ARM10/11

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure

Compact manifold regulator ARM5 Series

(located on both the right and left side) Before disassembly, be sure to check that no inlet or outlet pressure is applied and exhaust the internal pressure thoroughly before starting the job. 707 Regulator Single Unit Type ARM5S Series How to Order A 07 S ARM5 Single unit type 1.

Proposals for Energy Saving

Box Type (with Built-in Silencer) B S 07 ZH 06 06 Body Ported Type (without Silencer) D S 07 ZH 01 01 01 EXH port size Note) Nozzle diameter Symbol Size Type One-touch One-touch One-touch One-touch One-touch Threaded Threaded Threaded Threaded 05 07 0.5mm 0.7mm 6 8 10 12 16 06 08 10 12 16 01 02 03 04 10 1.0mm 13 1.3mm 15 1.5mm 18 1.8mm Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 20 2.0mm Maximum

5-Port Solenoid Valve

C4, C6 : 14.8 C8 : 17.2 1/4 [1(P), 5(EA), 3(EB) port] L3 These figures show the SS5Y5-51S5-05D-C8.

0.4

Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) Dimensions Single unit Manifold 2n x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting 2 x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting M3 mounting hole P = 11 M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw Residual pressure release manual override Stations 1 2 3 n D side U side

0.4

Product Precautions DIN rail clamp screw Stations 1 2 3 D side U side 2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 31 42

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

0.4

Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) To CYL port VP4 VQ 1/2 VQ 1/2 Dimensions VQ 4/5 Single unit Manifold VQC 1/2 2n x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting 2 x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting VQC 4/5 VQZ M3 mounting hole M2.5 mounting hole SQ VFS VFR VQ7 Residual pressure release manual override DIN rail clamp screw Residual

45

U D B C4 C6 C8 (Rail mounting hole pitch 12.5) 1-6-133

0.4

VQ7 DIN rail clamp screw Stations 1 2 3 n D side U side 2 x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152

Compact 5-Port Solenoid Valve

JSY1000 manifold pitch for C2 and C4 is 6.5 mm, and 9 mm for C6.

45

One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch

VZ3000

(Example) VV5Z3-20P-07. 1 pc. (Manifold base) VZ3123-5MOZ-C4. 3 pcs. (Valve) VZ3223-5MOZ-C4. 3 pcs. (Valve) DXT192-13-3A. 1 pc. (Blanking plate assembly) DXT192-52-1-4A. 3 pcs. (Connector assembly) DXT192-52-2-4A. 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

Manifold Specifications

(Example) VV5Z3-20P-07. 1 pc. (Manifold base) VZ3123-5MOZ-C4. 3 pcs. (Valve) VZ3223-5MOZ-C4. 3 pcs. (Valve) DXT192-13-3A. 1 pc. (Blanking plate assembly) DXT192-52-1-4A. 3 pcs. (Connector assembly) DXT192-52-2-4A. 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

smcmaintenancepartslist

B Port plug See below PBT, HNBR 1 C Clip 136010 Stainless steel 3 One-touch Fittings for Regulator Block Port Plug VVQ0 58A VVQ1000 50A C4 Single unit regulator/ Port plug for regulator block Fitting type One-touch fittings for regulator block Nil L1 Straight Elbow Fitting size 10 Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Note) The O-ring is attached.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

ZZQ1 07 B C S ZQ1053M-K1Y5L-EAG (-Q) 4 pcs. (Stations 1 to 4) ZQ1103M-K1Y5L-EAG (-Q) 4 pcs. (Stations 5 to 8) Manifold Note) By viewing the front side of vacuum port (V), stations are counted starting from station 1 on the left side.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Pad diameter/form Silicone rubber Urethane rubber FKM ZHP63BM 2.9 0 20.3 ZHP80BM 5.0 0 35.1 ZHP63UM 1.5 0 10.6 ZHP80UM 2.1 0 15.5 255 ZHP Series Exhaust Characteristics/Flow Rate Characteristics (Representative Value) Flow Rate Characteristics Exhaust Characteristics ZHP-07 ZHP-07 (Supply pressure: 0.35 MPa) 50 45 40 35 30 25 20 15 10 5 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30

Secondary Batteries

Please make additional use of an air suction filter of the ZFA, ZFB or ZFC series. 90 Manifold X125 ZZQ1 07 B B 2 Series compatible with secondary batteries Port exhaust specifications 90 Material restriction Vacuum release pressure supply port (PD port) Maximum Number of Stations in Simultaneous Operation B None (Release pressure is supplied from the P port.)

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [X: External pilot port] Applicable tube O.D. C4: 4 (SMC) N3: 5/32" (SMC) (9.5) (43.9) One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.