3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Auto switch 2 15 2 15 Double vane type CDRB2BWU15/20/30-D Single vane type CDRB2BWU20, 30-S Dimensions for double vane type sizes 15, 20, and 30 are the same as those of single type.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Auto switch 2 15 2 15 Double vane type CDRB2BWU15/20/30-D Single vane type CDRB2BWU20, 30-S Dimensions for double vane type sizes 15, 20, and 30 are the same as those of single type.

4/5 Port Air Operated Valve SYJA3000 Series

Series How to Order A, B port size Bracket One-touch fitting for 8 C8 One-touch fitting for 6 1/8 C6 01 With bracket F Nil Without bracket *The bracket is not mounted.

MY1

MY1M/M2 MY1M/M3 MY1M/M1 16 20 25 32 40 50 63 3.0 1.0 MX 2.1 7 6.0 18 200 5.2 1.7 3 10.4 10 26 40 50 20 MTS 9.0 2.4 4.5 15 15 38 MY1M 15 5.0 6.6 23 30 57 100 30 24 MY 8.0 10 33 59 84 10 38 15 14 48 115 120 20 60 CY 19 21 The above values are the maximum allowable values for moment and load.

Table of Contents

Cylinder port is located at U side of body. 1(P) SUP port 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread P = 11 2-C6 3(R) EXH port Dimensions 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Formula L1 = 11n + 15.5, L2 = 11n + 60 n: Station (Maximum 16 stations) L n L1 L2 (L3) (L4) 26.5 71 100 110.5 37.5 82 100 110.5 48.5 93 112.5

Vacuum System Peripherals:

C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M 2 to 15 stations Special specifications M 15 15 When creating the special specifications, complete the stations table on the right. Includes number of blanking plate assembly.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note 3) Refer to page 6 for DIN rail weight. 1 Cassette Type Manifold Series SY3000/5000/7000 How to Order Valves SY 3 1 60 5 L C6 Series 3 5 7 Symbol M5 C4 C6 01 C4 C6 C8 02 C8 C10 SY3000 SY5000 SY7000 A, B port size Port size M5 x 0.8 4 One-touch fitting 6 One-touch fitting Rc(PT)1/8 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(for 6) C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) 4.5 (0.25) 12 or less 15 or less VQ1130 Metal seal 3 position 2 position Single VQ1 30 Side 1 to 16 stations Options: 6.3 (0.35) 15 or less 20 or less VQ1131 Rubber seal VQ1000 VV5Q13VQ1 31 424 57 Built-in silencer Direct exhaust 4.5 (0.25) 12 or less 15 or less VQ1230 Metal seal Double (latching) 6.3 (0.35) 15 or less 20 or less

NCA1

/16 3/8 2 3/4 2 7/16 1/2 15/16 3/8 3 1/4 2 1/2 7/16 1/2 15/16 3/8 3 3/4 3 1/4 9/16 3/4 1 1/4 1/2 4 3/4 4 9/16 3/4 1 1/4 1/2 5 1/2 5 13/16 1 1 9/16 11/16 6 7/8 6 13/16 1 1 9/16 11/16 7 7/8 MS4 1.5 ~ 6 SIDE TAPPED BORE ROD KK A B V W Y ADD STROKEIM MM SM LB P SN XT 1 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 2 1/4 2 1/4 1 15/16 1 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 2 1/4 2 1/4 2 5/16 2

Air Cylinder NCA1 Series

/16 3/8 2 3/4 2 7/16 1/2 15/16 3/8 3 1/4 2 1/2 7/16 1/2 15/16 3/8 3 3/4 3 1/4 9/16 3/4 1 1/4 1/2 4 3/4 4 9/16 3/4 1 1/4 1/2 5 1/2 5 13/16 1 1 9/16 11/16 6 7/8 6 13/16 1 1 9/16 11/16 7 7/8 MS4 1.5 ~ 6 SIDE TAPPED BORE ROD KK A B V W Y ADD STROKEIM MM SM LB P SN XT 1 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 2 1/4 2 1/4 1 15/16 1 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 2 1/4 2 1/4 2 5/16 2

Secondary Batteries

Bore size Cylinder stroke (mm) 12 16 20 25 32 40 50 63 80 100 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Built-in Magnet Cylinder Model 12, 16 20, 25 32, 40 50 to 100 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 If a built-in magnet cylinder without an auto switch is

Proposals for Energy Saving

4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

PFxx-OMJ0005CN

8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3

4/5 Port Air Operated Valve Series SYJA3000 1

A 1 (Bleed port) 21 R2 P R1 13 VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8

PSxx-OMM0006CN

-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1 M8 P PNP1 /M8 1 L M SI2 M8 P (psi)1 1 2kPaMPa 1 ZS-24-A A M35 L,M45 L, 2 ZS-24-D D M35 L,M45 L, 2 / V100-49-1-1 300 mm() V100-49-1-2 500 mm() V100-49-1-3 1000

VK300

(-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

VK300

(S) 42 Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.

ARM10/11

Handle position VY1 56 Handle position Top Handle position Front Handle position Bottom A B C Top Front Bottom 84 42 G 84 70 70 P 26(Max.28) U 12 S SMC SMC H L 12 SMC O C K PPA SMC 28.5 AL 6 51.5 80 51.5 15 13 OUT IN 3 28 13 15 13 OUT IN OUT IN 3 3 2. IN/OUT piping position 3. IN/OUT fitting type 5.