Table of Contents

Never use pressure sensors in the presence of inflammable or explosive gases. 16-3-19 19 Series PSE Specific Product Precautions 2 Be sure to read before handling.

VQC

20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM (Based on IEC529) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram.)

Modular F.R.L. Units

19 19 19 19 19 19 14 Without a valve function 15 The combination of metal bowl: 2 and 8 is not available. 16 For pipe thread type: NPT.

ARM10/11

58 68 69 70 75 76 77 82 83 84 06 07 08 18 19 20 25 26 27 32 33 34 3.

ARM10/11

58 68 69 70 75 76 77 82 83 84 06 07 08 18 19 20 25 26 27 32 33 34 3.

ZR

. 2.5~7kgf/cm2 SOL.a SOL.b VJ3233-X17 PRESS. 2.5~7kgf/cm2 SOL.a SOL.b B B A A Adapter B Adapter B B B A A L2 L1 Adapter D Adapter D 19 31 19 31 H SET L H SET L 4 Suction filter Suction filter Vacuum pressure switch Pressure setting trimmer Vacuum pressure switch Pressure setting trimmer Individual spacer Individual spacer 28 52 28 52 20 31 31 32 74 44 63 Release valve (SOL.c) Vacuum valve

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Note 4) When specifying more than one option, indicate them alphabetically. 2.10-32 VQZ100/200/300 Base Mounted Specification Piping specification (1) Manifold base weight (g) Applicable Applicable Piping Series Base model valve Port size station 1(P), 3(R) 2(A) C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) Side Top VV3QZ15-lll VQZ1l5 VQZ100 2 to 20 2 stations:83 Additional station:19

Compact Manifold Regulator

IN/OUT Piping Position IRV Metric size Inch size Position IN side OUT side VEX IN side Straight 4 6 OUT side IN side Straight OUT side Mounting position Mounting position Bottom Top Bottom Top Symbol Elbow Straight Elbow 4 6 Elbow Straight Elbow Fitting type Symbol Fitting type Symbol 1 2 3 4 4 6 4 6 5/32 1/4 5/32 1/4 5/32 1/4 5/32 1/4 SRH 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69

Compact manifold regulator ARM5 Series

Size 4 6 5/32 1/4 Size 6 8 1/4 5/16 Symbol C4 C6 N3 N7 Symbol C6 C8 N7 N9 Straight type Elbow type Straight type Elbow type V R W X S T Y U One-touch fittings for regulator block One-touch fittings for centralized supply block Fitting size Elbow W Elbow X Elbow Y Straight V Fitting size Elbow S Elbow T Elbow U Straight R 4, 5/32 2.5 6 11 35.5 4, 5/32 6 3 6.5 11 36 6 3 12.5 19 35.5 1/4 6.5

Proposals for Energy Saving

S + Stroke ZZ + Stroke Bore size (mm) E F (E1) WA GA S TA ZZ (F1) 17 21 26 26 32 37 18 25 30 32 40 50 2 2 2 2 3 3 20 21 23 23 30 31 18 19 21 21 28 29 77 (85) 84 (93) 97 (109) 97 (109) 116 (130) 117 (131) 17 18 20 20 119 (127) 136 (145) 157 (169) 157 (169) 190 (204) 191 (205) 2 2 2 2 3 3 32 40 50 63 80 100 Note 1) Dimensions other than the above are the same as the standard double acting

modular-press-e

Pressure Control Equipment Fitting type One-touch fittings for regulator block 6.5 Symbol Nil L1 Type Straight Elbow X X Fitting size Y Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Semi-standard Description None Oil-free Symbol Nil X17 Y 19 19.5 22 X 3 3 7 X 11.5 11.5 11.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators

Modular F.R.L. Pressure Control Equipment

Pressure Control Equipment Fitting type One-touch fittings for regulator block 6.5 Symbol Nil L1 Type Straight Elbow X X Fitting size Y Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Semi-standard Description None Oil-free Symbol Nil X17 Y 19 19.5 22 X 3 3 7 X 11.5 11.5 11.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators

Intrinsically Safe Valve

0.27] 2position 0.75 0.36 0.19 3.8 3.2 0.34 0.82 0.26 0.86 53-SY5 20-C4 C10 10 Onetouch fitting 0.78 [0.71] 0.27 0.44 [0.37] 0.57 0.21 [0.18] 0.84 2.8 0.59 0.27 0.21 0.67 2.4 53-SY7 20-C10 3position 4position dual 3 port 2.7 [2.0] 0.38 [0.38] 0.70 [0.56] N.C.

Table of Contents

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

SYA3000/5000/7000

Note 2) ( ): denotes without sub-plate. 1731 Series SYA3000/5000/7000 Dimensions/Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting

5 Port Air Operated Valve SYA3000/5000/7000 Series

Note 2) ( ): denotes without sub-plate. 1461 SYA3000/5000/7000 Series Dimensions/SYA3000 Series: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Manual override (Non-locking) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting

CRB2/CRBU2/CRB1

Refer to pages 31 and 32 for detailed description of Made to Order.