The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BASE MT, CLEAN ROOM, VALVE, SS5YJ3 MFLD SYJ3000, U5, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD ASSY, CLEAN ROOM, VALVE, SS5YJ3 MFLD SYJ3000, U5, SS5YJ3 BUILT IN FITTING

SV

30% 10% 30% 50% 70% SY 600 300 50% Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% 30% AS2201F -02-10 AS3201F -02-12 SYJ 400 200 SX 200 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50% 30% 10% 70% 50% 70% 10% 0 0 800 400 MB 80 MB 63 300 600

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

10 units.

smcmaintenancepartslist

Note) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g). Order with the following part number when only the grease pack is needed.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

10 units.