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Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

(mm) Connection threads Connection threads Model Model KGU04-M5 M5 x 0.8 M5 x 0.8 KGT04-M5 4 4 -01 R 1/8 R 1/8 -01 -02 R 1/4 R 1/4 -02 KGU06-M5 M5 x 0.8 KGT06-M5 M5 x 0.8 -01 R 1/8 R 1/8 -01 6 <M5 type> 6 <M5 type> -02 R 1/4 R 1/4 -02 -03 R 3/8 R 3/8 -03 KGU08-01 R 1/8 R 1/8 KGT08-01 8 8 -02 R 1/4 R 1/4 -02 -03 R 3/8 R 3/8 -03 KGU10-02 R 1/4 R 1/8 KGT10-01 10 -03 R 3/8 R 1/4 -02

Individual air supply port PV Individual air supply port PV Adapter D Adapter D M5 (or M6) Pitch = 21 Individual air supply port (PV port) M5 (or M6) Individual air supply port (PV port) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) (or M6) Vacuum pad connection port (V port) M5 x 0.8 M5 x 0.8 (or M6) Adsorption nozzle piping port 13-2-35 35 Series ZX Vacuum pad connection

M5 M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46

Tightening torque recommended (M5: 1.5 to 2 Nm, R1/8: 7 to 9 Nm) For sealing, use a pipe tape.

Metric size Inch size 23 04 06 08 10 12 Thread type 01 03 05 07 09 11 13 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 Port size M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N Use 1/8" tube.

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

The parameter No.PC07 (home position return position data) setting value is the positioning address after the home position return is completed. 5 46 5.

44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc 1/8 Rc 1/8 Z 194 205 250 XB 9.5 XA 11.3 W 88.5 92.5 103 TW 65 70 75 S 161 169 209 PP 21 23 27 PB 62 65 75 PA 50 50 65 ZZ 17.5 19.5 23.5 CY1H15 CY1H20 CY1H25 8-15-78 78

The parameter No.PC07 (home position return position data) setting value is the positioning address after the home position return is completed. 5 46 5.

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

M1 AS131FG-M5-23 AS131FG-U10/32-01 19.8 19.8 3.2 8.4 1/8" 8.4 17.5 28.7 28.7 12.7 17.5 7 12.7 AS131FG-M5-04 AS131FG-U10/32-03 28.6 M5 0.8 25.8 20.3 20.3 4 9.3 5/32" 9.3 9.6 9.3 7 8 25 22.2 10.8 28.6 25.8 10-32 UNF 22.2 25 9.6 9.3 10.8 8 AS131FG-M5-06 AS131FG-U10/32-05 20.6 31.8 34.5 13.5 23.3 21.4 21.3 6 11.6 3/16" 11.4 16.5 8 AS231FG-01-23 AS131FG-U10/32-07 31.9 20.7 24.4 21.6 3.2 8.4 1

Q R R 53.5 56.5 56.5 59 59 R 69.5 72.5 72.5 75 75 M 12.8 19 23 19 23 Q 42 52 55 58 61 S Q 41 51 54 57 60 S K 6 8 8 8 8 J M4 M5 M5 M5 M5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 46 56 59 62 65 30 40 45 50 45 50 18 22 30 22 30 68 78 85 85.5 92 9 10.5 14 10.5 14 19.5 27 30 33 33 36 36 48.5 51.5 51.5 54 54 41 51 54 57 60 65.5 68.5 68.5 71

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

Applicable Fittings: KQ2H, KQ2S Series Series Model Piping port Port size Fittings Applicable tubing O.D. 2 3.2 4 6 8 10 12 SY3l30-ll-M5 4A, 2B M5 KQ2H KQ2S 1P, 5EA, 3EB 1/8 KQ2H KQ2S X, PE M5 KQ2H KQ2S SY3000 SS5Y3-50/51/52 (R) Manifold base 1/8 KQ2H KQ2S 4A, 2B M5 KQ2H KQ2S Series Model Piping port Port size Fittings Applicable tubing O.D. 2 3.2 4 6 8 10 12 SY5l30-ll-01 4A, 2B 1/8 KQ2H

Kodanska 46, CZ-100 10 Prague 10 Phone: 02-67154 790, Fax: 02-67154 793 Hungary SMC Hungary Kft. Budafoki ut 107-113, 1117 Budapest Phone: 01-204 4366, Fax: 01-204 4371 Sweden SMC Pneumatics Sweden A.B. Ekhagsvgen 29-31, S-14105 Huddinge Phone: 08-603 07 00, Fax: 08-603 07 10 Ireland SMC Pneumatics (Ireland) Ltd. 2002 Citywest Business Campus, Naas Road, Saggart, Co.

19 22 M L A 12 46 58 25 H Reference dimension for R threads after installation Connection threads Note 1) Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm2 D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection thread R Weight g M L2 D2 L1 M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure