base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, SS5YJ3 BUILT IN FITTING LESS THAN 1/4, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING LESS THAN 1/4, 0.99208 lb

2

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

Table of Contents

(inch) Weight (g) Model d L M2 M1 Applicable tubing Applicable KQ2N01-03 KQ2N01-05 KQ2N03-05 KQ2N03-07 KQ2N05-07 KQ2N05-09 KQ2N07-09 KQ2N07-11 KQ2N09-11 KQ2N09-13 KQ2N11-13 36.5 37 37.5 38 38.5 41 41.5 45 46.5 47.5 50 16 16.5 16.5 17 17 18.5 18.5 21 21 22 22 0.2 0.4 0.4 0.6 0.6 1 1 1 11 22 24 5 32 15.5 2.2 1 8 tubing 3 16 3 16 5 32 16 2.5 1 4 1 4 16.5 3.5 3 16 5 16 5 16 1 4 17 4.6 3 8 3

AS

43.3 48.3 AS321F-02-10 AS321F-02-09 67 18.5 63 10 29.5 21.3 48.3 18.5 43.3 42.8 15.2 41 21 37.8 5/16" 23 43.3 31.8 AS321F-02-12 AS321F-02-11 67 69 12 43.3 21 31.8 17.9 20.9 3/8" 22 44.3 32.8 19 19 AS321F-03-06 AS321F-03-07 55 55 6 39.3 17 27.8 13.2 12.8 1/4" 17 39.3 27.8 AS321F-03-08 AS321F-03-09 57 57 8 41 18.5 29.5 3/8 19.8 45.4 40.4 40.2 35.2 23 15.2 5/16" 15.2 18.5 29.5 41 3/8 23 35.2

Table of Contents

AS321F-02-09 AS321F-03-06 12.8 6 39.3 18.5 63 15.2 41 29.5 17 55 27.8 23 43.8 21.8 48.8 42.8 37.8 5/16" AS321F-02-11 AS321F-03-08 31.8 15.2 41 8 17.9 43.3 21 67 18.5 57 29.5 3/8" 23 20.9 46.5 35.2 40.2 41.5 19 3/8 AS321F-03-07 AS321F-03-10 27.8 43.3 10 13.2 18.5 39.3 17 55 21 59 31.8 1/4" AS321F-03-09 AS321F-03-12 29.5 15.2 41 18.5 57 44.3 12 20.9 46.5 41.5 40.2 35.2 20.9 22 61 32.8 23 5

Air Fittings & Tubing

Weight (g) (1) D L A M 7 32 32 24 19 17 14 4 9 8 9 7 2 KQ2R01-03 KQ2R01-05 KQ2R01-07 KQ2R03-05 KQ2R03-07 KQ2R05-07 KQ2R05-09 KQ2R07-09 KQ2R07-11 KQ2R09-11 KQ2R09-13 KQ2R11-13 9.6 34.5 18.5 17.5 17 5 32 3 16 1 4 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 15.5 2.5 1 8 34 9.2 34 34.5 34.5 36.5 37 40 40 41 44 10 5 32 17.5 16 3 10.4 11.4 10.7 18.5 18 18.5 19.5 3 16 16.5 3.5 1 4 13.2 17 4.6 14 5 16

KJ

(inch) Weight (g) Model d L M2 M1 Applicable tubing Applicable KQ2N01-03 KQ2N01-05 KQ2N03-05 KQ2N03-07 KQ2N05-07 KQ2N05-09 KQ2N07-09 KQ2N07-11 KQ2N09-11 KQ2N09-13 KQ2N11-13 36.5 37 37.5 38 38.5 41 41.5 45 46.5 47.5 50 16 16.5 16.5 17 17 18.5 18.5 21 21 22 22 0.2 0.4 0.4 0.6 0.6 1 1 1 11 22 24 5 32 15.5 2.2 1 8 tubing 3 16 3 16 5 32 16 2.5 1 4 1 4 16.5 3.5 3 16 5 16 5 16 1 4 17 4.6 3 8 3

KQ2

(inch) Min. port size Note) Mass (g) D L A M Applicable tubing MS KQ2R01-03 KQ2R01-05 KQ2R01-07 KQ2R03-05 KQ2R03-07 KQ2R05-07 KQ2R05-09 KQ2R07-09 KQ2R07-11 KQ2R09-11 KQ2R09-13 KQ2R11-13 7 32 32 24 19 17 14 4 9 8 9 7 2 5 32 3 16 1 4 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 9.6 34.5 18.5 17.5 17 15.5 2.5 1 8 LQ 9.2 34 10 34 34.5 34.5 36.5 37 40 40 41 44 5 32 16 17.5 3 MQR 10.4 11.4 10.7 18.5

VM

VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB Black VM120

Table of Contents

+ 35, L2 = n x 41 + 46 Front ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) PB IN port direction Model Dimensions 9 348 359 384 395 404 415 448 459 8 313 324 349 360 363 374 407 418 10 383 394 419 430 445 456 489 500 6 243 254 279 290 281 292 325 336 7 278 289 314 325 322 333 366 377 4 173 184 209 220 199 210 243 254 5 208 219 244 255 240 251 284 295 2 103 114 139 150 117 128 161

F

Applicable Thread Model H D1 D2 L1 L2 A M Minimum Weight Tube OD UNF (Hex) Hole (g) (Inch) NPT Diameter 1/8 1/8 KQW01-34S 11.11 9.6 10 17.5 37 38 15.5 2.5 19 1/8 1/4 KQW01-35S 14.29 9.6 10 17.5 43 42 15.5 2.5 41 5/32 1/8 KQW03-34S 11.11 10.4 10 18 37.5 38.5 16 3 19 5/32 1/4 KQW03-35S 14.29 10.4 10 18 48.5 42.5 16 3 41 3/16 1/8 KQW05-34S 11.11 11.4 10 19.5 38 40 16.5 3.5 41 3/16 1/4 KQW05-

Fluoropolymer Piping Equipment

8 30 26 18 36 41 78 74 49 Inch Size Model Applicable tubing O.D.

LEC-OM071xx

Recommended Noise Filter Noise Filter Selection Main Circuit Power Supply Driver Model LECYU2Recommended Noise Filter Details Model Specifications Leakage Current V5, V7 FN2070-6/07 Single-phase 250V 6A 0.734 mA 230VAC/50Hz [1] Single-phase V8 FN2070-10/07 Single-phase 250V 10A 200 V V9 FN2070-16/07 Single-phase 250V 16A V5, V7, V8 FN258L-7/07 Three-phase 80V 7A 0.5 mA 440VAC/50Hz [2] Three-phase

AC Servo Motor Driver (Pulse input type/Positioning type ）

STARTUP 41 to 4-37 4.

LVQ

T) View Z Dimensions (N.O valve, double acting valve) (mm) A B C D M N T U V Model LVQ2 -S-2 LVQ3 -S-2 LVQ4 -S-2 LVQ5 -S-2 LVQ6 -S-2 2 1 25.5 46 31.5 58 7 15 35.3 10.6 7 2 1 23.5 47 29.5 59 7 15 36.9 16.5 10 2 1 23.5 47 29.5 59 7 20 37.9 22 2 1 17 35 70 41 82 7 20 64 25 2 1 35 70 41 82 7 20 66 32 17-5-72 11 Space Saving/Space Saving Connection Series LVQ How to Order VC LVQ 2 0 S 07 S VDW

One-touch Fittings

38 13.3 13.3 2.5 0.6 3/16 1/4 KQ2N05-07 38.5 13.3 13.3 3.4 0.6 5/16 KQ2N05-09 41 13.3 13.3 3.4 1 1/4 5/16 KQ2N07-09 41.5 13.3 13.3 4.6 1 3/8 KQ2N07-11 45 15.6 13.3 4.6 1 5/16 3/8 KQ2N09-11 46.5 15.6 14.2 6 1.8 1/2 KQ2N09-13 47.5 17 14.2 6 2.6 3/8 1/2 KQ2N11-13 50 17 15.6 7 3.2 Color Cap: KQ2C Applicable tubing O.D.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD ASSY, CLEAN ROOM, VALVE, SS5YJ3 MFLD SYJ3000, U5, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BASE MT, CLEAN ROOM, VALVE, SS5YJ3 MFLD SYJ3000, U5, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFD, BASE MT, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, 0.22046 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1K, SS5YJ3 OTHER SIZE RATING, .28820 lb