Air Cylinder

10 (12) M5 x 0.8 18 15.5 40 13 14 8 12 2 5.5 6 28 35 5 26 M4 x 0.7 5 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 44 17 16.5 10 14 2 5.5 7 32 40 6 31 M5 x 0.8 5.5 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 53 17 20 12 18 2 6.6 7 38 40 6 38 M5 x 0.8 5.5 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 61 19 26 16 25 2 6.6 8 46

Electric Actuators

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

MGP

A B C 50 56 72 82 98 106 130 142 180 210 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 M4 x 0.7 D By-pass port dia. M5 x 0.8 M5 x 0.8 C 0.2 M6 x 1.0 [Bottom mount] M8 x 1.25 B 0.2 B Pin hole M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 A 0.2 3.

Magnetically Coupled Rodless Cylinder

M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting nuts (2 pcs.) are shipped together.

Air Slide Table Series MXQ

M8 x 1 MXQ 8 (L) M3 x 12 40.8 20 5 7 12 24.5 1.4 14 16.6 12.5 8 12 14.6 MXQ-BS 8 (L) M4 x 12 M8 x 1 MXQ12 (L) M4 x 12 40.8 18 6 9.5 12 29 1.4 14 20.5 11 11 13 18.5 MXQ-BS12 (L) M5 x 16 M10 x 1 MXQ16 (L) M5 x 16 46.7 22 7 11 14 36 1.4 17 23 13.5 13.5 16 21 MXQ-BS16 (L) M6 x 20 MXQ20 (L) M6 x 18 67.3 35 11 13 19 46 12 22 27 17.5 17 22 25 M14 x 1.5 MXQ-BS20 (L) M8 x 20 MXQ25 (L) M8 x 18 67.3

C85

8 10 4 M4 x 0.7 M5 x 0.8 74 7 15 9.5 6 11.5 19 4.2 12 46 28 12 16.7 16 M12 x 1.25 7 5 12 10 10.5 4 M4 x 0.7 M5 x 0.8 74 7 15 9.5 6 11.5 19 4.2 12 46 28 12 16.7 16 M12 x 1.25 7 5 16 12 14 6 M6 x 1 M5 x 0.8 88 10 18.3 10.5 8 12.5 24 6.2 5 17 50 38 16 19.7 22 8 6 M16 x 1.5 16 16 14 6 M6 x 1 M5 x 0.8 88 10 18.3 10.5 8 12.5 24 6.2 5 17 50 38 16 19.7 22 8 6 M16 x 1.5 22 20 17 M8 x 1.25 8 G 1

CG1

/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 106 (114) 16 16 16 16 18 18 22 22 15 (16) 8 10 12 16 20 20 25 30 14 11 11 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 Up to 200 201to350 23 30 16.5 20 26 32 38 50 60 M5 Depth 7.5 5.5 M6 X 0.75 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) Up to 300 301to400 25 25 M5 Depth 8 35.5 44 55 69 80

C85

8 10 4 M4 x 0.7 M5 x 0.8 74 7 15 9.5 6 11.5 19 4.2 46 12 28 12 16 M12 x 1.25 16.7 7 5 12 10 10.5 4 M4 x 0.7 M5 x 0.8 74 7 15 9.5 6 11.5 19 4.2 46 12 28 12 16 M12 x 1.25 16.7 7 5 16 12 14 6 M6 x 1 M5 x 0.8 88 10 18.3 10.5 8 12.5 24 6.2 5 50 17 38 16 22 19.7 8 6 M16 x 1.5 16 16 14 6 M6 x 1 M5 x 0.8 88 10 18.3 10.5 8 12.5 24 6.2 5 50 17 38 16 22 19.7 8 6 M16 x 1.5 22 20 17 8 M8 x 1.25 G 1

Vacuum Pad

flat 15 (Hexagon) 3.5 3.5 3.5 3.5 (12) (12) 5 5 1 1 2.5 2.5 6 10 15 10 ZP2-T06S-B5 ZP2-T08S-B5 ZP2-T04S-B3 Width across flat 5 (Hexagon) M3 x 0.5 M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 7 (Hexagon) 3.5 5 5.5 4 4 5 7 5 7 (10.5) (12) (12) 1 0.8 1 1 1.5 1.5 2.5 4 3 4 6 8 ZP2-T10S-B5 ZP2-T15S-B5 M5 x 0.8 Width across flat 15 (Hexagon) M5 x 0.8 Width across flat 10 (Hexagon

Vacuum Pad

flat 15 (Hexagon) 3.5 3.5 3.5 3.5 (12) (12) 5 5 1 1 2.5 2.5 6 10 15 10 ZP2-T06S-B5 ZP2-T08S-B5 ZP2-T04S-B3 Width across flat 5 (Hexagon) M3 x 0.5 M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 7 (Hexagon) 3.5 5 5.5 4 4 5 7 5 7 (10.5) (12) (12) 1 0.8 1 1 1.5 1.5 2.5 4 3 4 6 8 ZP2-T10S-B5 ZP2-T15S-B5 M5 x 0.8 Width across flat 15 (Hexagon) M5 x 0.8 Width across flat 10 (Hexagon

Vacuum Pad

flat 15 (Hexagon) 3.5 3.5 3.5 3.5 (12) (12) 5 5 1 1 2.5 2.5 6 10 15 10 ZP2-T06S-B5 ZP2-T08S-B5 ZP2-T04S-B3 Width across flat 5 (Hexagon) M3 x 0.5 M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 7 (Hexagon) 3.5 5 5.5 4 4 5 7 5 7 (10.5) (12) (12) 1 0.8 1 1 1.5 1.5 2.5 4 3 4 6 8 ZP2-T10S-B5 ZP2-T15S-B5 M5 x 0.8 Width across flat 15 (Hexagon) M5 x 0.8 Width across flat 10 (Hexagon

Vacuum Pad

flat 15 (Hexagon) 3.5 3.5 3.5 3.5 (12) (12) 5 5 1 1 2.5 2.5 6 10 15 10 ZP2-T06S-B5 ZP2-T08S-B5 ZP2-T04S-B3 Width across flat 5 (Hexagon) M3 x 0.5 M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 7 (Hexagon) 3.5 5 5.5 4 4 5 7 5 7 (10.5) (12) (12) 1 0.8 1 1 1.5 1.5 2.5 4 3 4 6 8 ZP2-T10S-B5 ZP2-T15S-B5 M5 x 0.8 Width across flat 15 (Hexagon) M5 x 0.8 Width across flat 10 (Hexagon

NCG/CG1

I J 26 37 25.3 5 12.5 8 14 15.5 Up to 350 18 13 12 2 12 12 35 M4 x 0.7 depth 7 20 31 40 28.3 6 12.5 10 16.5 19.5 Up to 400 22 17 14 2 12 12 40 M5 x 0.8 depth 7.5 25 43 38 31.3 12 12 6 20 19.5 Up to 450 22 17 18 2 12 12 40 M5 x 0.8 depth 8 32 52.5 47 38.3 16 15 8 26 27 Up to 800 30 19 25 2 13 13 50 M6 x 1 depth 12 40 58.5 58 44.5 20 16.5 11 32 32 Up to 1200 35 27 30 2 14 14 58 M8 x 1.25 depth

ZP

K 46 29.9 21 2.5 10 8 M5 x 0.8 16 46.5 30.4 21.5 20 25 57.6 39.8 29 3.5 12 12 M8 x 1.25 32 58.1 40.3 29.5 10 13 B5 M5 x 0.8 5 D2 Width across flats H 46 29.9 21 2.5 N S U F GN GS 10 8 M5 x 0.8 16 46.5 30.4 21.5 20 25 57.6 39.8 29 3.5 12 12 M8 x 1.25 32 58.1 40.3 29.5 40 60.6 42.8 32 4 50 61.6 43.8 33 20 25 B8 04 06 08 Construction p. 117 ZP R C B6 M6 x 1 6 Adapter Assembly p. 122 57.6 39.8

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

I J 25.3 37 26 5 14 8 12.5 15.5 Up to 350 18 13 12 2 12 12 35 M4 x 0.7 depth 7 20 40 31 28.3 10 12.5 6 16.5 19.5 Up to 400 22 17 14 2 12 12 40 M5 x 0.8 depth 7.5 25 38 43 12 6 31.3 12 19.5 20 Up to 450 22 17 18 2 12 12 40 M5 x 0.8 depth 8 32 47 8 38.3 52.5 15 27 26 16 Up to 800 30 19 25 2 13 13 50 M6 x 1 depth 12 40 44.5 58.5 58 11 32 20 16.5 32 Up to 1200 35 27 30 2 14 14 58 M8 x 1.25 depth

Air Fittings & Tubing

KQ2U23-M5 38 34.5 2.2 2.2 9 M5 X 0.8 10 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 1 8 KQ2U23-01S KQ2U23-02S 11 14 1 4 39.5 KQ2U04-M5 M5 X 0.8 M6 X 1.0 4 2.2 2.2 Kl KQ2U04-M6 40 36 10 11 10.4 16 4 10.4 1 8 42 38 KQ2U04-01S 4.2 4.2 11 Ml 1 4 KQ2U04-02S 46 40 20 14 42.5 KQ2U06-M5 M5 X 0.8 M6 X 1.0 2.2 2.2 12 KQ2U06-M6 43 39 13 Hl 1 8 12.8 45.5 41.5 KQ2U06-01S 12.8 11 17 6 1 4 49 43 17

Electric Actuator with Integrated Guide

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 M Model 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Controller Connectors

Table of Contents

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Metal Seal/Rubber Seal Series VQ Body Ported

C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L L1 L2 L3 31 50 60.5 75 100 110.5 53 75 85.5

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 5 +0.030 0 NA x M6 x 1 thread depth 6 M 37 25 KA 6.5 12 Bottom view of MXQ20-50 132225 K 12 48 36 6.5 12 43.5 0.5 6.5 46 Z ZZ H G (NN 1) x H 26 10.5 26 10.5 A B 9.5 5.1 5.1 11 11 29 1.5 A B NN x M6 x 1 thread depth 12 6 5H9 ( ) depth 5 +0.030 0 GA HA B-B A-A 5H9 ( ) depth 5 +0.030 0 (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56