Table of Contents

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class

One-touch Fittings

KQ2 Series Model Applicable tubing Connection thread Part number 3.2 M3 x 0.5 KQ2H23-M3G1 3.2 M5 x 0.8 KQ2H23-M51 4 M3 x 0.5 KQ2H04-M3G1 4 M5 x 0.8 KQ2H04-M51 4 M6 x 1.0 KQ2H04-M61 6 M5 x 0.8 KQ2H06-M51 6 M6 x 1.0 KQ2H06-M61 6 R1/8 KQ2H06-01S1 1/8 10-32UNF KQ2H01-321 5/32 10-32UNF KQ2H03-321 3/16 10-32UNF KQ2H05-321 5/32 NPT1/16 KQ2H03-33S1 1/8 M5 x 0.8 KQ2H01-M51 3/16 M5 x 0.8 KQ2H05-M51

reduces flow setting time

AK Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FS1-M5E-01 1/8 VCHC 7.2 9.4 9 17.2 19.8 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FS1-U10/32-01 AS131FS1-M5E-03 5/32 8.2 AS131FS1-U10/32-03 AS131FS1-M5E-07 1/4 11.2 18.6 20.9 20.4 36.6 8 AS131FS1-U10/32-07 ASR ASQ M5 x 0.8 10/32UNF 8 593 AS-FS Series Dimensions: Elbow Type Seal method: Sealant

Speed Controller with One-touch Fitting

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E Body size 1 KE AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

/ Elbow type Seal method: Gasket seal For M5, 10-32UNF D3 Applicable tubing O.D. d D1 A L4 L3 M T H (Width across flats) L1 L2 Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS12l1FG-M5-02A 2 5.8 15.8 20.3 11.9 AS12l1FG-U10/32-02A AS12l1FG-M5-23A 3.2 7.2 16.9 5 AS12l1FG-U10/32-23A AS12l1FG-M5-04A 4 8.2 AS12l1FG-U10/32-04A AS12l1FG-M5

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

8 7 12.7 9.6 12.3 28.6 25.8 25 22.2 AS121F-M5-23 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 17.3 17.3 3.2 22.1 8.4 22.1 9.3 AS121F-U10/32-23 AS121F-U10/32-03 10-32UNF 5/32" 10-32UNF 12.7 12.3 AS121F-M5-04 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 28.6 25.8 25 22.2 21.3 26.1 4 7 9.6 7 16.5 8 11.4 9.3 22.1 17.3 AS121F-U10/32-04 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 25 22.2 9.6 AS121F-M5

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4

5 Port Solenoid Valve Series SY3000/5000/7000/9000

14 KQ2P-01 16 31.5 5 KQ2P-03 16 32 6 KQ2P-07 18 35 8.5 KQ2P-09 20.5 39 10 KQ2P-11 22 43 11.5 Fill in with an appropriate no. listed on the table of DIN rail dimensions shown below.

Proposals for Energy Saving

VM-07BS VM-07B VM-06BS VM-06B VM-05B Straight plunger VM130-01-05 VM132-M5-05 Polyacetal roller Hard steel roller Roller plunger VM130-01-06 VM130-01-06S VM132-M5-06 VM132-M5-06S Polyacetal roller Hard steel roller Cross roller plunger VM130-01-07 VM130-01-07S VM132-M5-07 VM132-M5-07S Toggle lever VM130-01-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

6 M5 type U10/32 type M5 type U10/32 type e !0 i t NBR, Stainless steel !1 !6 w y Gasket M5 type only !7 r Note 1) M5 and U10/32 types are black zinc chromate plated. Note 2) AS231FM type is made of steel. Note 3) Meter-in type is black zinc chromate plated. Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

6 M5 type U10/32 type M5 type U10/32 type e !0 i t NBR, Stainless steel !1 !6 w y Gasket M5 type only !7 r Note 1) M5 and U10/32 types are black zinc chromate plated. Note 2) AS231FM type is made of steel. Note 3) Meter-in type is black zinc chromate plated. Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

M1 AS131FG-M5-23 AS131FG-U10/32-01 19.8 19.8 3.2 8.4 1/8" 8.4 17.5 28.7 28.7 12.7 17.5 7 12.7 AS131FG-M5-04 AS131FG-U10/32-03 28.6 M5 0.8 25.8 20.3 20.3 4 9.3 5/32" 9.3 9.6 9.3 7 8 25 22.2 10.8 28.6 25.8 10-32 UNF 22.2 25 9.6 9.3 10.8 8 AS131FG-M5-06 AS131FG-U10/32-05 20.6 31.8 34.5 13.5 23.3 21.4 21.3 6 11.6 3/16" 11.4 16.5 8 AS231FG-01-23 AS131FG-U10/32-07 31.9 20.7 24.4 21.6 3.2 8.4 1

KJ

(inch) Max. port size Note) Note) Weight (g) D1 D2 L M1 M2 Model KJH01-03 KJH01-07 KJH03-07 2.3 2.1 1.6 5 32 8.4 9.3 12.7 12 27.2 13.6 12 27.2 13.6 12.7 26.3 1 8 12.7 2.5 1 4 5 32 3 9.3 Note) D1, D2: Max. diameter Applicable tubing Applicable tubing Male Elbow: KJL Connection thread (T) UNF NPT 10-32 UNF <10-32 UNF> <10-32 UNF> Applicable tubing O.D.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Note) Metric size Inch size With One-touch fitting 01 03 05 07 09 11 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 For low speed control Note) For applicable tubing O.D. selection, refer to the Model on page 727. Thread type Port size M5 U10/32 01 02 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 x 0.8 10-32 UNF 1/8 1/4 N Made to Order Lubricant: Vaseline X12 Ex.)

Dual Speed Controller with One-touch Fitting Series ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

Series AS-FM/AS-M/ASD-FM

100 200 205 Inch size M5 standard 1/8 standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Flow Control Equipment

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

Vacuum System Peripherals:

Series VZ Compact size: 15 mm (VZ100/200/300) 18 mm (VZ400/500) VZ100 ZF M5 x 0.8 Vol. 4 0.11 to 3.0 VZ300/500 ZP M5 x 0.8 , VQZ200/300 Vol. 4 1.7 to 4.5 ZCU 1 8 1 4 3 port solenoid valve Series VX31/32/33 (2) (1) (2) (1) AMJ to 1 8 3 8 0.29 to 1.6 Vol. 17 Misc. 3 port solenoid valve Series VK M5 x 0.8 Vol. 4 1 8 0.47 to 0.85 (1) Compact 2 port solenoid valve Series VX2 (2) (1) to

Compact Manifold Regulator Series ARM5

IN/OUT Piping Position ARX20 Metric size Inch size Configuration Symbol Pressure gauge Note) VCHR 4 6 4 4 6 6 4 6 Straight Elbow Straight Elbow OUT side IN side IN side Straight Elbow Straight Elbow OUT side Mounting position Mounting position Fitting type Fitting type ITV 5/32 1/4 5/32 5/32 1/4 1/4 5/32 1/4 Nil Symbol Symbol None 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69 70 75 76