Body Style: B (Base Mounted w/Screws), Coil Voltage: V (6 VDC), Flow Rate: A (Power Consumption: 0.35W, Operating Press: 0.1MPa, Cv: 0.016), Electrical Entry: G (Grommet), Port Size: M3 (Base Mounted, w/Sub-plate), Made to Order: X50 (Universal Type)

Body Style: B (Base Mounted w/Screws), Coil Voltage: 5 (24VDC), Flow Rate: D (Power Consumption: 0.5W, Operating Press: 0.5MPa, Cv: 0.011), Electrical Entry: G (Grommet), Port Size: M3 (Base Mounted, w/Sub-plate), Made to Order: X50 (Universal Type)

Body Style: Base Mounted w/Screws, Coil Voltage: 6 VDC, Flow Rate: Power Consumption: 0.35W, Operating Press: 0.1MPa, Cv: 0.016, Electrical Entry: Grommet, Port Size: Base Mounted, w/Sub-plate, Made to Order: Universal Type, Lead Wire Length: -

Body Style: Base Mounted w/Screws, Coil Voltage: 24VDC, Flow Rate: Power Consumption: 0.5W, Operating Press: 0.5MPa, Cv: 0.011, Electrical Entry: Grommet, Port Size: Base Mounted, w/Sub-plate, Made to Order: Universal Type, Lead Wire Length: -

IDX-OM-U010

If the product is subjected to a short power outage (including voltage sag), it may take a long time to resume normal operation or be unable to restart normally due to the protective equipment triggered after the power is recovered. In this case, turn off the switch of the product and reset the protection circuit referring to 6.2 Reset the Thermal relay and High Pressure Switch.

IDX-OM-V020

If the product is subjected to a short power outage (including voltage sag), it may take a long time to resume normal operation or be unable to restart normally due to the protective equipment triggered after the power is recovered. In this case, turn off the switch of the product and reset the protection circuit referring to 6.2 Reset the Thermal relay and High Pressure Switch.

OMU0023

X4F ALARM Available Unavailable ALARM signal output flag X50 OVC Available Unavailable OVC signal output flag X51 OVT Available Unavailable OVT signal output flag 33 - (ii) Internal editable status flags (Y contacts / Master outputs) In serial operation mode, these flags can be set and read.

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm. 3 port solenoid valve, direct operated

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm. 3 port solenoid valve, direct operated

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm. 3 port solenoid valve, direct operated

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm. 3 port solenoid valve, direct operated

Material: C (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon Seal), Element Length: A (ℓ250), Port Size: 03 (3/8 Rc), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: X50 (0.5 μm), Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 03 (3/8 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: X50 (0.5 μm), Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 06 (3/4 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: X50 (0.5 μm), Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: X50 (0.5 μm)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: X50 (0.5 μm), Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 06 (3/4 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: X50 (0.5 μm), Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket), Made to Order: X77 (Differential Pressure

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 06 (3/4 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: X50 (0.5 μm)

Element Length: B [ℓ500 (ℓ250 x 2)], Port Size R: 10 (1), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: X50 (0.5 μm)

Material: S (Body: Stainless Steel 304; O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: X50 (0.5 μm), Element Seal Material: Vessel Replacement or Fiber Element Types, Option: G2 (G46-10-02X3, Stainless Steel at Wetted Parts)