ZR

Supply pressure (MPa) Suction flow (l /min (ANR)) 13-3-11 11 Series ZR Ejector exhaust Ejector supply P port Vacuum pad connection V port Ejector Unit Nozzle Dia./1.0, 1.3, 1.5, 1.8, 2.0 mm Circuit diagram 2 2 Adapter B Silencer Ejector indication Nozzle dia./1.0, 1.3, 1.5 mm ZR1-W 1 10 13 15 2 Ejector 1 1 1 1 (Mounting hole) 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

Intrinsically Safe Valve

0.27] 2position 0.75 0.36 0.19 3.8 3.2 0.34 0.82 0.26 0.86 53-SY5 20-C4 C10 10 Onetouch fitting 0.78 [0.71] 0.27 0.44 [0.37] 0.57 0.21 [0.18] 0.84 2.8 0.59 0.27 0.21 0.67 2.4 53-SY7 20-C10 3position 4position dual 3 port 2.7 [2.0] 0.38 [0.38] 0.70 [0.56] N.C.

Compact Manifold Regulator Series ARM5

End plate L 11 1 No.

Large Size Vacuum Module: Series ZR

Vacuum release ON OFF OFF OFF ON OFF Combination Symbol : C4 Feature: Adsorption of workpieces and release of vacuum are switched by double solenoid valve.

Valve Single Unit

(One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size A, B port 2 to 10 stations: W = 22n + 118 11 to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W = 47n + 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations

Valve Single Unit

Gasket Series Round head combination screw SX3000 SX3000-22-2 (M2 x 24) M3 x 30 (Matt nickel plated) M4 x 35 (Matt nickel plated) Gasket SY3000-11-25 SX5000 SY5000-11-15 SX7000 SY7000-11-11 1-6-67 SX3000: SS5X3-41PStations -M5/C4/C6 M5 (Pitch) (Pitch) 2n-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 Manual override (Pitch) (Mounting hole) Triangle mark (P , EA, EB port) Manual

0.4

Product Precautions DIN rail clamp screw Stations 1 2 3 D side U side 2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 31 42

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) When specifying more than one option, indicate them alphabetically. 1.12-55 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 VV5QZ25C C Station Port size 33 (11) Grommet(G) (35) 25 (7.5) C6: One-touch fitting for 6 C4: One-touch fitting for 4 01: Rc(PT)1/8 2n-01, C4, C6 11 11.8 7.4 25.5 Mounting holes (5.5) U Side n B 2 A 4 5 Manual override 4 (L4) (L3) L1 L2 3 P=16 21.7 2 P=16

Table of Contents

S page 11-3-4.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

S page 11-3-4.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

S page 11-3-4.

VCC

Indication of A B C D E F T VCKK1209-02F VCKK1008-02F VCKK1075-02F VCKK0806-02F VCKK0604-02F 12/9 13 49.5 10 19 18.5 9 to 12 Nm 10/8 11 48.5 9 17 18.5 6 to 9 Nm 1075 11 48.5 9 17 18.5 6 to 9 Nm 8/6 9 46 8 14 16 4 to 9 Nm 6/4 7 45.5 8 12 15 3 to 8 Nm 652 Valve for Water and Chemical Base Fluids VCC Series Dimensions VCKL 90 swivel elbow Approx. E A 10 Width across flats G Approx.

CRB2/CRBU2/CRB1

This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) (mm) Size N M Q Size d 10 9.5 8.5 M3 15 3.4 15 Body (A) 10 11 M3 20 4.5 20 A port B port A port 13 14 M5 B port Q N 30 5.5 30 14 15.5 M5 (Standard) (Altered) 40 5.5 M 40 20 21 M5 (Top view from long-shaft side) 31 Series CRB2 Symbol: C4 Symbol: C3 Applicable to single vane type only Change

PSxx-OMM0006CN

g -62No.PS-OMM0006CN-E (M8(3 )71 ) 01/N01 5 4 M5/C4/C6 M5 5 -63No.PS-OMM0006CN-E W1/WF1 4 ( ISO228-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1/M5/C4/C6 -68No.PS-OMM0006CN-E + 01/N01 W1/WF1/M5/C4/C6 -69No.PS-OMM0006CN-E 36n +4n -1 -70No.PS-OMM0006CN-E 01/N01 (M8(3 )) 5 4

ARM10/11

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

ARM10/11

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

Digital Pressure Switch

Piping specifications Model No. 01 N01 Port size R1/8 NPT1/8 (with M5 female thread) (with M5 female thread) Pressure sensing part Silicone of wetted Material parts Piping port C3602 (electroless nickel plating) O-ring: HNBR Weight 45 g 46 g -63No.PS-OMM0007-I Dimensions (Refer to page 72 for products with M8 (3 pin) connector) 01/N01 type C4/C6 type -64No.PS-OMM0007-I W1/WF1 type -65No.PS-OMM0007

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

C6 :One-touch fitting 6 VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Indication of A B C D E F T VCKK1209-02F VCKK1008-02F VCKK1075-02F VCKK0806-02F VCKK0604-02F 12/9 13 49.5 10 19 18.5 9 to 12 Nm 10/8 11 48.5 9 17 18.5 6 to 9 Nm 1075 11 48.5 9 17 18.5 6 to 9 Nm 8/6 9 46 8 14 16 4 to 9 Nm 6/4 7 45.5 8 12 15 3 to 8 Nm 14 Valve for Water and Chemical Base Fluids VCC Series Dimensions VCKL 90 swivel elbow Approx. E A 10 Width across flats G Approx.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4