High Vacuum Angle Valve

181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x

Table of Contents

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.

Cylinder with Lock

16)*2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 70 75 80 85 90 D-A9m n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 45 50 55 60 70 D-A9mV

Table of Contents

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

Modular Design with Uniform Body Style

54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40-06-D 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50-D 70 75 66 11 22 113 3.2 AR60-D 70 75 66 11 22 113 3.2 Model *1 The dimension of B is the length when the regulator knob is unlocked. 83 A Regulator AR20-D to AR60-D Series Regulator with Backflow Function AR20K-D to AR60K-D Series Dimensions With Backflow Function (Round Type Pressure Gauge, Square

10

75 85 D-M9lAV n 55 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 65 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 70 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 1 70 75 80 85 95 100 D-A9l n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2)

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12.5 14 8 33.6 20 8 16 5 66 46 24 64 24 27 13 86 9.5 7 85 M10 x 1.5 x 15 12.5 14 8 41.6 25 10 20 5 76 57 25 74 25 31 17 104 10.5 10 95 PA PB PW QW S T TT ta tb Q W Z M (N) MM NN P LD Model CY1S15 CDY1S15 CY1S20 CDY1S20 CY1S25 CDY1S25 CY1S32 CDY1S32 CY1S40 CDY1S40 8 7.5 M5 x 0.8 M8 x 1.0 M5 x 0.8 5.6 30 50 75 30 62 12.5 22.5 0.5 1 75 72 97 10 9.5 M6 x 1.0 M10 x 1 Rc 1/8 5.6 40 70 90 38 73

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

70 75 80 85 90 2 (Different surfaces) 70 75 80 85 90 2 (Same surface) 70 75 80 85 90 D-A44 n (Different surfaces) 70 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 90 + 30 (n 2) n = 2, 4, 6, 8 n (Same surface) 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2

Refrigerated Air Dryers Series IDF/IDU

Applicable dryer Mass (g) A B IDF-FL200 IDF-FL201 IDF-FL202 IDF-FL203 IDF-FL204 IDF-FL205 IDF-FL206 IDF-FL207 IDF-FL208 IDF-FL213 IDF-FL214 75 75 75 90 70 120 100 170 140 230 175 265 190 265 20 30 45 55 70 75 70 100 140 175 190 265 265 265 320 270 375 315 415 365 540 400 515 560 515 150 200 375 375 375 360 310 440 420 555 550 580 720 735 610 735 IDF1E, 2E IDF3E IDF4E IDF6E, IDU3E IDF8E, IDU4E

Modular/F.R.L. Units Series AC

55 55 72.5 77.5 A2 43 57 57 75 80 A2 43 57 57 75 80 A3 43 57 57 75 80 A1 41.5 55 55 72.5 77.5 A2 43 57 57 75 80 A3 43 57 57 75 80 A1 41.5 55 55 72.5 77.5 A2 43 57 57 75 80 AC20C AC25C AC30C AC40C AC40C-06 Attachment Model A1: Dimensions from the end of the IN side to the center of the mounting hole for the first bracket.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

, 75 90, 100 25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97 92 87 82 102 107 112 117 122 132 142 147 30 40 50 90 85 80 75 70 65 100 105 115 125 130 95 104 55 99 94 45 89 109 114 119 124 129 139 149 154 159 169 179 25 35 45 95 90 85 80 75 70 105 110 120 130 135 140 150 160 100 8-29-8 9 Dual Rod Cylinder: Basic Type Series

MB

n2) n = 2, 4, 6, 8 85 + 30 (n2) n = 2, 4, 6, 8 95 + 100 (n2) n = 2, 4, 6, 8 100 + 100 (n2) n = 2, 4, 6, 8 105 + 100 (n2) n = 2, 4, 6, 8 110 + 100 (n2) n = 2, 4, 6, 8 90 + 30 (n2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) 90 + 100 (n2) n = 2, 4, 6, 8 125 + 100 (n2) n = 2, 4, 6, 8 n (Same side) 1 60 65 75 80 85 90 90 90 2 (Different sides) 2 (Same side) 70 75 80 85 70 75 80 85 70

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

PNY-70 NLP-300A P7 Air-hydro Retaining plate gasket Bore size (mm) Kit no.

CHKD/CHKG

75 80 85 90 95 100 125 150 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 110 135 160 185 210 75 80 85 90 95 100 105 110 115 120 145 170 195 220 245 12.4 15.5 CHKGB25 CHKGB63 10.4 16 CHKGB32 CHKGB80 10.5 22 CHKGB40 CHKGB100 13.5 26.5 282 Compact Hydraulic Cylinder: 16 MPa CHKG Series Specific Product Precautions Be sure to read this before handling the products.

CV/MVGQ

Standard stroke (mm) Note) Bore size (mm) CC 25, 50, 75, 100, 125, 150 20 25, 50, 75, 100, 125, 150 25 Symbol Specifications RB 25, 50, 75, 100, 125, 150, 200 32 -XA Change of rod end shape 25, 50, 75, 100, 125, 150, 200, 250 40 J Note 1) Intermediate stroke other than above is manufactured upon receipt of order.

CV/MVGQ

90 75 80 90 75 80 90 1 Different sides CC 2 Same side 20 + 35 (n 2) n = 2, 3, 4 75 + 35 (n 2) n = 2, 4, 6, 8 80 + 35 (n 2) n = 2, 4, 6, 8 90 + 35 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 Different sides RB D-A44C n Same side J 10 75 80 90 1 2 (Different sides, Same side), 1 D85 90 95 105

LX

85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5BD-50B LXSH5BD-75B LXSH5BD-100B LXSH5BD-125B LXSH5BD-150B Refer to page 301 for mounting.

LX

85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5BD-50B LXSH5BD-75B LXSH5BD-100B LXSH5BD-125B LXSH5BD-150B Refer to page 301 for mounting.

Table of Contents

2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !