Vacuum Pad

ZP2-TB20MB-H5 ZP2-TB06MB-B5 ZP2-TB08MB-B5 15 M5 x 0.8 11 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) 2.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 2.5 Width across flat 3 (Hexagon) (18) 5 5.5 5.5 3.5 (14.5) Width across flat 3 (Hexagon) (17) 8 8 (17) 13 11 18 9 9 14.4 9.6 8.4 5.5 4.5 4 4 20 15 2 2 21 3.3 4.7 16 8 6 9 7 15 Symbol/Type Bellows Pad ZJ: Bellows 2, 4, 5, 6, 40, 46 Pad diameter

Vacuum Pad

ZP2-TB20MB-H5 ZP2-TB06MB-B5 ZP2-TB08MB-B5 15 M5 x 0.8 11 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) 2.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 2.5 Width across flat 3 (Hexagon) (18) 5 5.5 5.5 3.5 (14.5) Width across flat 3 (Hexagon) (17) 8 8 (17) 13 11 18 9 9 14.4 9.6 8.4 5.5 4.5 4 4 20 15 2 2 21 3.3 4.7 16 8 6 9 7 15 Symbol/Type Bellows Pad ZJ: Bellows 2, 4, 5, 6, 40, 46 Pad diameter

C85

x 0.8 74 7 15 9.5 6 11.5 19 4.2 46 12 28 12 16 M12 x 1.25 16.7 7 5 12 10 10.5 4 M4 x 0.7 M5 x 0.8 74 7 15 9.5 6 11.5 19 4.2 46 12 28 12 16 M12 x 1.25 16.7 7 5 16 12 14 6 M6 x 1 M5 x 0.8 88 10 18.3 10.5 8 12.5 24 6.2 5 50 17 38 16 22 19.7 8 6 M16 x 1.5 16 16 14 6 M6 x 1 M5 x 0.8 88 10 18.3 10.5 8 12.5 24 6.2 5 50 17 38 16 22 19.7 8 6 M16 x 1.5 22 20 17 8 M8 x 1.25 G 1/8 106 13 24 15 11

Air Slide Table Series MXQ

8 (L) B 7 8 22 3 9 7.5 14.6 7 9.8 MXQ 8 (L) 15 M6 x 1 M3 x 8 M3 x 10 29.5 MXQ-AS 8( L)-X11 F 25 39.5 MXQ-AS 8 (L)-X12 E 5 23.5 G MXQ-AS12 (L) MXQ12 (L) M8 x 1 M4 x 12 M4 x 12 9.5 12 29 4 14 11 18.5 10.5 12.7 15 33.5 MXQ-AS12 (L)-X11 C 25 MXQ-AS12 (L)-X12 43.5 5 24.5 MXQ-AS16 (L) Table mounting section MXQ16 (L) M10 x 1 11 14 36 5 17 M5 x 16 M5 x 16 15 13.5 21 13 15 34.5 MXQ-AS16 (L)-X11

ZP

Form w 1 Material e Vacuum inlet r Width across flats K Connection thread 10 13 A5 67 46 29.9 21 2.5 M5 x 0.8 21 8 4 10 8 M5 x 0.8 16 67.5 46.5 30.4 21.5 10 13 A Q 72 46 29.9 21 2.5 10 8 M5 x 0.8 16 72.5 46.5 30.4 21.5 20 25 83.5 57.6 39.8 29 3.5 25.9 12 12 M8 x 1.25 32 84 58.1 40.3 29.5 40 86.5 60.6 42.8 32 4 50 87.5 61.6 43.8 33 20 25 A8 26 D C B N S U F GN GS M A6 M6 x 1 8 4 04 06 08 ZP

Air Fittings & Tubing

D2 L A M D1 Nylon Urethane M5 X 0.8 M6 X 1.0 38.5 KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S 11 13 39 35 8 16 10.4 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 17 15 12.8 38 39 42 43 44 1 8 1 4 1 8 20 26 28 34 42 68

Table of Contents

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 46 76 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

NCG/CG1

WH Rod End Lock: -R Head End Lock: -H Bore size (mm) Bore size (mm) WH W P WA WB WH W P WA WB 20 M5 x 0.8 16 15(16) 30 M5 x 0.8 16 16 30 23 23 20 25 M5 x 0.8 16 15(16) 30 30 M5 x 0.8 16 16 25 25 25 32 Rc 1/8 16 15(16) 25 Rc 1/8 16 16 25 28.5 28.5 32 40 20 Rc 1/8 16 15(16) Rc 1/8 16 16 20 33 33 40 50 20 Rc 1/4 18 17(18) 40.5 Rc 1/4 18 18 20 40.5 50 63 47.5 20 Rc 1/4 18 17(18) Rc 1/4 18 18

Basic type / Direct mount type Series CY3B/CY3R

W N A CY3B CY3R Z + Stroke CY1S CY1L Square nut insertion TW CY1H CY1F NL CYP (mm) Model A 97 102.5 125 EB 21 22 24 H 46 54 63 HA 33.5 42.5 46 HB 33.5 41.5 46 HC 45 53 61.5 HG 17 16 25 HP 42 50 58.5 HT 19 23.5 28 J M5 x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1H15 CY1H20

CG1

161 M18 X 1.5 With air cushion (mm) Bore (mm) Stroke range (mm) W P WA WB WC WD WH WH2 30 30 25 20 20 20 20 25 32 40 50 63 M5 M5 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 23 25 28.5 33 40.5 47.5 15 15 15 15 17 17 8.5 11 14.5 18.5 22 29 2 2 25 27.5 30.5 35.5 43.5 49.5 20 24 28 32 35 41 Up to 150 Up to 200 Up to 200 Up to 300 Up to 300 Up to 300 1-7-38 Direct Mount: Double Acting Series CG1R

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.

REA/REB

Speed 600 mm/s (mm) Model A EA EB H HA HB HC HG HP HT J L LL LW M MM REBH15 REBH25 97 26.5 21 46 33.5 33.5 45 17 42 19 M5 x 0.8 106 44 71.5 M5 x 0.8 8 125 29 24 63 46 46 61.5 25 58.5 28 M6 x 1.0 138 56 86 M6 x 1.0 10 Model N S TW Z ZZ NL NT P PA PB PP W XB REBH15 REBH25 161 65 194 17.5 15 8 M5 x 0.8 50 62 21 88.5 16.5 209 75 250 23.5 20.5 18 9 Rc 1/8 65 75 27 103 9.5 High Precision Guide

Electric Actuator with Integrated Guide

Description RUN 15 +24V Common The positive common of the input terminal. 1, 14 HOLD 3 The terminal that performs setup operations (actuator starting preparation). 2 Starting preparation STOP 16 SET-UP ALARM RESET 4 The terminal that performs program start. RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed.

Metal Seal/Rubber Seal Series VQ Body Ported

Cylinder port is located at U side of body. 1(P) SUP port 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread P = 11 2-C6 3(R) EXH port Dimensions 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Formula L1 = 11n + 15.5, L2 = 11n + 60 n: Station (Maximum 16 stations) L n L1 L2 (L3) (L4) 191.5 236 262.5 273 180.5 225 250 260.5 169.5 214

Sine Rodless Cylinder Series REA/REB

8 M5 x 0.8 108 48.5 75.5 M5 x 0.8 41.5 53 16 42.5 26.5 22 54 102.5 58.5 10 28 M6 x 1.0 86 56 25 138 M6 x 1.0 61.5 63 46 46 24 125 29 REC Model N NL NT P PA PB PP W XB Z ZZ S TW CY Nil TF TN REAH15 REAH20 REAH25 62 21 161 65 88.5 194 17.5 50 16.5 15 8 M5 x 0.8 CX 50 65 23 169 70 92.5 205 19.5 18 15 8 Rc 1/8 G 1/8 NPT 1/8 75 27 209 75 103 9.5 250 23.5 65 20.5 18 9 G 1/8 Rc 1/8 NPT 1/8

MY1

16 C 3.5 4.5 5.5 6.5 8.5 10.5 12.5 N 20 25 30 37 45 47 50 G 8.5 10.5 16 19 23 25 27.5 GB 16.2 20 24.5 30 36.5 37.5 39.5 H 40 46 54 68 84 107 130 J M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 M14 x 2 M16 x 2 K 10 12 9.5 16 15 28 32 LH 22.5 23 27 35 38 29 32.5 L 80 100 102 132 162 200 230 LD 3.6 4.8 5.6 6.8 8.6 11 13.5 MW 66 80 96 HG 13.5 17 22 27 34.5 45 59 MM M4 x 0.7 M5 x 0.8 M5 x 0.8

7.5

position 3 position 4 position 73 69 57 65 69 46 42 Note) Please contact SMC for the weight of elbow fittings. 2 position SJ3l60-M5 M5 x 0.8 3 position 4 position 65 Note) Please contact SMC for the weight of elbow fittings.

AC Servo Motor Driver

Refer to section 15.1.2 15 2 15.

Air Cylinder Series CM2

+ 45 10 15 Note 1) Note 1) 45 (n = 2, 4, 6) CLJ2 (n 2) 2 50 + 45 (n 2) 15 + 45 D-C7 D-C80 10 15 50 (n = 2, 4, 6) CLM2 D-H7 D-H7W D-H7BAL/H7NF (n 2) 2 60 + 45 (n 2) 15 + 45 10 15 60 CLG1 (n = 2, 4, 6) CL1 D-C73C D-C80C D-H7C (n 2) 2 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) MLGC (n 2) 2 75 + 55 (n 2) 15 + 50 D-B5/B64 D-G5NTL CNG 10 15 75 (n = 2, 4, 6) MNB (n 2) 2 75 + 55 (n 2