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16 Hex 13/64 13/64 5/16 Hex Typ. 80 M3-LB4 M3-LB1 M3-LB2 M3-LB3 M3F-LB3 M3-LB2 1/2 1" 15/16 5/8 5/8 5/8 5/16 Hex Typ. 3/16 Hex Typ. 81 M3-T1 M3-T2 M3-T3 M3-T4 M3-T2 1/2 See complete selection of adapters on pages 23 & 24 1/4 5 32 /32 3/16 Hex 7/16 Ref 1/4 Hex 5/16 Hex M3 x 0.5 M6 x 1 Thd .085 5 32 9 32 M3 0.5 Thd to 10-32 Thd .241 Ref 82 M3 x 0.5 to M6 x 1 (F) Adapter M3 Plain Plug M3

MXS Series Air Slide Table

Applicable model P(Hexagon socket head screw) Q(Hexagon socket head screw) Mounted to body J M I F B C D E H A MXS-AS6 5 16.5 MXS 6 P M 17.8 10.5 M2.5 X 10 12.5 8.5 M2.5 X 8 6 2.5 7 6 M5 X 0.8 C A MXS-AS6-X11 15 26.5 MXS-AS8 5 16.5 MXS 8 21.5 14.6 10 M3 X 10 11 M3 X 12 7 3 8 7 MXS-AS8-X11 15 26.5 M6 X 1 MXS-AS8-X12 25 5 36.5 B MXS-AS12 20 E MXS12 18.5 13 M4 X 12 16 M4 X 15 10 4 12 31 9.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

M2 Allowable Moment (Static moment/Dynamic moment) 100 100 85 96 CY1HT32 CY1HT25 CY1H25 CY1H20 CY1H15 CY1HT32 CY1HT25 CY1H25 64 56 (Nm) 50 40 30 50 40 30 20 28 26 M1 M2 M3 M2 M3 M1 Model Model 20 CY1H20 CY1H15 16 Moment (Nm) Moment (Nm) CY1H10 CY1H25 1.5 2.5 1.5 28 26 28 13 10 10 CY1H15 CY1HT25 10 16 10 56 85 56 2 2.5 3 4 5 2 3 4 5 CY1H20 CY1HT32 13 16 13 64 96 64 CY1H10 CY1H10 1.5 1 M3

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5

42

manifold w AXT632-17-8 (M3 x 52) 2 Blanking plate + SUP stop valve (Top) + Individual SUP (Bottom) Spacer (Top) Spacer (Bottom) Valve + SUP stop valve (Top) + Individual SUP (Middle, Bottom) + Individual EXH (Middle, Bottom) q AXT632-17-14 (M3 x 112) 3 For manifold w AXT632-17-13 (M3 x 77) 2 q w Valve + Double check spacer with residual pressure exhaust (Top) + Individual SUP (Middle, Bottom

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

25 26 32 46 50 N 4 4 6 6 6 6 G 7 14 8 8 31 H 25 28 31 29 30 NN 2 2 3 3 4 4 GA 13 14 29 39 37 61 HA 19 28 27 31 58 60 I 11 10 12 14 13 12 J 17 28 40 52 78 105 K 23.5 33.5 43.5 53.5 63.5 88.5 KA 82.5 112.5 NA 4 4 4 4 8 8 M 46 56 70 84 109 135 Z 45.5 55.5 69.5 83.5 108.5 134.5 ZZ 71 81 95 109 134 160 13-/22-MXQ8L-10 13-/22-MXQ8L-20 13-/22-MXQ8L-30 13-/22-MXQ8L-40 13-/22-MXQ8L-50 13-/22-MXQ8L

Hydraulic

35.5 30 M27 x 3 33 9 69 13 100 1/4 27.5 10 27.5 80 23 depth 15.2 105 88 17 45 41 M30 x 3.5 36 14 86 15 121 3/8 31 15 31 100 26 depth 17.5 132 106 26 56 50 M39 x 4 45 21 106 17 146 3/8 36 15 36 Note) Body dimensions are the same with or without auto switches.

CY1

9.5 34 15 7.5 3.5 M3 x 0.5 10 26 23 CY1R10 7 5 3.3 13 6.5 7 11.5 3.4 15 7.5 M3 M3 x 0.5 12 38 3.5 33 30 CY1R15 6.5 4.5 4.4 14.5 18 4.5 8 7.5 8.5 M4 14 17 M4 x 0.7 38.5 35.5 53 4.5 CY1R20 6 6.5 4 M3 3 16.5 14.5 26 45 14 62 29 7 4.5 M4 x 0.7 34 CY1R25 7 8 4 M4 3 20.5 70 29 14.5 5.5 M5 x 0.8 39 31 51 17 8 CY1R32 7.5 9.5 4.5 21 34 17 M5 M6 x 1 50 41 3 76 6.5 62.5 22 10 CY1R40

SMC

61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 13-/22-MXS6L-10 13-/22-MXS6L-20 13-/22-MXS6L-30 13-/22-MXS6L-40 13-/22-MXS6L-50 136 MXS Air slide table 1322Dimensions: MXS8 1322Basic style 2-M3 x 0.5 thread depth 4 Air cylinder Rotary actuator Air gripper Directional control

7ND9071en

13 16 19 120mm 15 14 40mm 3.5 5 40mm 9 11 140mm 17 16 50mm 4 6 50mm 10 12 VC_60 120mm ND9206 18 16 60mm 5 6.5 60mm 11 13 140mm 21 19 70mm 6 7.5 70mm 12 14 180mm 25 21 20mm 3 4 20mm ND9203 ND9206 VD_48 NDX VD_48 20mm 9 11 VC_70 140mm ND9206 20 19 40mm 4 7 40mm 12 15 180mm 24 22 50mm 5 8 50mm 14 17 240mm 28 27 60mm 6 9 60mm 16 19 VC_80 180mm ND9206 31 30 70mm 7 10 70mm 18 21 240mm 35 31 80mm

Table of Contents

36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 AR10 AR20 AR25 AR30 AR40 AR40-06

MGP

Hexagon socket head cap screw (M3 x 0.5 x 16l ) 2 pcs.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Refer to the Made to Order Specifications on page 8-13-31.

LX

G 28 58 5H9 depth 5 +0.030 0 2-M3 x 0.5 10.5 D-M4 x 0.7 (for work piece mounting) 12 2-M3 thread depth 5 Effective thread depth 4 (PE terminal) (3.5) 6 4-8 50 17.5 22 25 35 18.5 10 20 (5) 62 72 12 (15) (6) 8 1 0.2 31 5H9 +0.030 0 depth 5 Photo micro sensor wire (300mm) 10 13 1.5 [5.5] 6 10 (39.5) E 25 (4) Motor wire (300mm) Stroke + 135 30.5 The dimension inside [ ] shows the location at

CJ2

S Z 101 to 126 to 101 to 126 to Bore A B C D F GB H LB LC LH LT LX LY LZ MM NA NB NN X Y 5 to 16 to 31 to 46 to 61 to 76 to 5 to 16 to 31 to 46 to 61 to 76 to 100st 125st 150st 100st 125st 150st 15st 30st 45st 60st 75st 15st 30st 45st 60st 75st 34.5 43.5 47.5 61.5 62.5 71.5 75.5 89.5 6 32 15 8 16.5 M3 X 0.5 3 M6 X 1.0 5 9 7 7 3 8 28 13 4.5 9 1.6 24 (39.5) (48.5) 53 54 (52.5) 65 66 (66.5)

Table of Contents

G 28 58 5H9 +0.030 0 depth 5 (5.5) 10 D-M4 x 0.7 (for work piece mounting) 10.5 12 2-M3 thread depth 5 (3.5) 6 4-8 50 18.5 10 20 17.5 22 25 35 (5) 62 72 12 (15) (6) 8 1 0.2 31 5H9 +0.030 0 depth 5 Photo micro sensor wire (300mm) 10 13 1.5 [5.5] 6 25 (4) 30.5 10 (39.5) E Motor wire (300mm) Stroke + 135 The dimension inside [ ] shows the location at which the home position switch operates

CQS

X 25 l M3 X 30 l M3 X 35 l M3 X 40 l M3 X 45 l M3 X 50 l M3 50 55 60 65 70 25 30 35 40 45 50 6.5 6.5 Secure the cylinder by using Secure the cylinder by using the OA screws that are the OA screws that are provided with the cylinder provided with the cylinder tube. tube.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

+0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 780 MXS

CV/MVGQ

16 Up to 600 601 to 1000 Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 Bore size (mm) Without rod boot With rod boot l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke N S W X Y MM H 51 58 58 71 72 ZZ 221 231 239 271 283 e 43 52 52 65 65 ZZ 229 239 247 280 292 h 59 66 66 80 81 f 11.2 11.2 11.2 12.5 14.0 40 50 63 80 100 27 30 31 37 40 13 13 16 16 17 84 90 98 116

CV/MVGQ

16 Bore size (mm) 40 50 63 80 100 Without rod boot With rod boot l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke N S W X Y MM e 43 52 52 65 65 H 51 58 58 71 72 ZZ 221 231 239 271 283 ZZ 229 239 247 280 292 f 11.2 11.2 11.2 12.5 14.0 h 59 66 66 80 81 27 30 31 37 40 13 13 16 16 17 84 90 98 116 126 8 0 0 0 0 27 27 34 44 43 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 The minimum