0.4

A A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 one-touch fitting C6: 6 one-touch fitting C8: 8 one-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 one-touch fitting Dust-tight, Water-jet-proof 2 L n Dimensions Formula L1 = 16n + 118.5, L2 = 16n + 131 n: Station (Maximum 20 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 (L3) (L4)

Metal Seal/Rubber Seal Series VQ Body Ported

, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

V

22 ASV310F-01-08S 8 R(PT)1/8 10 19.3 15.2 17.6 73.8 67.8 71.8 65.8 45.8 39.8 27.4 23.4 19 21 23 ASV310F-02-06S 6 R(PT)1/4 14 16.8 12.8 17.6 71.9 65.9 69.9 63.9 45.8 39.8 31.4 25.4 17 19 30 ASV310F-02-08S 8 R(PT)1/4 14 19.3 15.2 17.6 73.8 67.8 71.8 65.8 45.8 39.8 31.4 25.4 19 21 31 ASV410F-01-08S 8 R(PT)1/8 12 19.3 15.2 24 83.1 75.6 81.1 73.6 52.8 45.3 30.7 26.7 19 21 39 ASV410F-01-10S 10

5 Port Solenoid Valve, Series VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

0.4

Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) To CYL port VP4 VQ 1/2 VQ 1/2 Dimensions VQ 4/5 Single unit Manifold VQC 1/2 2n x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting 2 x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting VQC 4/5 VQZ M3 mounting hole M2.5 mounting hole SQ VFS VFR VQ7 Residual pressure release manual override DIN rail clamp screw Residual

0.

Note 3) For AC specification power consumption, refer to page 19.

Vacuum System Peripherals:

For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.

VQZ1000/2000/3000

C6: One-touch fitting for 6 VVQZ2000-10A-2 VV5QZ22-05C 2-7-19 Body Ported 20 20 Series VQZ1000/2000/3000 Dimensions: VQZ1000 VV5QZ12Stations C Grommet (G) 27.5 (11) (35) 44.5 mounting hole n-C3, C4, C6, M5 20 (7.5) DIN rail clamp screw C3: One-touch fittings for 3.2 (5.5) C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread n Manual override 5 4 4 SMC SMC P = 10.5 47 2

Valve Single Unit

One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch

SZ3000

When the port size of the external pilot block assembly is 4, indicate with C4 in section (c).

Fieldbus System

L1 = 19 x n1 + 166.2 + 47 x n2 L2 = 19 x n1 + 56 L4 = L3 10.5 L5 = (L3 L1)/2 L6 = 47 x n2 + 81.7 n1: Valve stations n2: I/O Unit stations L3: DIN Rail Overall Length [mm] Valve stations I/O (n1) unit stations (n2) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 235.5 248 273 285.5 310.5 323 348 360.5 385.5 410.5 423 448 460.5 485.5 498 523 535.5 560.5 573 598 610.5 635.5

Valve Single Unit

One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch

Series VQ Base Mounted Metal Seal/Rubber Seal

C4 Refer to p.1.10-195 for cylinder port fittings.

Fieldbus System

Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations Symbol A, B port P , E port A, B port size (Metric) Symbol A, B port P , E port A, B port size (Inch) Applicable series Applicable series C3 C4 C6 C4 C6 C8 C6 C8 C10 M N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting

Table of Contents

For details, refer to pages 3-7-19 and 3-7-20.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note 2) Refer to page 19 for manifold dimensions with elbow fitting.

7.5

21.5 18 20.5 23 19 21.5 18 20.5 23 19 21.5 18 20.5 23 19 21.5 18 20.5 23 19 14 Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Dimensions: SJ3000 for D-sub Connector SS5J3-60FD U (S, R, RS) 1 2 Stations (Pitch) P = 10 [External pilot spec.] 23.6 12.8 32.1 15.4 15.6 3/5 3/5 2 2 2 2 2 2 2 31 46.2 54.5 1 1 58.2 4 4 4 4 4 4 4 D D D M5 x 0.8 [4(A), 2(

Valve Single Unit

Individual SUP spacer mounting size 23.5 P = 19 (Press and turn for the locking type.) (Lead wire length) (SUP port is mounted on the end plate side of single solenoid.)