Fieldbus System

Refer to page 15 for a table of mountable units. Note 2) Cannot be connected with the EX600-SPR1, EX600-SPR2, EX600-SDN1, or EX600-SDN2.

Large Size Vacuum Module: Series ZR

For nozzle size 18, 20 + with function plate ZR1-SR3-93-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate ZR1-SR3-37-A(a set of six threads) ZR1-SR3-41-A(a set of six threads) 10 ZR1-SR3-42-A(a set of six threads) For nozzle size 18, 20 + with function plate ZR1-SR3-46-A(a set of six threads) When the ejector is compatible

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A SOL.B SOL.A SOL.B (+) () () (+) 15 15 Oki Electric Cable Co,.

SYA3000/5000/7000

Single Double 2 position 0.29 0.18 0.64 0.34 0.72 0.17 0.28 0.15 0.59 0.30 0.59 0.15 C4 Closed center Exhaust center Pressure center 48 SYA320-C4 M5 x 0.8 M5 x 0.8 One-touch 0.35 0.16 0.42 [0.41] 0.34 [0.37] 0.63 0.11 [0.11] 3 position fitting for 4 0.76 [0.46] 0.42 [0.34] 0.21 [0.12] 0.59 0.29 0.15 40 42 Single Double 2 position 0.30 0.19 0.65 0.39 0.76 0.17 0.55 0.24 0.60 0.33 0.76 0.16

5 Port Air Operated Valve SYA3000/5000/7000 Series

Single Double 2 position 0.72 0.18 0.64 0.34 0.29 0.17 0.59 0.15 0.59 0.30 0.28 0.15 Closed center Exhaust center Pressure center C4 48 SYA320-C4 One-touch M5 x 0.8 M5 x 0.8 0.63 0.16 0.42 [0.41] 0.34 [0.37] 0.35 0.11 [0.11] 3 position fitting for 4 0.76 [0.46] 0.21 [0.12] 0.59 0.29 0.42 [0.34] 0.15 40 42 Single Double 2 position 0.76 0.19 0.65 0.39 0.30 0.17 0.76 0.24 0.60 0.33 0.55 0.16

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

PD port specification PV port location when the V port is viewed in front Right side Left side 5 Without PD port With PD port Ejector body gasket for manifold ZQ-3-005-10AS Note 2) Note 1) Refer to pages 15 and 16 for detailed description of How to Order. Note 2) 10 pcs. are included in one set.

Compact Manifold Regulator Series ARM5

P U C S O H L 7 26 (Max. 28) 12 7 IN OUT 12 Panel cutout dimensions 28 ARM10F1-06GPC 08GPC 4 x R1 or less 28 to 28.5 IN OUT 38 58 34 23 20 Plate thickness: Max. 2.1 30 15 6 OPEN 34 14 0.6 0.4 0.2 0.8 1 0 MPa 62 SMC P K U C S O H L 7 26 (Max. 28) 7 IN OUT 12 522 Regulator/Single Unit Type Options Pressure Gauge One-touch Fittings for Regulator VVQ1000-50A C4 Part no.

Valve Single Unit

13 17.5 16 14 12.5 17 15 C4 C6 C8 SS5X5-45S3DStations B2n-One-touch fittings (A, B port) Applicable tubing O.D.: 4, 6, 8 Note) The L1 to L4 dimensions of SS5X5-45S3UStations Bare identical to those of SS5X545S3DStations B-.

Valve Single Unit

M3 Terminal screw Stations n 10 stations 11 12 13 14 15 16 17 stations A: Orange B: Green 248 248 248 260.5 273 285.5 298 310.5 L1 L2 L3 L4 237.5 237.5 237.5 250 262.5 27.5 287.5 300 213 223.5 223.5 234 244.5 255 265.5 286.5 (Rail mounting hole pitch 12.5) 17.5 12 12 13 14 15 16 12 1-6-102 Base Mounted Series SX3000/5000 SS5X3-45T1DStations U(18 pins) C4 C6 2n-One-touch fittings Note) The

0.4

A A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 one-touch fitting C6: 6 one-touch fitting C8: 8 one-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 one-touch fitting Dust-tight, Water-jet-proof 2 L n Dimensions Formula L1 = 16n + 118.5, L2 = 16n + 131 n: Station (Maximum 20 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 (L3) (L4)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

, C6, C8 44.5 Mounting holes 15 7.7 C4: One-touch fitting for 4 C6: One-touch fitting for 6 (2) DIN rail clamp screw C8: One-touch fitting for 8 U side n A 4 B 2 Manual override SY 5 4 P=16 23.9 (L4) (L3) P=16 SYJ L1 L2 3 2n-Rc(PT)1/8 2 P=16 20.4 SX 1 SMC A 4 16.9 18 A 4 B 2 B 2 Stations VK 5 D side 15 7.7 VZ 10 10 Rc(PT)1/8 53 38 VF 84.5 (Singles) 109 (Double) 122 (3 Position) 300 VFR (

5 Port Solenoid Valve SY Series

gasket positioning 21.5 die-cast hole 19 (P, EA, EB port) M5 x 0.8 L plug connector (L): SY3 20-L(-F2) 3 4 5 M plug connector (M): SY3220-M(-F2) C4, N3 C6, N7 C4, N3 C6, N7 M8 connector (W0): SY3 20-W0(-F2) C4, N3 C6, N7 3 4 5 28.5 [35.5] 13.1 (Lead wire length) M8 x 1 33 15.5 Approx. 300 39.6 [46.6] Approx. 300 (Lead wire length) 54.3 [56.5] 117.1 [121.5] 44.4 [46.6] 97.5 [101.9] 46 54.5

Digital Pressure Switch

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes).

Table of Contents

Auto switch 2 15 2 15 Double vane type CDRB2BWU15/20/30-D Single vane type CDRB2BWU20, 30-S Dimensions for double vane type sizes 15, 20, and 30 are the same as those of single type.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Auto switch 2 15 2 15 Double vane type CDRB2BWU15/20/30-D Single vane type CDRB2BWU20, 30-S Dimensions for double vane type sizes 15, 20, and 30 are the same as those of single type.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Auto switch 2 15 2 15 Double vane type CDRB2BWU15/20/30-D Single vane type CDRB2BWU20, 30-S Dimensions for double vane type sizes 15, 20, and 30 are the same as those of single type.

CRB2/CRBU2/CRB1

Port size for CRB2BW10, 15 is M3.

PSxx-OMM0006CN

g -62No.PS-OMM0006CN-E (M8(3 )71 ) 01/N01 5 4 M5/C4/C6 M5 5 -63No.PS-OMM0006CN-E W1/WF1 4 ( ISO228-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1/M5/C4/C6 -68No.PS-OMM0006CN-E + 01/N01 W1/WF1/M5/C4/C6 -69No.PS-OMM0006CN-E 36n +4n -1 -70No.PS-OMM0006CN-E 01/N01 (M8(3 )) 5 4

VCC

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage.