MHZ

100 150 Misc.

MHZ

MPa 0.6 MPa 0.6 MPa 0.6 MPa Gripping force (N) 300 Gripping force (N) 40 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 250 0.4 MPa 0.4 MPa 0.4 MPa 30 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 20 150 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 100 10 50 0 10 20 30 40 50 60 0 50 100 150 200 Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping

10

50 75 100 125 40 56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51 25 12.5 25 37.5 50 75 100 125 150 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 [mm] Rubber Bumper Bore size [mm] h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301

Mechanically Jointed Rodless Cylinders

400 300 200 100 MY3A max.

Cylinder with Lock Series CLS

700 800 900 160 600 140 600 500 500 125 400 400 300 300 D200 200 -X Individual -X 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 785 Cylinder with Lock Double Acting, Single Rod 125, 140, 160, 180, 200, 250 Series CLS How to Order CLS L 125 100 D M9B M9B With Auto Switch CDLS M9BW L 125 100 D With auto switch (Built-in magnet) Cylinder unit

Solid State Auto Switches

CE marking Precautions Caution D-A44C Relay, PLC 100 VAC 5 to 25 mA q Built-in 2.4 V or less (Up to 20 mA)/3.5 V or less (Up to 50 mA) Red LED illuminates when turned ON. CE marking 24 VDC (3) 5 to 50 mA 200 VAC 5 to 12.5 mA 1. Use cable whose O.D. is within the size in the figure to maintain water resistant performance. 2.

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

48

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) AC Servo Motor (100/200/400 W) Ball screw drive Belt drive Ball screw drive Series LEFS Series LEFB Series LEFS Stroke 300 to 1000 300 to 2000 300 to 2000 Size 16 25 32 Stroke 100 to 400 100 to 600 100 to 800 200 to 1000 Size 16 25 32 40 Size Stroke 100 to 600 100 to 800 200 to 1000 25 32 40 CAT.NAS100-87 Slide Table Step Motor (Servo/24 VDC

Parallel Style Air Gripper Series MHZ

0.5 MPa 300 40 0.4 MPa 0.4 MPa 0.3 MPa 30 0.3 MPa 200 0.2 MPa 0.2 MPa 20 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D 100 Pressure 0.7 MPa Gripping force (N) 0.6 MPa 80 0.5 MPa 60 0.4 MPa 0.3 MPa 40 0.2 MPa 20 0 20 40 60 80 100 Gripping point L (mm) 378 Parallel Style Air Gripper Series MHZ Effective Gripping Force: Series

24

less 300 300 100 200 200 100 80 80 100 100 63 63 50 50 50 50 40 40 Load mass m [kg] Load mass m [kg] 32 32 25 10 10 25 20 20 5 5 16 16 MGJ 1 1 JMGP 0.5 10 50 100 200 0.5 50 100 200 MGP MGP 10 Eccentric distance L [mm] Eccentric distance L [mm] MGPW (3) 25 stroke, V = 400 mm/s (4) Over 25 stroke, V = 400 mm/s MGQ 300 300 100 100 MGG 200 200 80 80 MGC 100 100 63 MGF 63 50 50 50 MGZ 50 40 MGT

Air Slide Table

1.5 V = 100 V = 100 2.5 2.5 1.0 1.0 V = 200 V = 200 2.0 2.0 V = 300 V = 300 Load mass m [kg] Load mass m [kg] 0.5 0.5 V = 500 V = 500 0.3 0.3 1.5 1.5 V = 100 V = 100 0.0 0.0 30 30 0 10 20 40 50 60 70 80 90 100 0 10 20 40 50 60 70 80 90 100 1.0 1.0 L3: Overhang Allowable range: 100 mm L3: Overhang Allowable range: 100 mm Allowable overhang L [mm] Allowable overhang L [mm] V = 200 V = 200

155

Voltage symbol 24 VDC V100-61-3-05 DC 24 VZ 12 VDC V100-61-3-06 DC 12 VZ 100 VAC V100-61-2-01 100/110 VZ 200 VAC V100-61-2-02 200/220 VZ 110 VAC V100-61-2-01 100/110 VZ 220 VAC V100-61-2-02 200/220 VZ 240 VAC V100-61-2-07 240 VZ If an AC specification without DIN Terminal (DO) is selected, always use a DIN connector with surge voltage suppressor as the connector.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) -X Selection Graph (6) to (8) (Horizontal mounting) 20Data Graph (6) l: 100 mm or less Graph (7) l: 101 to 200 mm Graph (8) l: 201 to 300 mm 300 100 200 100 100 Load weight m (kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to 100 80, 100/25 to 100 7-6-142 Air-hydro (Bore size 20 to 100) Clean Series (Bore size 12 to 63) Built-in One-touch fittings (Bore size 32 to 63) Foot/Flange style Double clevis style Copper-free 7-6-1 2 Compact Cylinder: Standard

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

Compact

] 500 500 500 500 400 400 400 400 m L3 [mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325

CLS

500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed:

CQS

75, 100, 125, 150 175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18