4/5 Port Air Operated Valve Series SYJA3000 1

M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 28 2-4.3 2-M5 x 0.8 2-M5 x 0.8 37.5 23 (Pilot port) (For mounting) (Pilot port) A B 11 20 23 5 3

SYJA3000

48(22) Base mounted 2 position double SYJA3240-M5 51(25) 1.8 (0.1) 3 position exhaust center SYJA3340-M5 M3 X 0.5 M5 X 0.8 54 (28) 3 position exhaust center SYJA3440-M5 3 position pressure center SYJA3540-M5 2 position single SYJA3130 22 4 port base mounted (For manifold) 2 position double SYJA3230 25 M3 X 0.5 (1) 1.2 (1) M3 X 0.5 3 position exhaust center SYJA3330 (0.067) M5 X 0.8 3 position

LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

LEC-OM07605CN

PB26](_ _ _ 1) 5 28 5. [] PB45 CNHF _ _ x x 5.5 00h _ x _ _ 5.6 0h x _ _ _ 0h 5.5 [Hz] [Hz] [Hz] 00 20 70 40 17.6 01 2250 21 66 41 16.5 02 1125 22 62 42 15.6 03 750 23 59 43 14.8 04 562 24 56 44 14.1 05 450 25 53 45 13.4 06 375 26 51 46 12.8 07 321 27 48 47 12.2 08 281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D

Stainless Steel 316 Fittings

Hexagon Socket Head Male Connector: KQG2S (M5) Applicable tube O.D.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

-06 AS121F-M5-07 1/4" M5 x 0.8 M5 x 0.8 13.5 11.7 18.3 23.1 7 13.5 12 18.1 6 11.6 22.9 AS121F-U10/32-06 AS121F-U10/32-07 1/4" 10-32UNF 10-32UNF AS221F-01-23 AS221F-01-01 1/8" 20.4 3.2 9.3 20.4 16 27.5 27.5 16 9.3 12.7 12.7 AS221F-01-04 AS221F-01-03 5/32" 4 20.4 27.5 27.5 20.4 17 9.3 9.3 14.2 13.4 13.4 17 12 12 AS221F-01-06 AS221F-01-05 35.2 30.2 32.1 13.5 27.1 3/16" 6 23.1 16.5 30.2 35.2

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

M1 AS131FG-M5-23 AS131FG-U10/32-01 19.8 19.8 3.2 8.4 1/8" 8.4 17.5 28.7 28.7 12.7 17.5 7 12.7 AS131FG-M5-04 AS131FG-U10/32-03 28.6 M5 0.8 25.8 20.3 20.3 4 9.3 5/32" 9.3 9.6 9.3 7 8 25 22.2 10.8 28.6 25.8 10-32 UNF 22.2 25 9.6 9.3 10.8 8 AS131FG-M5-06 AS131FG-U10/32-05 20.6 31.8 34.5 13.5 23.3 21.4 21.3 6 11.6 3/16" 11.4 16.5 8 AS231FG-01-23 AS131FG-U10/32-07 31.9 20.7 24.4 21.6 3.2 8.4 1

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

With seal Note) In case that connecting port is either M5 or 10-32 UNF thread, it is not available with seal. With gasket is provided as standard. Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.

ZP

(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.

ZP

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

ZP

Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows

REC

9 2 NBR Cushion seal P-10AE P-12E P-16E P-18E @0 1 Resin Wear ring CM-20-07-301A CM-025-07-302A CM-032-07-304A C1A040-07-305A @1 1 NBR Piston gasket 5.79 X 1.02 6.50 X 1.0 8.50 X 1.0 10.4 X 1.0 @2 2 NBR Holder gasket 17.1 X 1.6 22.1 X 1.6 27.6 X 2.4 SO-031-4 @3 Operation Principles 1. In-rush 4.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

reduces flow setting time

ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Vacuum Pad

) M5 x 0.8 2.5 3.5 (11) 5 1.5 1.5 15 15.7 6 Series ZP2 Dimensions: With Adapter ZP2-TB02EU-H5 ZP2-TB04EU-H5 M5 x 0.8 M5 x 0.8 3.5 3.5 1.5 7 7 Width across flat 1.5 (Hexagon) 1.5 (9) Width across flat 1.5 (Hexagon) (9) 4 4 1.2 0.5 0.5 1.5 2 4 2.6 4.8 ZP2-TB06EU-H5 ZP2-T08EU-H5 M5 x 0.8 M5 x 0.8 1.5 3.5 1.5 3.5 7 7 (9) Width across flat 1.5 (Hexagon) (9) Width across flat 1.5 (Hexagon) 4 4

Vacuum Pad

) M5 x 0.8 2.5 3.5 (11) 5 1.5 1.5 15 15.7 6 Series ZP2 Dimensions: With Adapter ZP2-TB02EU-H5 ZP2-TB04EU-H5 M5 x 0.8 M5 x 0.8 3.5 3.5 1.5 7 7 Width across flat 1.5 (Hexagon) 1.5 (9) Width across flat 1.5 (Hexagon) (9) 4 4 1.2 0.5 0.5 1.5 2 4 2.6 4.8 ZP2-TB06EU-H5 ZP2-T08EU-H5 M5 x 0.8 M5 x 0.8 1.5 3.5 1.5 3.5 7 7 (9) Width across flat 1.5 (Hexagon) (9) Width across flat 1.5 (Hexagon) 4 4

Vacuum Pad

) M5 x 0.8 2.5 3.5 (11) 5 1.5 1.5 15 15.7 6 Series ZP2 Dimensions: With Adapter ZP2-TB02EU-H5 ZP2-TB04EU-H5 M5 x 0.8 M5 x 0.8 3.5 3.5 1.5 7 7 Width across flat 1.5 (Hexagon) 1.5 (9) Width across flat 1.5 (Hexagon) (9) 4 4 1.2 0.5 0.5 1.5 2 4 2.6 4.8 ZP2-TB06EU-H5 ZP2-T08EU-H5 M5 x 0.8 M5 x 0.8 1.5 3.5 1.5 3.5 7 7 (9) Width across flat 1.5 (Hexagon) (9) Width across flat 1.5 (Hexagon) 4 4

Vacuum Pad

) M5 x 0.8 2.5 3.5 (11) 5 1.5 1.5 15 15.7 6 Series ZP2 Dimensions: With Adapter ZP2-TB02EU-H5 ZP2-TB04EU-H5 M5 x 0.8 M5 x 0.8 3.5 3.5 1.5 7 7 Width across flat 1.5 (Hexagon) 1.5 (9) Width across flat 1.5 (Hexagon) (9) 4 4 1.2 0.5 0.5 1.5 2 4 2.6 4.8 ZP2-TB06EU-H5 ZP2-T08EU-H5 M5 x 0.8 M5 x 0.8 1.5 3.5 1.5 3.5 7 7 (9) Width across flat 1.5 (Hexagon) (9) Width across flat 1.5 (Hexagon) 4 4

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector