SMC Corporation of America
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/min(ANR) ARM10F-07 ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure

Individual air supply port PV Individual air supply port PV Adapter D Adapter D M5 (or M6) Pitch = 21 Individual air supply port (PV port) M5 (or M6) Individual air supply port (PV port) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) (or M6) Vacuum pad connection port (V port) M5 x 0.8 M5 x 0.8 (or M6) Adsorption nozzle piping port 13-2-35 35 Series ZX Vacuum pad connection

6 M5 type U10/32 type M5 type U10/32 type e !0 i t NBR, Stainless steel !1 !6 w y Gasket M5 type only !7 r Note 1) M5 and U10/32 types are black zinc chromate plated. Note 2) AS231FM type is made of steel. Note 3) Meter-in type is black zinc chromate plated. Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM.

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

With seal Note) In case that connecting port is either M5 or 10-32 UNF thread, it is not available with seal. With gasket is provided as standard. Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.

(kg) 11.46 (5.2) P.T. ln(mm) 0.12 (3) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.19 (5) '75 PSIG (5 Kgf/cm2) -ffi 2 WaY DIMENSIONS A B c D E F G H J K M 't.57 (40) 1 . 1 8 (30) 2.40 (61) 2.05 (52) o.87 (221 0.51 (13) 0.98 (251 0.63 (16) 1.06 (27\ 0.31 (8) 1 . 2 6 (32) Millimeters in Parentheses HOW TO ORDER NV[f220-N02-40 : 2 way; 2 portr/e" NPT WFoot Pedal NVM23O-NO2-40 : 3 way; 2 poft 1/4" NPT w

(kg) 11.46 (5.2) P.T. ln(mm) 0.12 (3) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.19 (5) '75 PSIG (5 Kgf/cm2) -ffi 2 WaY DIMENSIONS A B c D E F G H J K M 't.57 (40) 1 . 1 8 (30) 2.40 (61) 2.05 (52) o.87 (221 0.51 (13) 0.98 (251 0.63 (16) 1.06 (27\ 0.31 (8) 1 . 2 6 (32) Millimeters in Parentheses HOW TO ORDER NV[f220-N02-40 : 2 way; 2 portr/e" NPT WFoot Pedal NVM23O-NO2-40 : 3 way; 2 poft 1/4" NPT w

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

1.5 32 159 9 10 40 40 60 40 217 150 to 1000 22 51 M32 X 2 40 181 10 11 53 53 77 44.5 247 200 to 1000 26.5 CC REC T/Rear trunnion H2 TDe9-0.025 -0.061 2-Rc(PT)P 2-NN G Relieving port Relieving port Width across flats B1 Relieving port M5 X 0.8 G Standard port Standard port H1 I 2-Eh8 TY D MM AL lNA TT K A TX TZ N N F S+Stroke H 40 Z+Stroke ZZ+Stroke (mm) 32 H1 H2 I K MM A AL B1 D F G H E Bore

x 0.8 40 70 With four M5 bolts 81 Series ZP Buffer Assembly Part No.

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

Male thread Female thread 40 40 6 tube 06 50 50 8 tube 08 M5 x 0.8 A5 Pad type (Refer to Table (1) for applications.)

x 0.8 40 70 With four M5 bolts 81 Series ZP Buffer Assembly Part No.

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

Q H 05 1 3 5 ZM JIS Symbol Air supply port Exhaust port Vacuum port Port size connection Nozzle diameter 05 07 0.5 mm 0.7 mm 3 5 M5 x 0.8 M3 x 0.5 Specifications Ejector System Circuit 10 1.0 mm 13 1.3 mm Applicable nozzle size (mm) Supply valve P Q Supply valve and release valve 0.5, 0.7, 1.0, 1.3 Air operated valve H M 0.35 MPa 0.5 MPa Supply pressure Components Port size M3 x 0.5 M5 x

Applicable cylinder bore size (mm) Elbow type Universal type Port size Inch size Metric size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

22 3 2.5 Manual override B A 11 A B 37.5 [39.7] G: Approx. 300 H: Approx. 600 (Lead wire length) 91.7 [96.1] (Light/surge voltage suppressor) 41.5 [48.5] + 35.6 26.1 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3 40-L-M5 M plug connector (M): SYJ3 40-M-M5 M8 connector (W0): SYJ3 40(R)-W0-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5 [48.5