F

M14x1 19 17 33.5 17 15 17 13.1 1/2 3/8 KQE13-36 1-12 28.57 28.57 36.5 14.5 26 22 9.6 8 14 KQE08-02 M16x1 17 19 33 12 17 18.5 26.1/18 1/2 1/2 KQE13-37 1-12 28.57 28.57 40.5 18.5 26 22 9.6 8 38 KQE08-03 M16x1 19 19 35 15 17 18.5 26.1/18 10 14 KEQ10-02 M20x1 22 24 35 12 21 21 41.5/29.5 10 38 KQE10-03 M20x1 24 24 34.5 15 21 21 41.5/29.5 12 38 KQE12-03 M22x1 24 27 37 15 23 22 58.3/46.1 12 12

CQ2

(A type, B type) Bore size (mm) T2 B D E F M T1 Part No. 6.5 10 18 6.8 16 6 42 YA-03 32, 40 YA 03 6.5 12 20 9 20 8 50 YA-05 50, 63 8.5 16 26 11 25 10 62 YA-08 80 Applicable bore size 10.5 18 31 14 30 12 76 YA-10 100 For 32, 40 For 50, 63 For 80 For 100 03 05 08 10 Mounting bracket Weight (g) Bore size (mm) K L M Part No.

VQ7-6/7-8

) 50 (63) 32 (42) 5 3 5 3 38 (53) 38 (53) 1 23 (30) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P Rc1/8 Port X (PE) Rc1/8 Port X (PE) 30 (42) 30 (42) 30 (42) 30 (42) Dimensions inside ( ) are for Rc3/4 Dimensions inside ( ) are for Rc3/4 Dimensions inside are for rubber seals 20 Series VQ7-8 Construction DIN Connector

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 Bore size (mm) O M J E D B Part no. 100 YU-10 YA-10 YB-10 160 K (Width across flats ) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB

Table of Contents

IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01

Fluoropolymer Piping Equipment

16.5 1.8 LQ1H4G-Ml 1/2" 1/4" 42 24 21 48 28 6 6 LQ1H5A-Ml 3/4" 1/2" 55 29 26 62.5 39 10 10 1/2" 44 10 23 LQ1H42-Ml 10 7.4 LQ1H43-Ml 12 9.4 LQ1H44-Ml 10 7.4 LQ1H45-Ml 8 39.5 20 17 47.5 23 5.5 LQ1H46-Ml 6 3.6 LQ1H4F-Ml 3 34 15 14 42 16.5 1.8 LQ1H49-Ml 12 1/4" 42 24 21 48 28 6 6 LQ1H51-Ml 19 1/2" 55 29 26 62.5 39 10 10 44 LQ1H5B-Ml 1/2" 9 LQ1H5C-Ml 3/4" 23 15 LQ1H5D-Ml 1/2" 9 LQ1H5E-Ml 3/8"

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 Bore size (mm) O M J E D B Part no. 100 YU-10 YA-10 YB-10 160 K (Width across flats ) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Example PSS5YJ5-20-03 1 pc. (Manifold base) SYJ5120-5G-M5 2 pcs. (Valve) SYJ5000-21-1A 1 pc. (Blank plate ass'y) PSS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc.

Table of Contents

-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S(-F20) ASQ530F-02-10S(-F20) ASQ530F-02-12S(-F20) ASQ530F-03-06S(-F20) ASQ530F-03-08S(-F20) ASQ530F-03-10S(-F20) ASQ530F-03-12S(-F20) ASQ630F

KJ

-01 KDM20S-03 KDM20S-07 KDM20P-01 20 KDM20P-03 KDM20P-07 KDM20S-09 KDM20P-09 Clamp bolt Panel mounting Loosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No. 2) until the bracket touches the stop ring.

KR

26.5 22 30 33.5 24 20.5 15.5 26 27.5 14 26.1 8 18.0 18.5 17 Applicable tubing 17 41.5 10 29.5 21 3 8 KGH10-03 29 22.5 30 1 2 KGH10-04 27 19 53 42 34 22 1 4 3 8 KGH12-02 KGH12-03 34.5 28.5 19 12 23.5 22 58.3 46.1 30 1 2 3 8 1 2 KGH12-04 KGH16-03 KGH16-04 51 61 47 22 22 39.5 32 35.5 26.5 81 (81) 113 (96) 16 24 24 Connection thread Reference dimensions after R thread installation

Table of Contents

W Recommended Pneumatic Equipment CC Brake valve VFS21O VFS21O VFS21O VFS31O VFS31O Bore size (mm) Directional control valve VFS24OR VFS24OR VFS34OR VFS44OR VFS44OR Silencer AN200-02 AN200-02 AN300-03 AN300-03 AN400-04 Speed controller AS4000-02 AS4000-02 AS4000-03 AS420-03 AS420-04 Regulator AR425 AR425 AR425 AR425 AR425 Piping Nylon 8/6 or larger Nylon 10/7.5 or larger Nylon 12/9 or larger

SYJ3000/5000/7000

Gasket DXT199-21-11 P P Dust cap SY3000-42-1 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 Applicable manifold base Type SS5YJ7-21P Manifold gasket DXT199-21-11 Refer to page 1-5-80 prior to handling.

Piping: Base Mounted, Stations: 3 Stations, A, B Port: 5/16" One-touch Fitting

Piping: Base Mounted, Stations: 3 Stations, A, B Port: 1/4" One-touch Fitting

Piping: Base Mounted, Stations: 3 Stations, A, B Port: ø8 One-touch Fitting

Piping: Base Mounted, Stations: 3 Stations, A, B Port: Rc1/8

Piping: Base Mounted, Stations: 3 Stations, A, B Port: NPT1/8

Piping: Base Mounted, Stations: 3 Stations, A, B Port: NPTF1/8