1 Symbol -X50 Large Bore Lock-up Cylinder 1 CL1 X50 Mounting style Bore size Stroke Suffix Specifications 180, 200, 250, 300 Applicable bore size (mm) This is a self-locking system that mounts onto a large bore air cylinder (Series CS1) from 180 to 300, and contains a ring that is tilted by a spring force, which is further tilted by the thrust of the cylinder to securely lock the piston rod
Option Body Option/End Boss Type Symbol Specifications/Description Heat resistance (100C) Fluororubber seal Closing direction spring assist Opening direction spring assist With needle Without magnet MHQ(G)2-compliant finger flat type EPDM seal/Fluorine grease Axial ported type Fluorine grease Grease for food -X4 -X5 -X7 -X12 -X46 -X50 -X51 -X53 -X56 -X63 -X79 Type of piping port Applicable
MHR Symbol Specifications/Description Heat resistance (100C) Fluororubber seal Without magnet EPDM for seals, Fluorine grease Fluorine grease Grease for food MHK -X4 -X5 -X50 -X53 -X63 -X79 MHS MHC MHT MHY MHW -X MRHQ MA D663 Series MHY2 Construction Closed condition 10 16 20, 25 r o !8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !
X4F ALARM Available Unavailable ALARM signal output flag X50 OVC Available Unavailable OVC signal output flag X51 OVT Available Unavailable OVT signal output flag 33 - (ii) Internal editable status flags (Y contacts / Master outputs) In serial operation mode, these flags can be set and read.
The following explains the compliance with "SEMI-F47 semiconductor process equipment voltage sag immunity test" of LECSB2-T series. (1) Parameter setting Setting [Pr. PA20] and [Pr. PF25] as follows will enable SEMI-F47. Parameter Setting value Description PA20 _ 1 _ _ SEMI-F47 selection PF25 200 Set the time [ms] of the [AL. 10.1 Voltage drop in the control circuit power] occurrence.
SEMI F47 SEMI F47 is a SEMI standard which stipulates guidelines regarding voltage sag immunity. Semiconductor manufacturers require this standard for temperature control equipment, just like SEMI S2. Insulation resistance Electrical resistance between the conductor inside the device and the chassis (grounded).
SEMI F47 SEMI F47 is a SEMI standard which stipulates guidelines regarding voltage sag immunity. Semiconductor manufacturers require this standard for temperature control equipment, just like SEMI S2. Insulation resistance Electrical resistance between the conductor inside the device and the chassis (grounded).
The following explains the compliance with "SEMI-F47 semiconductor process equipment voltage sag immunity test". This function enables to avoid triggering [AL. 10 Undervoltage] using the electrical energy charged in the capacitor in case that an instantaneous power failure occurs during operation. (1) Parameter setting Setting [Pr. PA20] and [Pr. PF25] as follows will enable SEMI-F47.
The following explains the compliance with "SEMI-F47 semiconductor process equipment voltage sag immunity test" of LECSS2-T series. (1) Parameter setting Setting [Pr. PA20] and [Pr. PF25] as follows will enable SEMI-F47. Parameter Setting value Description PA20 _ 1 _ _ SEMI-F47 selection PF25 200 Set the time [ms] of the [AL. 10.1 Voltage drop in the control circuit power] occurrence.
If the product is subjected to a short power outage (including voltage sag), it may take a long time to resume normal operation or be unable to restart normally due to the protective equipment triggered after the power is recovered. In this case, turn off the switch of the product and reset the protection circuit referring to 6.2 Reset the Thermal relay and High Pressure Switch.
If the product is subjected to a short power outage (including voltage sag), it may take a long time to start operating normally or be unable to restart normally due to the protective equipment triggered after the power is recovered. In that case, turn off the switch with lamp on the body once, on dryer panel and wait 3 minutes. After this step, turn on the switch to restart.
If the product is subjected to a short power outage (including voltage sag), it may take a long time to start operating normally or be unable to restart normally due to the protective equipment triggered after the power is recovered. In that case, turn off the switch with lamp on the body once, and reset the protective equipment circuit referring to 5.2 Reset of protective equipment.
If the product is subjected to a short power outage (including voltage sag), it may take a long time to start operating normally or be unable to restart normally due to the protective equipment triggered after the power is recovered. In that case, turn off the switch with lamp on the body once, and reset the protective equipment circuit referring to 5.2 Reset of protective equipment.
If the product is subjected to a short power outage (including voltage sag), it may take a long time to resume normal operation or be unable to restart normally due to the protective equipment triggered after the power is recovered. In this case, turn off the switch of the product and reset the protection circuit referring to 6.2 Reset the Thermal relay and High Pressure Switch.
If the product is subjected to a short power outage (including voltage sag), it may take a long time to resume normal operation or be unable to restart normally due to the protective equipment triggered after the power is recovered. In this case, turn off the switch of the product and reset the protection circuit referring to 6.2 Reset the Thermal relay and High Pressure Switch.
If the product is subjected to a short power outage (including voltage sag), it may take a long time to start operating normally or be unable to restart normally due to the protective equipment triggered after the power is recovered. In that case, turn off the switch with lamp on the body once, and reset the protective equipment circuit referring to 5.2 Reset of protective equipment.
If the product is subjected to a short power outage (including voltage sag), it may take a long time to resume normal operation or be unable to restart normally due to the protective equipment triggered after the power is recovered. In this case, turn off the switch of the product and reset the protection circuit referring to 6.2 Reset the Thermal relay and High Pressure Switch.
Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 03 (3/8 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: X50 (0.5 μm), Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)
Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 06 (3/4 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: X50 (0.5 μm), Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)
Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: X50 (0.5 μm)