Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 4 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 2 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

2

03-A 02-A IS10E-3003-A 04-A Cross spacer Note 6) Y14-M5-A Y24-01-A 02-A Y34-01-A 02-A Y44-02-A 03-A Y54-03-A 04-A Note 1) in part numbers for a round pressure gauge indicates a pipe thread type.

V100

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.

ZP

Vacuum Inlet Dimensions ZP3-Y035U;J -B3 ZP3-Y035U;K -B3 Barb fitting One-touch fitting 7 5 Width across flat 6 Width across flat 4 ZP3-Y015U:J -02 ZP3-Y02U:J -02 ZP3-Y035U:J -02 ZP3-Y015U:J -U2 ZP3-Y02U:J -U2 ZP3-Y035U:J -U2 Width across flat 8 Width across flat 10 2 2 D Width across flat 5.5 2 2 13 A D B M6 x 0.75 M3 x 0.5 7 0.3 13 A B M8 x 0.75 7 M3 x 0.5 0.9 (13.9) Width across flat 4.5

ZP

Vacuum Inlet Dimensions ZP3-Y035U;J -B3 ZP3-Y035U;K -B3 Barb fitting One-touch fitting 7 5 Width across flat 6 Width across flat 4 ZP3-Y015U:J -02 ZP3-Y02U:J -02 ZP3-Y035U:J -02 ZP3-Y015U:J -U2 ZP3-Y02U:J -U2 ZP3-Y035U:J -U2 Width across flat 8 Width across flat 10 2 2 D Width across flat 5.5 2 2 13 A D B M6 x 0.75 M3 x 0.5 7 0.3 13 A B M8 x 0.75 7 M3 x 0.5 0.9 (13.9) Width across flat 4.5

Table of Contents

O.D. 4 2.5 1 4 1 4 3 8 KFF04-02 KFF06-02 KFF06-03 KFF08U-02 KFF08N-02 KFF10U-02 KFF10N-02 KFF12U-02 KFF12N-02 10 33.5 26.8 15 15 17 1.6 25 27 30 17 17 19 15.5 1.5 33.2 26.5 6 15.2 3 12 6 4 35.2 28.5 5 6 11 17 21 30 35 45 4 5 5.5 6.5 7 8 Connection thread Applicable tubing 14 17 1 4 33.2 26.5 15 16.2 28 8 10 6.5 7.5 1 4 32 17 17 34.8 27.5 15 18.8 12 8 9 35 36 1 4 19 17 35.3 28.5 15 19.3 15

Table of Contents

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

KJ

O.D. 4 2.5 1 4 1 4 3 8 KFF04-02 KFF06-02 KFF06-03 KFF08U-02 KFF08N-02 KFF10U-02 KFF10N-02 KFF12U-02 KFF12N-02 10 33.5 26.8 15 15 17 1.6 25 27 30 17 17 19 15.5 1.5 33.2 26.5 6 15.2 3 12 6 4 35.2 28.5 5 6 11 17 21 30 35 45 4 5 5.5 6.5 7 8 Connection thread Applicable tubing 14 17 1 4 33.2 26.5 15 16.2 28 8 10 6.5 7.5 1 4 32 17 17 34.8 27.5 15 18.8 12 8 9 35 36 1 4 19 17 35.3 28.5 15 19.3 15

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Model Tightening torque Thread size 10-SY3000 M2 0.8Nm 0.16Nm 10-SY5000 10-SY7000 10-SY9000 M3 M4 M3 1.4Nm 0.8Nm 491

CATALOG

/2 (N)AS4200-04 M3 M3x0.5 M5 M5x0.8 01 18 02 14 03 38 04 12 Courtesy of Steven Engineering, Inc. !

ZP

Vacuum Inlet Dimensions ZP3-Y035U;J -B3 ZP3-Y035U;K -B3 Barb fitting One-touch fitting 7 5 Width across flat 6 Width across flat 4 ZP3-Y015U:J -02 ZP3-Y02U:J -02 ZP3-Y035U:J -02 ZP3-Y015U:J -U2 ZP3-Y02U:J -U2 ZP3-Y035U:J -U2 Width across flat 8 Width across flat 10 2 2 D Width across flat 5.5 2 2 13 A D B M6 x 0.75 M3 x 0.5 7 0.3 13 A B M8 x 0.75 7 M3 x 0.5 0.9 (13.9) Width across flat 4.5

Vacuum Pad

Vacuum Inlet Dimensions ZP3-Y035U;J -B3 ZP3-Y035U;K -B3 Barb fitting One-touch fitting 7 5 Width across flat 6 Width across flat 4 ZP3-Y015U:J -02 ZP3-Y02U:J -02 ZP3-Y035U:J -02 ZP3-Y015U:J -U2 ZP3-Y02U:J -U2 ZP3-Y035U:J -U2 Width across flat 8 Width across flat 10 2 2 D Width across flat 5.5 2 2 13 A D B M6 x 0.75 M3 x 0.5 7 0.3 13 A B M8 x 0.75 7 M3 x 0.5 0.9 (13.9) Width across flat 4.5

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

AS121F-M3-02 AS121F-M3-01 26.8 24.3 5.2 6 M3 x 0.5 1/8" 7.2 19.7 26.6 24.1 24 21.5 4 8.4 10.5 5.5 11 2.4 5.5 24.3 21.8 11.4 2 7.5 6 8.8 M3 x 0.5 16.1 10 12.7 AS121F-M5-02 AS121F-M3-03 27.3 24.8 M5 x 0.8 7 11.5 3 5/32" 9.3 AS121F-M3-23 AS121F-M5-01 3.2 8.4 10.5 M5 x 0.8 1/8" 17.3 5.5 7.2 16.1 26.6 24.1 24 21.5 4 19.7 12.7 M3 x 0.5 22.1 8.4 AS121F-M3-04 AS121F-U10/32-01 4 9.3 10 1/8" 10-32UNF

Table of Contents

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-02-08/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 10 x 1 m) Speed controller/Silencer AS3301F-02-10/AN200-2 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 12 x 1 m) Speed controller/Silencer AS4001F-02-12/AN200-2 It is when the cylinder is