13

Box type (Built-in silencer) B S 07 ZH 06 06 Body ported type (Without silencer) D S 07 ZH 01 01 01 EXH. port size Note) Nozzle diameter Symbol Size Style One-touch One-touch One-touch One-touch One-touch Screw-in Screw-in Screw-in Screw-in 05 07 0.5 mm 0.7 mm 06 08 10 12 16 01 02 03 04 6 8 10 12 16 Rc 1 8 Rc 1 4 Rc 3 8 Rc 1 2 10 1.0 mm 13 1.3 mm 15 1.5 mm 18 1.8 mm 20 2.0 mm Maximum vacuum

reduces flow setting time

ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

High Purity Chemical Valve

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

AC Servo Motor Driver (CC-Link Type ）

Data No. : [0][0] Data : 07 Data No. : [0][0] Data : 01 (SON turned ON) (SON, LSP, LSN turned ON) End Command : [8][B] Cancel the JOG operation. Data No. : [0][0] Data : 0 (JOG operation cancel) Power on the servo amplifier. Shift to the CC-Link operation mode. Power on the drivers 14 35 14.

JXCx-OMT0062

Single numerical data instructions (1 Stations occupied) [Remote IO] PLC memory PLC memory address Signal name address Signal name Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG (-) 0E ESTOP 0E JOG (+) 0F ALARM 0F FLGTH 10 to 1A

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

CG5-S

Budafoki ut 107-113, 1117 Budapest Phone: 01-204 4366, Fax: 01-204 4371 Sweden SMC Pneumatics Sweden A.B. Ekhagsvgen 29-31, S-14105 Huddinge Phone: 08-603 07 00, Fax: 08-603 07 10 Ireland SMC Pneumatics (Ireland) Ltd. 2002 Citywest Business Campus, Naas Road, Saggart, Co. Dublin Phone: 01-403 9000, Fax: 01-464 0500 Portugal SMC Espaa (Sucursal Portugal), S.A.

JXCx-OMT0023

Setting Control modes (Note 1) P S T CP/CL 00 01 For manufacturer setting (Note 2) 02 SON SON SON SON 03 RES RES RES RES 04 PC PC PC 05 (Note4) EM1 EM1 EM1 EM1 06 CR 07 ST1 RS2 ST1 08 ST2 RS1 ST2 09 TL1 TL1 TL1 0A LSP LSP LSP 0B LSN LSN LSN 0C For manufacturer setting (Note 2) 0D SP1 SP1 0E SP2 SP2 0F SP3 SP3 10 LOP LOP LOP 11 CDP CDP CDP 12 to 1F For manufacturer setting (Note 2) 20 MD0

AC Servo Motor Driver (CC-Link Type ）

Data No. : [0][0] Data : 07 Data No. : [0][0] Data : 01 (SON turned ON) (SON, LSP, LSN turned ON) End Command : [8][B] Cancel the JOG operation. Data No. : [0][0] Data : 0 (JOG operation cancel) Power on the servo amplifier. Shift to the CC-Link operation mode. Power on the drivers 14 34 14.

Prevents Micro-Bubbles

Removal of drainage Flush drainage from filters regularly. 17-5-42

JXCx-OMX0009

Single numerical data instructions (1 Stations occupied) [Remote IO] PLC memory PLC memory address Signal name address Signal name Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG(-) 0E ESTOP 0E JOG(+) 0F ALARM 0F FLGTH 1A to 10

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Note) 1/2 standard Metric size 23 04 06 08 10 12 Inch size Made to Order Refer to page 608 for details. 3.2 01 03 05 07 09 11 13 1/8" With One-touch fittings 4 5/32" Caution 6 3/16" 8 1/4" Be sure to read before handling.

/

(mm) Model Flow characteristics NBR, FKM 1 cm3/min or less Port size Weight (g) External Leakage C[dm3/(sbar)] b Cv Seal material Leakage 2 3 4.5 2 0.59 1.2 2.3 0.59 1.2 0.48 0.45 0.46 0.48 0.18 0.33 0.61 0.18 VXE2110-01 VXE2120-01 VXE2130-01 VXE2110-02 VXE2120-02 VXE2220-02 VXE2320-02 VXE2130-02 VXE2230-02 VXE2330-02 VXE2240-02 VXE2340-02 VXE2250-02 VXE2350-02 VXE2260-02 VXE2360-02 VXE2220

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

5-Port Solenoid Valve

SY Side/Bottom ported 3 1 3 0 5 1 W1 M5 01 SY Top ported q w r e t y u i o !

Table of Contents

-ASD330F-01-08 10-ASD230F-M5-06 2.

VZ3000

(B) port One-touch fitting for 6 C6 M5 x 0.8 VF One-touch fitting for 5/32" B3 One-touch fitting for 1/4" B7 Flow Characteristics VFR Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2(B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VP4 VV5Z3-40 VV5Z3-41 VV5Z3-42-01 VV5Z3-42-C6 VV5Z3-43 0.16 0.17 0.21 0.20 0.19 0.26 0.23 0.31 0.29 0.32 0.64