Gun Type Ionizer

08 8 (Metric) 09 5/16" (Inch) Symbol Type 01 AC adapter (With AC cord*2) 02 AC adapter (Without AC cord) 03 Power supply cable (For 24 VDC wiring) N None Symbol Type 01 Standard nozzle 02 Bypass nozzle*3 *1 The AC adapter body and the power supply cable (For AC adapter) come as a set.

HRX-OM-Q026

Setting of the selected alarm to Setting range: AL.01 to AL.49 63. Press the [MENU] key once. Returns to the main display (which shows the circulating fluid temperature).

smcmaintenancepartslist

) 04 T-interface Note 6) Note 7) Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

NARM Series

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

Speed Controller with

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002Fm TMH-01J TMH-03J TMH-07J AS2002Fm AS2052Fm TMH-07 TMH-09 AS3002Fm TMH-10 AS4002Fm TMH-13 Tubing size Applicable model Dimensions Part no.

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

ZP

(for Heavy-duty) Buffer assembly model Applicable pad model Series ZP Page ZP40H ZP50H ZP40HB ZP50HB P. 80 P. 81 ZPB-T1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 80 P. 81 ZPB-T2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB P. 80 P. 81 ZPB-T3 (J/JB/JF)01 ZP40H ZP50H ZP40HB ZP50HB P. 82 P. 83 ZPB-X1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 82 P. 83 ZPB-X2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB

SQ1000/2000

rail mount type Direct mount type Nil E Wiring Stations Note) S D Single wiring Double wiring SSQ2000 PR 4 C10 Note) PL26: 01 to 12 (P kit, 26P) PL20: 01 to 09 (P kit, 20P) JL20: 01 to 08 (J kit, 20P) 01 1 station Bore size Option 12 12 stations C8 C10 N9 N11 8 One-touch fitting 10 One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting

HRX-OM-W032

Setting of the selected alarm Setting range: AL.01 to AL.51 to 63. Press the [MENU] key once. Returns to the main display (which shows the circulating fluid temperature).

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

HRX-OM-X071

AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01

HRX-OM-X084

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.

HRX-OM-W002

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.

Compact 5-Port Solenoid Valve

PG/PGC: Flat ribbon cable (20 pins) PH/PHC: Flat ribbon cable (10 pins) Symbol Stations Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 09 9 stations 02 2 stations Specified layout*2 (Up to 18 solenoids available) 04 4 stations 02 2 stations Specified layout*2 (Up to 8 solenoids available) o Mounting and Option * Enter the number of stations inside m