CV/MVGQ

85 85.5 41 93 91 93.5 91 41 80 59 55.5 50 54 50 51 48.5 93.5 94 48.5 101.5 107 102 107 49.5 100 69.5 63 57.5 62 57.5 59 56 104 104 56 112 121 112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

CV/MVGQ

41 93 91 93.5 91 41 80 59 55.5 50 54 50 51 93.5 94 48.5 48.5 101.5 107 102 107 49.5 100 69.5 63 57.5 62 57.5 59 104 104 56 56 112 121 112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Dimensions (mm) Recommended flow m3/min (ANR) Model Port size R Effective area (mm2) Weight (g) A B C 1 8 ANB1-02 15 10 51 22 ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 1.2 or less 2.7 or less 3.8 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1

Series SV

SV1000-05SV2000-00SV2000-M1SV3000-00SV1000-M1SV1000-06(For mounting on even numbered station) (For mounting on odd numbered station) SV3000-M1SV4000-M1SV4000-00Accessory Round head combination screw SX3000-22-9 (M2 x 39.5) Series Gasket SV1000 SX3000-57-4 SV2000-21-7 (M3 x 53) SV2000 SX5000-57-6 2 4 (B) Symbol SV3000-21-4 (M4 x 57) 2 4 SV3000 SX7000-57-5 4 2 SV2000-21-8 (M3 x 69.5) SV4000

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Control type 04 06 4 6 Port size 0 1 Meter-out Meter-in M3 M5 01 02 M3 x 0.5 M5 x 0.8 R 1/8 R 1/4 With One-touch fitting Fixed orifice Applicable model AS121F-M3-04 AS121F-M5-04 AS121F-M5-06 AS221F-01-04 AS221F-01-06 AS221F-02-06 Symbol Fixed orifice 1 2 3 4 5 6 7 8 9 10 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 The graph below shows the relationship between orifices for each cylinder bore

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

It is calculated using the following formula. 1 x 105 Kv = Q (8) P 1000 Kv : Flow coefficient [m3/h] Q : Flow rate [m3/h] DP : Pressure difference [Pa] r : Density of fluid [kg/m3] (3) Formula of flow rate It is described by practical units. Also, the flow rate characteristics are shown in Graph (2).

VQZ1000/2000/3000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB/CA1 Tube x Length T0604 x 1 m VQZ1121-C6 Speed controller AS2051F-06 Silencer AN120-M5 Tube x Length T0604 x 1 m VQZ2121-C6 Speed controller AS3001F-06 Silencer INA-25-46 Tube x Length T1075 x 1 m VQZ3121-C6 Speed controller AS4001F-10 Silencer AN101-01 2-7-2 3 Series VQZ Model

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB DBT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 -X BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

1

M3 x 0.5 M3 7.5 15 34 3.3 10.5 10 6.5 23 3.4 5.5 3.5 9.5 5 7 26 M3 x 0.5 M3 7.5 15 38 3.3 13 12 6.5 30 3.4 7 3.5 11.5 5 7 33 -X M4 x 0.7 M4 8.5 17 53 4.4 14.5 14 8 35.5 4.5 7.5 4.5 18 4.5 6.5 38.5 M4 x 0.7 M3 14.5 29 62 6.5 3 26 14 34 4 4.5 16.5 6 45 7 20M5 x 0.8 M4 14.5 29 70 8 3 31 17 39 4 5.5 20.5 7 51 8 M6 x 1 M5 17 34 76 9.5 3 41 22 50 4.5 6.5 21 7.5 62.5 10

Smooth Cylinder/Low Speed Cylinder

41 41 44 41 41 49 49 83.5 93.5 46.5 47 85.5 91 93.5 91 41 41 43 43 41 41 52 43 50 49.5 49 49 52.5 49 49.5 56 57.5 92 102 53.5 53.5 94 107 102 107 49 49 51 51 49.5 49 58.5 51.5 58.5 56.5 56 56 61 56 56.5 65 68 102.5 112.5 61.5 61 104 121 112 121 55.5 56 57.5 57.5 57.5 55.5 66 58.5 Note 2) D-A9/A9V types cannot be mounted on 50. 1224 Auto Switch Mounting Series CA2Y Minimum Auto Switch Mounting

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

ZX

(Pilot port for supply valve) 1 51 41 Filter unit (F) M3 x 0.5 (Pilot port for release valve) 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 19 7.6 1 10 13.6 Vacuum switch Supply valve N.O.

5

41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 61 56 58.5 56 56.5 55.5 57.5 55.5 66 56 66 58.5 68 102.5 112.5 61.5 57.5 61 57.5 104 121 112 121 Operating Range (mm) Auto switch model Bore size 40 50 63 80 100 Auto switch model Bore size 40 50

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.