Vacuum Pad

ZP2-TB20MB-H5 ZP2-TB06MB-B5 ZP2-TB08MB-B5 15 M5 x 0.8 11 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) 2.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 2.5 Width across flat 3 (Hexagon) (18) 5 5.5 5.5 3.5 (14.5) Width across flat 3 (Hexagon) (17) 8 8 (17) 13 11 18 9 9 14.4 9.6 8.4 5.5 4.5 4 4 20 15 2 2 21 3.3 4.7 16 8 6 9 7 15 Symbol/Type Bellows Pad ZJ: Bellows 2, 4, 5, 6, 40, 46 Pad diameter

Vacuum Pad

ZP2-TB20MB-H5 ZP2-TB06MB-B5 ZP2-TB08MB-B5 15 M5 x 0.8 11 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) 2.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 2.5 Width across flat 3 (Hexagon) (18) 5 5.5 5.5 3.5 (14.5) Width across flat 3 (Hexagon) (17) 8 8 (17) 13 11 18 9 9 14.4 9.6 8.4 5.5 4.5 4 4 20 15 2 2 21 3.3 4.7 16 8 6 9 7 15 Symbol/Type Bellows Pad ZJ: Bellows 2, 4, 5, 6, 40, 46 Pad diameter

Vacuum Pad

ZP2-TB20MB-H5 ZP2-TB06MB-B5 ZP2-TB08MB-B5 15 M5 x 0.8 11 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) 2.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 2.5 Width across flat 3 (Hexagon) (18) 5 5.5 5.5 3.5 (14.5) Width across flat 3 (Hexagon) (17) 8 8 (17) 13 11 18 9 9 14.4 9.6 8.4 5.5 4.5 4 4 20 15 2 2 21 3.3 4.7 16 8 6 9 7 15 Symbol/Type Bellows Pad ZJ: Bellows 2, 4, 5, 6, 40, 46 Pad diameter

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

11 11 12 13 13 M5 x 0.8 M6 x 0.75 M8 x 1.0 M10 x 1.25 M12 x 1.25 M14 x 1.5 106 111 113 130(139) 150(162) 150(162) 5 6 6 8 11 11 M4 x 0.7 depth 7 24 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 69 69 71 78(87) 90(102) 90(102) 11 11 10 10(12) 12(13) 12(13) 26 31 38 47 58 72 19.5 16.5 11 M5 x 0.8 depth 7.5 29 19.5 20 12 M5 x 0.8 depth 8 35.5 Up to 300(500) 27 26 16 M6 x 1 depth

Electric Actuators

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 LJ1 LG1 LC1 LX LC6D/LC6C Switches 17.5 17.5 17.5 7.5 18 12 11 Model M 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Controller Connectors These are connectors 'all halfpitch type' used for CN1 (control input/output) and CN2 (general purpose input/output).

MGP

, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 x 0.8 M5 x 0.8 M5 x 0.8 15 10 19 53 37 10.5 M5 x 0.8 M5 x 0.8 Rc 1/8 12.5 10.5 25 53.5 37.5 11.5 M6 x 1.0 M6 x 1.0 Rc 1/8 12.5 13.5 28.5 WA WB Bore size (mm) Q R S T U VA VB X XA XB YY YL Z 30st or less Over 30st to 100st Over 300st 30st or less Over 30st to 100st 23 24 28 34 Over 100st to 200st 200

Air Slide Table Series MXQ

11 13 18.5 MXQ-BS12 (L) M5 x 16 M10 x 1 MXQ16 (L) M5 x 16 46.7 22 7 11 14 36 1.4 17 23 13.5 13.5 16 21 MXQ-BS16 (L) M6 x 20 MXQ20 (L) M6 x 18 67.3 35 11 13 19 46 12 22 27 17.5 17 22 25 M14 x 1.5 MXQ-BS20 (L) M8 x 20 MXQ25 (L) M8 x 18 67.3 35 12 16 19 54 12 22 33 18 19 22 31 M14 x 1.5 MXQ-BS25 (L) 1) Size of hexagon socket head cap screw 2) It is also available in the symmetric type.

Air Fittings & Tubing

KQ2U23-M5 38 34.5 2.2 2.2 9 M5 X 0.8 10 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 1 8 KQ2U23-01S KQ2U23-02S 11 14 1 4 39.5 KQ2U04-M5 M5 X 0.8 M6 X 1.0 4 2.2 2.2 Kl KQ2U04-M6 40 36 10 11 10.4 16 4 10.4 1 8 42 38 KQ2U04-01S 4.2 4.2 11 Ml 1 4 KQ2U04-02S 46 40 20 14 42.5 KQ2U06-M5 M5 X 0.8 M6 X 1.0 2.2 2.2 12 KQ2U06-M6 43 39 13 Hl 1 8 12.8 45.5 41.5 KQ2U06-01S 12.8 11 17 6 1 4 49 43 17

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) 34.5 28 R P 26.5 B B B B B B B B 18.5 11 Note 2) P = 10.5 18.4 6 2n-C3, C4, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 M5: M5 thread (7.5) This drawing shows the case of VV5Q04-T2-D.

Table of Contents

74 226 187 38 110 235 93 96 70 50 20 11 115 44.5 3.3 11 6.4 84 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Basic type / Direct mount type Series CY3B/CY3R

54 63 HA 33.5 42.5 46 HB 33.5 41.5 46 HC 45 53 61.5 HG 17 16 25 HP 42 50 58.5 HT 19 23.5 28 J M5 x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc1/8 Rc1/8 PA 50 50 65 PB 62 65 75 PP 21 23 27 S 161 169 209 TW 65 70 75 W 88.5 92.5 103 XA XB

AC Servo Motor Driver

44 140 70 M5 M4 12 33 12.

MY1

14 17 19 C 3.5 4.5 5.5 6.5 8.5 10.5 12.5 G 8.5 10.5 16 19 23 25 27.5 GB 16.2 20 24.5 30 36.5 37.5 39.5 H 40 46 54 68 84 107 130 J M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 M14 x 2 M16 x 2 K 10 12 9.5 16 15 28 32 L 80 100 102 132 162 200 230 LD 3.6 4.8 5.6 6.8 8.6 11 13.5 LH 22.5 23 27 35 38 29 32.5 HG 13.5 17 22 27 34.5 45 59 MM M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5

Mechanically Jointed Rodless Cylinder Series MY1

9 16 40 10 M5 x 0.8 3.5 80 40 60 7 M4 x 0.7 20 14 MY1H16 27.8 27 37 100 7.5 4.5 12.5 12.5 17.5 46 12 M6 x 1 4.5 100 50 78 8 M5 x 0.8 25 17.5 MY1H20 34 33.5 45 (mm) PA PB PG Q PP QW QQ RR SS TT UU WW Model PC PD PE PF VV XX YH Z 40 40 3.5 153 7.5 30 9 11 3 9 10.5 7.5 MY1H16 7.5 21 9 3.5 10 22 25 160 50 40 4.5 191 11.5 36 11 14.5 5 10.5 12 10.5 MY1H20 14.5 27 12 4.5 12.5 24 31.5 200 Y 2 x d

Electric Actuator with Integrated Guide

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 M Model 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Controller Connectors

ZP

M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33

Air Cylinder Series CM2

x 0.8, 1/8 Note 1) M5 x 0.8, 1/8 Note 1) 1/4 1/4 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 M5 x 0.8 Female thread Male thread Rod end thread Note 1) Only 5 stroke comes with M5 x 0.8 in the case of no auto switch on 32. +1.0 0 mm Stroke tolerance Port size Vacuum port, Relief port M5 x 0.8 M5 x 0.8 1162 Series 10-, 11-CM2X Microspeed Cylinder for

Sine Rodless Cylinder Series REA/REB

0.5 4.5 3.5 26 M5 x 0.8 4 38 9 REAR15 21 18 54.5 18 25 98 84 7 M4 x 0.7 6 4.3 32 M5 x 0.8 5 53 14 REAR20 20.5 22 64 40 17 NPT 1/8 107 95 7 M4 x 0.7 7 5.6 38 Rc 1/8 5 62 11 REAR25 21.5 28 72 40 20 NPT 1/8 105 7 117 M5 x 0.8 6.5 5.6 43 Rc 1/8 G 1/8 6 70 15 REAR32 24 35 79 26 50 NPT 1/8 116 130 7 M6 x 1 8.5 7 54 Rc 1/8 G 1/8 7 76 13 REAR40 26 40 93 34 60 NPT 1/4 148 134 7 M6 x 1 11 7 64

AC Servo Motor Driver (Pulse input type/Positioning type ）

) (Note 11) (Note 11) PD44 38 I (Note 11) (Note 11) (Note 11) PD46 39 40 41 I DI1 DI1 DI1 PD14 42 I EM2 EM2 EM2 43 I LSP LSP LSP PD18 44 I LSN LSN LSN PD20 45 I DOG DOG SIG PD22 46 DOCOM DOCOM DOCOM 47 DOCOM DOCOM DOCOM 48 O ALM ALM ALM 49 O RD RD RD PD28 50 16 19 16.

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62