1 A1 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 22 28 38 44 20 25, 32 40 50, 63 80 100 8.5 25 30 30 40 50 55 M8 10.3 11.5 14 14 20 27 31 34 41 42 56 71 79 8 10 10 14 18 22 8 10 18 22 28 32 12.8 12 16 21 24 10.5 14 18 21 21 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X

ISO Cylinder

18 32 106 (109.5) 16 5.5 6 14 103 (106.5) 129 (132.5) 155 (158.5) 4 20 32 33 42 18 32 111 (114.5) 137 (140.5) 163 (166.5) 20 6.6 8 17 121 146 171 5 25 40 42 54 19 36 128 153 178 25 6.6 8 17 122.5 147.5 172.5 5 25 40 42 54 23 40 133.5 158.5 183.5 ( ): For built-in magnet Refer to page 12 of Standard Type Single Rod for details of accessories (rod end, double knuckle joint, floating joint

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

SY9000-18-2 (M3 x 42) SY9000 SY9000-11-1 VFS Plug (white) VS Insert into unused cylinder ports and SUP/EXH ports. The minimum order quantity is 10 pieces. Order in multiples of 10.

CJ2

(SNJ-016B for 10, SNKJ-016B for 16) (mm) Bore NN NB NA MM KA H GB GA FZ FY FX FT FC FB F CB CA BB BA Z A S 10 9.5 12.5 M4 X 0.7 4.2 28 5 8 42 20 33 2.3 M10 X 1.0 5.5 17.5 8 14 17 12 15 74 15 46 16 9.5 12.5 M5 X 0.8 5.2 28 5 8 42 20 33 2.3 M12 X 1.0 5.5 19 8 20 20 18 18 75 15 47 Double Clevis (D) CJ2KD Bore size Stroke Material: Iron Part No.