5-Port Solenoid Valve

or less 22 or less 18 or less 14 or less 18 or less 14 or less Metal seal SY33/4/5l1 18 or less 22 or less 18 or less 14 or less 18 or less 14 or less Rubber seal SY3A/B/Cl0 4-position dual 3-port valve 18 or less 22 or less 18 or less 15 or less 19 or less 15 or less With Residual Pressure Release Valve SY3000 Vacuum Release Valve with Restrictor Rubber seal SY51l0 2-position single 24

42

53 Bottom ported drawing 1/2" 1(P), 4(A), 2(B) port M5 x 0.8 ground screw 4(A), 2(B) port SMC 31.5 37 41 50 98 G1/2 Electrical entry PE X 26.5 16 P R1 R2 18.4 18 27.5 1/8" PE. port 27.5 1/8" External pilot port 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-position double: VQ520 0 1 3-position closed center: VQ530 0 1 3-position exhaust center: VQ540 0 1 3-position pressure center:VQ550

CL

locking port Pneumatic locking and spring and pneumatic locking M5 x 0.8 unlocking port Unlocked when pressurized Lock nut 6 71 46 M5 x 0.8 Rod side cylinder port 31 20 14 M14 x 1.0 M6 x 1.0 M5 x 0.8 Head side cylinder port 5 48.5 6.5 34 5 6 50.5 18 Width across flats 10 20 32 18 2.3 2-5.5 Mounting hole 6 9 9.5 11.5 111 + Stroke 150 + Stroke 65 18 32 39 9-2-14 13 Series CLJ2 Fine Lock Cylinder

NCG/CG1

WH Rod End Lock: -R Head End Lock: -H Bore size (mm) Bore size (mm) WH W P WA WB WH W P WA WB 20 M5 x 0.8 16 15(16) 30 M5 x 0.8 16 16 30 23 23 20 25 M5 x 0.8 16 15(16) 30 30 M5 x 0.8 16 16 25 25 25 32 Rc 1/8 16 15(16) 25 Rc 1/8 16 16 25 28.5 28.5 32 40 20 Rc 1/8 16 15(16) Rc 1/8 16 16 20 33 33 40 50 20 Rc 1/4 18 17(18) 40.5 Rc 1/4 18 18 20 40.5 50 63 47.5 20 Rc 1/4 18 17(18) Rc 1/4 18 18

AS

With One-touch fitting Port size M3 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Thread type M5 Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT AS U10/32 01 02 03 04 Nil ASP N ASN Needle Valve/Flow Characteristics AQ AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01

SYJ300/500/700

0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5

Vacuum Module Series ZX

hole) 41.6 (Release to atmospheric pressure) ZMA Release pressure SUP port (PD) M5 (or M6) Plug (1) 19 13.6 ZQ Pressure sensor Vacuum switch (ZSE2) ZH Vacuum port (V) M5 (or M6) Filter unit (F) ZU Filter + O ZL Air pressure SUP port (P) M5 (or M6) 2 x 3.3 (Mounting hole) 59.5 50 ZY 63.5 57.6 10.2 PD 6.5 ZF 4 18 P 18 6 V ZP 4.2 17.6 10 10 Bracket A (ZX1-OBA) (Standard accessory) 57.1 54.6

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

AC

VE Description 0 1 M5 01 0 1 VY110 01 02 0 1 VY120 01 02 0 1 VY130 02 03 04 0 1 02 03 04 0 1 04 06 10 0 1 VY140 VY170 10 12 0 1 VY190 14 20 0 1 VY1D00-M5 VY1A0 -M5 VY150 VY1B0 VY VEX1-18-1 VEXA-18-2 VEX3-32 VEX5-32 VEX7-32 VEX9-32 B Braket (with bolt, washer) G VEX1-18-2 VEXA-18-3 F G36-10-01 G46-10-01 G G27-10-01 Pressure gauge G27-10-R1-X207 AL Pilot EXH. port silencer N AN120-M5 AN101-

Free Mount Cylinder

Note) 16 16 19 21.5 22 22.5 7 10 11 12 15.5 19.5 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 7 7 7 9 10 11 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 12.5 14 18 22 5 6 8 10 4 9 9 13.5 2 4.5

AC Servo Motor Driver

44 140 70 M5 M4 12 33 12.

ZX

41 1 trimmer Pressure sensor 51 Filter unit (F) M5 x 0.8 External release port 3.6 (Mounting hole) Vacuum switch 1 10 19 13.6 2-R1.8 (Mounting hole) Vacuum switch Supply valve Air operated Release valve External release Release flow rate adjusting needle Interface plate (63.5) 18 15.5 4 2-3.3 Mounting hole M5 (or M6) (PE port) M5 (or M6) (PV port) Vacuum supply pressure port (V port) Vacuum

3 Port Air Operated Valve Series SYJA300

0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

Electric Actuator/Slider Type

Weight [g] Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 8 8 7 Precautions Caution 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

Modular F.R.L. Units

33 5.5 12 3.5 29 AC25-B 1/4, 3/8 1/8 167.4 115.1 38.1 30 55.1 80 27.5 0 41 57.2 35 7 14 4 41 AC30-B 1/4, 3/8 1/8 167.4 115.1 38.1 30 55.1 80 29.4 3.5 41 57.2 35 7 14 4 41 AC40-B 1/4, 3/8, 1/2 1/8 220.4 147.1 39.8 38.4 72.6 110 33.8 3.5 50 75.2 40 9 18 5 48 AC40-06-B 3/4 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 AC50-B 3/4, 1 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2

Magnetically Coupled Rodless Cylinder

x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc1/8 Rc1/8 PA 50 50 65 PB 62 65 75 PP 21 23 27 S 161 169 209 TW 65 70 75 W 88.5 92.5 103 XA XB Z 194 205 250 ZZ 17.5 19.5 23.5 CY1H15 CY1H20 CY1H25 11.3 9.5 D-X Individual -X Technical data

Modular F.R.L. Unit

AC30 AC40 AC40-06 AC50 AC55 AC60 87 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 41.5 43 30 24 33 12 5.5 50 29.5 5.5 3.2 65 2 Note 1) 141 123 36 80 126 55 57 41 35 14 7 71 28.5 7 4 64 0 194 153 38 80 167 55 57 41 35 14 7 7 4 71 66 30.5 3.5 194 153 38 80 167 72.5 75 50 40 18 9 9 4 88 74 35 3.5 226 187 40 105 220 77.5 80 50 40 18 9 88 35 9 4.6 74 3 226 187 38 105 235

AC Servo Motor Driver (Pulse input type/Positioning type ）

Bit CN1 connector pin Bit CN1 connector pin Bit CN1 connector pin Bit CN1 connector pin 0 43 8 18 16 24 1 44 9 45 17 25 2 42 10 18 26 3 15 11 19 27 4 19 12 20 28 5 41 13 21 29 6 16 14 22 30 7 17 15 23 31 14 27 14.

Electric Actuator

[mm] Step motor Servo motor Stroke range (mm) C B D EH EV H J K L M O1 R S T U Size A 10 to 100 166.3 167 92 16 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 35.5 0.5 10 101 to 300 186.3 187 112 15 to 100 195.4 191.6 115.5 25 M8 x 1.25 M5 x 0.8 20 44 45.5 24 17 14.5 34 8 45 46.5 1.5 13 101 to 400 220.4 216.6 140.5 20 to 100 216.9 128 32 M8 x 1.25 M6 x 1 25 51 56.5 31 22 18.5 40 10 60