3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

146 154 175 185.5 14 156.5 164.5 187.5 198 7 83 91 112.5 123 8 93.5 101.5 125 135.5 9 104 112 137.5 148 3 41 49 75 85.5 4 51.5 59.5 87.5 98 5 62 70 100 110.5 6 72.5 80.5 100 110.5 L1 L2 L3 L4 1.12-48 VQZ1000/2000/3000 Base Mounted VQZ2000 VV5QZ25 C Station Port size 41 (12) Grommet (G) (35) (5.5) 33 (7.5) 2n-C4, C6, C8 44.5 Mounting holes 15 7.7 C4: One-touch fitting for 4 C6: One-touch

SZ3000

Double wiring specification specification 12 13 12 13 12 stations 12 stations 13 stations 13 stations Specified wiring Note 2) Specified wiring (up to 25 solenoids possible) ... ... ... ...

Metal Seal/Rubber Seal Series VQ Body Ported

, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

SZ3000

Co., Ltd. 1-3-12 13 Cassette Type Manifold Plug-in Type Series SZ3000 Manifold Electrical Wiring Type 60F D-sub Connector Type (25 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common 13 13 13 Common Positive pin (Common) Positive pin SOL.B Station 12 12 25 12 25 12 25 SV SOL.A Light/Surge voltage suppressor Negative pin Negative pin (Common) 24

Table of Contents

unit (digit) T 16-13-4 Temperature characteristics The amount of leakage TSJ 16-13-5 E N Ejector 16-13-3 U Noise resistance Non reversed output mode Normal mode NPN output 16-13-4 F Unit conversion URJ 16-13-5 F.S.

SZ3000

137.5 118 15 160.5 150 128.5 16 173 162.5 139 17 173 162.5 149.5 12 185.5 175 160 13 123 112.5 97 13 135.5 125 107.5 14 External Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 135.5 125 107.5 14 148 137.5 118 15 160.5 150 128.5 16 173 162.5 139 17 173 162.5 149.5 12 185.5 175 160 13 198 187.5 170.5 14 210.5 200 181 15 223

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Internal Pilot Manifold L Dimension n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VK VZ Note) For VQZ100, refer to page 4-14-13.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Fieldbus System

U U side (2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 20 stations) 16 16 stations 02 2 stations Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations A, B port size (Metric) A, B port size (Inch) Symbol A, B port P, E port Applicable series C3 3.2 One-touch fitting 8 One-touch fitting SV1000 C4 4 One-touch fitting C6 6 One-touch fitting C4 4 One-touch

Intrinsically Safe Valve

53-SS5Y5-41-05-01 1 set (Type 41, 5 station manifold base part no.) 53-SY5240-LL3 2 sets (Double solenoid part no.) 53-SY5140-LL3 2 sets (Single solenoid part no.)

Table of Contents

13 14 0.004 0.012 0 0.036 4 9 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 6 14 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 8 16 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5 x 0.8 4.5 2 17.5 8 12 11

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

C6: One-touch fitting for 6 VVQZ200-10A-2 VV3QZ22-05C 2.10-13 VQZ100/200/300 Body Ported Dimensions: VQZ100 VV3QZ12C Station (5.5) (35) Grommet (G) (11) 27 2-4.5 Mounting holes n-C3, C4, C6, M5 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

CRB2/CRBU2/CRB1

8.5 9.5 10.5 10.5 0.004 0.012 0 0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 0.004 0.012 0 0.043 14 6 17 34.5 M4 x 0.7 0.5 42 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 12 13 0.005 0.014 0 0.043 16 8 1 17.5 4.5 47.5 M5 x 0.8 50 13 22 2 8 12 43 5.5 M5 x 0.8 29 42 52 69 M5 x 0.8 15.5 14 41 Series CRBU2 Dimensions: 10, 15,

Base Mounted Metal Seal/Rubber Seal Series VQ

TERMINANAL 2n-C3, C4, C6, C8 P = 16 41 23 <137.5> C3: One-touch fitting for 3.2 128 C8: One-touch fitting for 8 C6: One-touch fitting for 6 C4: One-touch fitting for 4 126 P (SUP) port 2-C10 80 6.5 < >: AC Dimensions Formula L1 = 16n + 118.5, L2 = 16n + 131 n: Station (Maximum 10 stations) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L n L1 L2 (L3) (L4) 150.5 163 187.5 198 166.5 179 200

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

13 14 0.004 0.012 0 0.036 9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 12 5 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 14 6 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 16 8 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5 x 0.8 2 4.5 17.5 8 12 11

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

13 14 0.004 0.012 0 0.036 4 9 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 6 14 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 8 16 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5 x 0.8 4.5 2 17.5 8 12 11

Vacuum System Peripherals:

ZSE30/ZSE40/ZSE5B 13-14-9 2. ZSE6B/ZSE3/ZSE1/ZSE2 13-14-10 3. PS1100/ZSP1/PSE200/530 13-14-11 Misc. Pressure gauge for vacuum: GZ46 13-14-12 Pressure Gauge for Vacuum Related Products: Air Line Equipment/Modular Type 1. Air filter: Series AF 13-14-13 2. Regulator: Series AR 13-14-13 3. Filter regulator: Series AW 13-14-13 4.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10