Modular F.R.L. Units

1/4 Width across flats 17 1/4 Width across flats 17 1/4 Standard specifications Model P1 P2 A B C E F G J K Bracket mount M N Q1 Q2 R S U V AC10-A M5 x 0.8 1/16 87 59.9 25.5 28 35 12.5 25 31 20 27 4.5 6.8 3 24.5 AC20-B 1/8, 1/4 1/8 126.4 87.6 35.9 41.6 60 28.5 2 1 30 43.2 24 33 5.5 12 3.5 29 AC25-B 1/4, 3/8 1/8 167.4 115.1 38.1 30 55.1 80 27.5 0 41 57.2 35 7 14 4 41 AC30-B 1/4, 3/8 1

7.4

fitting assembly C4: 4 One-touch fitting assembly M5: M5 thread 2n x C3, C4, M5 C3: 3.2 One-touch fitting assembly C4: 4 One-touch fitting assembly M5: M5 thread 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 20 stations) 21.5 n L 1 2 3 4 5 6 7 8 9 10 L1 31 42 53 64 75 86 97 108 119 130 L2 50 62.5 75 87.5 100 112.5 125 125 137.5 150 L3 60.5 73 85.5 98 110.5 123 135.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Vacuum System Peripherals:

17 Date issued: Photo copying this page is recommended.

Compact Manifold Regulator

AP100 17 735 ARM11A/B Series Pressure Switch Block 56 ARM11AW Z A 0.4 0.2 0.6 0.5 20 MPa 24 q w 0.3 0.1 1. Accessory 2.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 SQ2000 Applicable tubing O.D. (mm) VQ4 SQ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 Built-in silencer direct exhaust (-S) SSQ1000-SE SSQ2000-SE 3.2 4 6 8 Part numbers above are for a set of ten elements.

VK300

1/8 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF CE-compliant F With bracket (Not mounted) F N T 01 Rc 1 8 20 20 stations Q CE-compliant Nil A port: Rc 1/8 Note) Applicable only for DIN terminal type Type 42: Base mounted (A port side ported) Applicable solenoid valve VK334-(-Q) How to Order VV3K3 05 01 42 Applicable blanking plate assembly VK300-42-1A Thread type

VK300

05 01 42 VZ Thread type VS Solenoid direction Port size Opposite side of A port Nil 1 8 01 Rc VFN Nil Rc G NPT NPTF C4 4 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 F N T Same side of A port S C6 6 cassette Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station 20 20 stations P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH How to Order

PFxx-OMJ0005CN

C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

5 Port Solenoid Valve SY Series

One-touch fitting for 4 C4 SY3000 2 position double One-touch fitting for 6 C6 One-touch fitting for 4 C4 2 One-touch fitting for 6 C6 For DC SY5000 One-touch fitting for 8 C8 5 24 VDC 6 12 VDC SY9000 has no bracket.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Series VQ Metal Seal/Rubber Seal Body Ported

VQ0140-5MO-C4 4 sets (Single solenoid No.) VQ0240-5MO-C4 4 sets (Double solenoid No.) The mark is an assembling mark. Prefix to parts nos. of solenoid valves, etc. VVQ0-R-4-C4 Individual EXH spacer VVQ0-57A-4 DIN rail mounting bracket KQP-X19 Blank plug 23 04 06 Specify valve and option nos. below the manifold base No.

Compact manifold regulator ARM5 Series

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at knob locked) 55 (at knob locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side IN

Plug-in Unit

mA), 0.5 W DC (21 mA) 24 VDC 12 VDC Power consumption (Current) 1 W DC (83 mA), 0.5 W DC (42 mA) Note 1) Use dry air to prevent condensation at low temperatures.

PSxx-OMM0006CN

No.PS-OMM0006CN-E // ZSE40A(F) ISE40A 2 9 12 13 16 16 18 20 23 23 25 25 25 F0 27 F1 OUT1 28 F2 OUT2 31 F3 33 F4 34 F5 / 36 F6 38 F11 39 F80 40 F81 41 42 F90 42 F97 44 F98 46 F99 48 49 52 52 53 60 60 63 -1No.PS-OMM0006CN-E (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

4/5 Port Air Operated Valve Series SYJA3000 1

M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 28 2-4.3 2-M5 x 0.8 2-M5 x 0.8 37.5 23 (Pilot port) (For mounting) (Pilot port) A B 11 20 23 5 3

4/5 Port Air Operated Valve SYJA3000 Series

Pilot port) VGA 37.5 4 1 2 x M5 x 0.8 (Pilot port) 11 B A 5 VPA 1 A B 1 10 M5 x 0.8 (A, B port) 2 x 2.6 (For manifold mounting) 24 A B VPA3 19 1 P R Manual override 54 2 42 47 54 Manual override 23 20 15 3 11 2 x 2.6 (For mounting) 11.5 45 2 x 1.3 (Breathing port) 33.5 M5 x 0.8 (P , R1, R2 port) 21.5 6 6 P R1 17 17 15 8.5 R2 45.5 1/8 (Piping port) 24 21 2 x 1.3 (Breathing port) 32 3 position

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 44 27 2 63 46 3 82 65 4 101 84 5 120 103 6 139 122 7 158 141 8 177 160 9 196 179 10 215 198 11 234 217 12 253 236 13 272 255 14 291 274 15 310 293 16 329 312 17 348 331 18 367 350 19 386 369 20 405 388 L1 L2 1427 VK3000 Series Type 42 Manifold/Base mounted (Side ported) VV5K3-42Station -01 Grommet: G DIN terminal: D Applicable

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Valve 10-VQD1000 Dimensions Plug lead unit manifold: 10-VV4QD15Lead wire length 300 mm Indicator light 4 x Rc1/8 (P, R port) 2-4.5 (Mounting hole) 57.5 52.5 51 1(P) 3(R) 1(P) 3(R) 32 16 17 9 10 P=11 10 4 4 36.5 L2 L1 41.5 45 M plug connector (M) D side Stations U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread 2(B) 2(B) 27.5