Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 9 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 2 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 3 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 4 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 6 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 10 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 20 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

How to Order

Coil type Nil Standard With power saving circuit (24, 12 VDC only) T For sub-plate type, type 41, S41, 42, S42 manifold Power saving circuit is not available for W type.

SYJ300

External pilot type is not available. 1 SYJ3 2 5 M M3 Body ported SYJ3 4 5 M 1 Base mounted Port size 3 port Nil: Without sub-plate M5: M5 port With sub-plate Coil specifications Nil Standard With power saving circuit (24, 12 VDC only) T Power saving circuit is not available in the case of W type.

Stations: 14 Stations, Port Size: M3X0.5

1

14 14 14 14 14 14 D side U side For the I/O Unit part number mounted, refer to the following pages.

Table of Contents

25 14 24 5 14 M4 x 0.7 x 6 6.5 CY1R50 14 14 8.2 5 2 53 8.5 83 81.5 85 80 45 84 45 80 9 45 M10 x 1.5 x 15 17 CY1R63 15 14 8.2 5 3 66 8.5 95 93.5 97 92 51 96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q QW TC W WP WS X Y Z PW T Model CY1R 6 7 34 3.5 3.5 M3 x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5

2

Corrected air flow capacity = Air flow rate (Correction factor A x B x C x D) 4 Corrected air flow capacity = 0.3 m3/min (0.82 x 0.96 x 1 x 0.88) = 0.43 m3/min Corrected air flow capacity = 0.4 m3/min (0.95 x 0.93 x 1 x 0.88) = 0.51 m3/min 5 Select the model.

ZP

Inlet 5 3 2 14 2 3 14 3 2 7 M3 x 0.5 7 M3 x 0.5 3 3 3 M3 x 0.5 14 Vertical 3 3 3 7 0.3 With Buffer: Vacuum Inlet 0.3 0.3 0.8 0.8 0.8 2 3.5 1.5 Lateral 2.5 4 2 With Adapter: Vacuum Inlet 5 5 5 5 5 Lateral Vacuum Inlet Dimensions With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-Y015U;-B3-U4 ZP3-Y02U;-B3-U4 ZP3-Y035U;-B3-U4 ZP3-Y015U;-B3-U2 ZP3-Y02U;-B3-U2 ZP3-Y035U;-B3

Table of Contents

17 14 17 19 14 17 19 17 19 Connection thread 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 1 4 3 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 26.1 18.0 14 8 18.5 KQ2F16 Applicable tubing 17 41.5 29.5 21 10 Connection thread 19 14 12 58.3 46.1 22 19 18 15 19 24 81 (81) 113 (96) 24 25.7 16 24 25 Note 1) D2: Max. diameter Note 2) ( ): Values for soft nylon 15-2-14 6 One-touch Fittings Series KQ2

Table of Contents

5.9 E 11 11 14 19 E 2-2.6 through (Mounting hole) M3 x 0.5 Finger opening port M3 x 0.5 0 -0.1 17 12 12 Finger closing port 2-4.5 0.8 0.8 E-E +0.1 0 Close: 0 Open: 81 Use the attached hexagon socket head screws for mounting holes. 4-M3 x 0.5 thread depth 4 14 Mounting thread 4-M2.5 x 0.45 thread depth 3 Attachment mounting thread Auto Switch Mounting Groove Dimensions M2.5 x 0.45 4 1.3

ZP

Inlet 5 3 2 14 2 3 14 3 2 7 M3 x 0.5 7 M3 x 0.5 3 3 3 M3 x 0.5 14 Vertical 3 3 3 7 0.3 With Buffer: Vacuum Inlet 0.3 0.3 0.8 0.8 0.8 2 3.5 1.5 Lateral 2.5 4 2 With Adapter: Vacuum Inlet 5 5 5 5 5 Lateral Vacuum Inlet Dimensions With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-Y015U;-B3-U4 ZP3-Y02U;-B3-U4 ZP3-Y035U;-B3-U4 ZP3-Y015U;-B3-U2 ZP3-Y02U;-B3-U2 ZP3-Y035U;-B3

Table of Contents

Max. air flow rate (m3/min (ANR)) JIS Symbol P . 14-20-55 Inlet pressure (MPa) Caution Be sure to read before handling.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Bore size (mm) 12 16 20 25 C1 H1 L1 X CQ2 9 10 12 15 10.5 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 14 12 15.5 RQ 14 18.5 17.5 22.5 Basic Style MU Bore size (mm) Stroke range (mm) E2 F H I S K U L W M N A O B C D E E1 D12 16 20 25 6.5 depth 3.5 14 17 19 22 14 17 21 24 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 32.5 37.5 41.5 47 5 6 8 10 19.5 22.5 24.5 27.5 27 32 36 41.5 Note) External dimensions

CQ2

Bolt M3 X 40 l 2 pcs.