Electric Actuator/Slider Type

Weight [kg] Weight: Top Mounting Type Series LEYG25M LEYG32M Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Motor type Absolute encoder 1.8 2.0 2.4 2.8 3.1 3.5 3.7 3.2 3.4 4.0 4.7 5.3 5.7 6.2 Series LEYG25L LEYG32L Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Motor type Absolute encoder 1.9 2.1 2.3 2.7 3.0 3.3 3.6 3.2 3.4 3.8 4.6 5.0 5.5 5.9 [kg] Weight

A

125 150 200 250 300 40 40 50 50 63 63 80 80 100 100 M A X .

LJ1H

Positioning distance (mm) 500 250 100 10 1 10 50.3 25.3 10.3 1.3 0.4 100 5.4 2.9 1.4 0.5 0.4 Speed (mm/s) 300 2.1 1.3 0.8 0.5 0.4 600 1.4 1.0 0.7 0.5 0.4 Values will vary slightly depending on the operating conditions.

Electric Actuator

Applicable stroke table 30 50 100 150 200 250 300 350 400 450 500 Stroke Model LEY25 LEY32 ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) 12 Electric Actuator/Rod Type Series LEY-X5 Specifications 2 6 2 6 3 7 3 7 Model LEY25S /LEY25DS LEY32DS (In-line) LEY32S (Top mounting) 30, 50, 100, 150, 200 30, 50, 100, 150, 200, 250 30, 50, 100, 150, 200, 250 Stroke [mm] 250, 300, 350, 400 300, 350, 400,

MG

20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Bore size (mm) 12, 16 20, 25 32 to 100 Non-rotating accuracy of plate: 0.01 Plate displacement amount : 0.05 mm CX (MGPA 12-10 st, when Load weight is 1.7 kg.)

Air Cylinder Series MB

ML1C Bore size (mm) Standard stroke (mm) 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400,

5 Port Solenoid Valve Series SY3000/5000/7000/9000

ARBY3000 A1 port regulated (PA), B1 port regulated (PB) P port regulated (PA, B) Outlet pressure (MPa) Outlet pressure (MPa) 0.6 0.6 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBY5000 A1 port regulated (PA), B1 port regulated (PB) P port regulated (PA, B) 0.5 0.6 0.5 0.6 Outlet pressure (MPa) Outlet

24

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Made to Order: Individual Specifications (For details, refer to page 491.)

Made to Order

Standard Strokes (mm) Max. manufacturable stroke Note 2) Bore size Standard stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 1000 Note 1) Intermediate strokes not listed above are produced

Table of Contents

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

ISO Cylinder

101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 68 118 143 168 97 147 172 197 140 190 215 240 40 89 139 164 189 214 122 172 197 222 247 174 224 249 274 299 Boss-cut/Basic [mm] Bore size Stroke Item S ZZ 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201

LJ1H

Positioning distance (mm) 500 250 100 10 1 10 50.3 25.3 10.3 1.3 0.4 100 5.4 2.9 1.4 0.5 0.4 Speed (mm/s) 300 2.1 1.3 0.8 0.5 0.4 600 1.4 1.0 0.7 0.5 0.4 Values will vary slightly depending on the operating conditions.

IZx-OMT0049

200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 1s 150 150 2s 200 200 0.5s 1s 2s 250

C95

, 125, 160, 200, 250, 320, 400, 500 40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.

Cylinder with Lock

175 200 225 250 40 12.5 25 37.5 50 75 100 125 150 175 200 225 250 50 12.5 25 37.5 50 75 100 125 150 175 200 225 250 63 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 12.5 25 37.5 50 75 100 125 150 175 200 225 250 100 12.5 25 37.5 50 75 100 125 150 175 200 225 250 13 Cylinder with Lock Double Acting, Single Rod CP96N Series Dimensions: With Mounting Bracket * Refer to Basic (B) for other

CATALOG VC10

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

TABLE OF CONTENTS

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

C95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

Electric Slide Tables

100 200 Mey 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L5 200 400 L5 [mm] L5 [mm] L5 [mm] 150 300 Mer m 100 200 50 100 0 0 0 1 2 3 4 5 0 0.2 0.4 0.6 0.8 1 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 200

Single Axis Electric Actuator Series LJ1H

Positioning distance (mm) 500 250 100 10 1 10 50.3 25.3 10.3 1.3 0.4 100 5.4 2.9 1.4 0.5 0.4 Speed (mm/s) 300 2.1 1.3 0.8 0.5 0.4 600 1.4 1.0 0.7 0.5 0.4 Values will vary slightly depending on the operating conditions.