MB

, 200, 250, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350

Compact

Select three graphs from the top of the right side first row on page 175. LEPY LEPS 3. Lx = 420 mm, Ly = 300 mm, Lz = 1000 mm 4.

5 Port Solenoid Valve

175 187.5 200 200 212.5 225 225 237.5 250 250 262.5 275 148 160.5 160.5 173 185.5 185.5 198 210.5 210.5 223 235.5 235.5 248 260.5 260.5 273 285.5 L n 21 22 23 24 25 26 27 28 29 30 31 32 19 20 L1 L2 L3 L4 216.5 225 233.5 242 250.5 259 267.5 276 284.5 293 301.5 310 199.5 208 272.2 280.7 289.2 297.7 306.2 314.7 323.2 331.7 340.2 348.7 357.2 365.7 255.2 263.7 300 312.5 312.5 325 337.5 337.5

SQ1000/2000

175 Rubber seal 9.0 SQ2430 (0.65) 44 or less 34 or less 180 Metal seal 11.7 Exhaust center SQ2431 (0.7) 44 or less 34 or less 175 Rubber seal 12.6 SQ2530 (0.45) 44 or less 34 or less 180 Metal seal 8.1 Pressure center SQ2531 (0.5) 44 or less 34 or less 175 Rubber seal 9.0 Dual 3 port valve A B C SQ2 31 Rubber seal (0.5) 44 or less 34 or less 155 9.0 Note 1) Values for the top ported cylinder

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 54 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 80 86

C95Series

" SO, "63 a.5 25, 50, 75, 100,125, 150, 175, 200, 250.300, 350. 400. 450, 500 40 " !

Table of Contents

IDF-BP303 IDF-BP311 IDF4E IDF4E 531 560 595 110 2.3 595 110 2.4 175 175 1/2 1/2 I D F I D F IDF6E IDF6E 555 587 617 617 IDF-BP304 IDF-BP312 IDF8E IDF8E 129 3.3 129 3.4 187 182 3/4 3/4 627 659 647 647 31 31 IDF11E IDF11E IDU-BP305 IDU-BP306 IDU-BP307 IDU-BP313 IDU-BP314 IDU-BP315 506 530 572 572 100 1.6 100 1.7 202 192 IDU3E IDU3E 3/8 3/8 I D U I D U 603 632 625 625 110 2.3 110 2.4 175 175

CL

CL-40 CL-50 CL-63 CL-80 CL-100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Maximum Stroke For the maximum stroke of the CA1 series 40 to 100, and CS1 series

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VZS VFS ~ = ~ = VS4 VQ7 L Dimension EVS n: Stations n L 20 411 388 19 392 369 18 373 350 17 354 331 16 335 312 15 316 293 14 297 274 13 278 255 12 259 236 11 240 217 10 221 198 9 202 179 8 183 160 7 164 141 6 145 122 5 126 103 4 107 84 3 88 65 2 69 46

Air Cylinder

) 149 25 30 19 62 32 16.5 10.5 145 144 (152) 156 32 35 19 62 38 18.5 10.5 145 145 (153) 155 40 35 19 70 48 21.5 10.5 164 159 (168) 173 50 40 19 78 59 24 10.5 187 182 (194) 199 63 40 20 78 72 24 10.5 187 182 (194) 199 80 52 10 80 59 213 207 (221) 229 100 62 7 80 71 213 207 (221) 229 1/4 stroke ( ): Denotes the dimensions for long strokes.

VQZ1000/2000/3000

185.5 13 146 154 175 185.5 14 156.5 164.5 187.5 198 15 167 175 200 210.5 16 177.5 185.5 212.5 223 17 188 196 225 235.5 18 198.5 206.5 237.5 248 19 209 217 237.5 248 20 219.5 227.5 250 260.5 L1 L2 L3 L4 2-7-50 Base Mounted 51 51 Series VQZ1000/2000/3000 Plug Lead Unit: Manifold VQZ2000 VV5QZ25Stations Port size C Grommet (G) 36.5 (12) (35) (5.5) 44.5 mounting hole DIN rail clamp screw 33

AC Servo Motor Driver (Network card type ）

Writing any value causes SDO Abort Code (0609 0030h Value range of parameter exceeded). 18 145 18EtherCAT COMMUNICATION Set Sync Manager 3 (TxPDO). The description of each Sub Index is as follows. Sub Name Description 0 SM output parameter The number of entries is returned.

MGG

40 110 19 40 145 23 500mm or more 20 Guide Cylinder/End Lock Type 20, 25, 32, 40, 50, 63, 80, 100 Series MGG How to Order MGG L B H N 32 100 C73 Guide cylinder Number of auto switches 2 pcs. 1 pc.

Fieldbus System

0 Manual override 3 5 Nil B K SY3000 SY5000 Standard (101 psi (0.7 MPa)) Quick response type (101 psi (0.7 MPa)) High pressure type (145 psi (1.0 MPa)) D: Push-turn locking slotted type Nil: Non-locking push type w Type of actuation Only metal seal type is available for the high pressure type. 1 2 3 4 5 A B C 2-position single 2-position double 3-position closed center 3-position exhaust

Dual Rod Cylinder Series CXSJ/CXS

CXS25-25A CXS25-30A CXS25-35A CXS25-40A CXS25-45A CXS25-50A CXS25-60A CXS25-70A CXS25-75A CXS25-80A CXS25-90A CXS25-100A 30 25 100 124 CXSJ 30 105 129 35 110 134 CXS Note) For port threads TN and TF, only the piping port type varies. 40 40 115 139 45 120 144 50 125 149 D60 135 159 70 145 169 -X 75 150 174 60 80 155 179 Individual -X 90 165 189 100 175 199 575 Series CXS Dimensions: 32 67.5

CE

, 200, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64 71 M18 x 1.5 7 18 144 22.5 98.5 200, 300, 500 194 32 20 77 84 M18 x 1.5 7 18 145 21 P M N O T X Z L Q Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc(PT) 1/8 57.5 30 14 56 41 40 5.5 M6 x 1 Rc(PT) 1/8 64.5 30 14 62 49 50 6.6 M8 x 1.25 Rc(PT) 1/4 76.5 35 19

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

CXS25-25A CXS25-30A CXS25-35A CXS25-40A CXS25-45A CXS25-50A CXS25-60A CXS25-70A CXS25-75A CXS25-80A CXS25-90A CXS25-100A 25 100 124 30 30 105 129 35 110 134 Note) For port threads TN and TF, only the piping port type varies. 40 115 139 40 45 120 144 50 125 149 60 135 159 70 145 169 75 150 174 60 80 155 179 90 165 189 100 175 199 8-29-15 16 Series CXS Dimensions: 32 67.5 23.5 54 10 2-cushion

10

, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800 CA2 Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 125 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800,

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

188 313 150 163 288 125 138 263 23 100 113 238 36 75 100 213 54 12.5 37.5 50 88 54 4 17 75 250 225 200 175 188 313 150 163 288 125 138 263 23 100 113 238 36 75 100 213 54 12.5 25 37.5 50 88 69 5 24 87 250 225 200 175 200 325 150 175 300 125 150 275 25 100 125 250 51 75 112 225 64 12.5 25 37.5 50 100 69 5 24 87 250 225 200 175 200 325 150 175 300 125 150 275 25 100 125 250 51 75 112 225 64

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25