CL

/4 40 50 63 80 100 125 140 160 207 3.2 3.2 3.2 4.5 6.0 8 9 9 70 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 244 36 45 45 60 60 75 75 75 252 42 50 59 76 92 100 112 118 27 30 31 37 40 35 35 39 16.5 16.0 16.0 18.0 18.0 40 40 40 84 90 98 116 126 98 98 106 59 66 66 80 81 133 133 141 8 0 0 0 0 27 27 34 44 43 45 45 50 13 13 16 21 22 20 30 25 51 58 58 71 72 110

Battery-less

Dimensions [mm] Dimensions [mm] Model G H LEFS25E-50 100 30 LEFS25E-100 100 45 LEFS25E-150 100 45 LEFS25E-200 220 45 LEFS25E-250 220 45 LEFS25E-300 340 45 LEFS25E-350 340 45 LEFS25E-400 340 45 Model G H LEFS25E-450 460 45 LEFS25E-500 460 45 LEFS25E-550 580 45 LEFS25E-600 580 45 LEFS25E-650 580 45 LEFS25E-700 700 45 LEFS25E-750 700 45 LEFS25E-800 820 45 38 LEFS Series Battery-less Absolute

Table of Contents

Possible to use in vacuum to 100 kPa Tubing material Tubing O.D.

Air Slide Table

100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30

ISO Cylinder

40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1

1

35 M6 x 1 depth 12 35 75, 100, 125, 150, 200 129 135 29 80 118 6.6 11 depth 8 M10 x 1.5 depth 18 40 73 27 5.5 6 8 4 25 16 19 19 120 40 45 M8 x 1.25 depth 16 75, 100, 125 149 170 29 100 150 9 50 93 14 depth 10 M12 x 1.75 depth 21 34 6.5 9 10 7 32 16 19 19 120 40 45 M8 x 1.25 depth 16 150, 200, 250 149 170 29 100 150 9 50 93 14 depth 10 M12 x 1.75 depth 21 34 6.5 9 10 7 40 19 21 22 150 45

CM2

140 301 to 400 156 160 160 165 401 to 500 181 185 185 190 20 25 32 40 30 32 32 41 36 36 36 46 24 24 24 25 With Rod Boot l ZZ Symbol Z 1 to 50 143 147 149 181 Stroke Bore size (mm) 1 to 50 12.5 12.5 12.5 12.5 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 125 1 to 50 63 67 67 71.5 51 to 100

ZP

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of

CL

/4 40 50 63 80 100 125 140 160 244 36 45 45 60 60 75 75 75 252 207 3.2 3.2 3.2 4.5 6.0 8 9 9 70 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 16.5 16.0 16.0 18.0 18.0 40 40 40 42 50 59 76 92 100 112 118 27 30 31 37 40 35 35 39 59 66 66 80 81 133 133 141 84 90 98 116 126 98 98 106 8 0 0 0 0 27 27 34 44 43 45 45 50 13 13 16 21 22 20 30 25 51 58 58 71 72 110

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces, Same surface) With 1 pc. 85 90 105 110 115 20 100 D-Y7BA 85 + 45 (n 4)/2 n = 4, 8, 12, 16 105 + 45 (n 4)/2 n = 4, 8, 12, 16 110 + 45 (n 4)/2 n = 4, 8, 12, 16 115 + 45 (n 4)/2 n = 4, 8, 12, 16 20 + 45 (n 2)/2 n = 2, 4, 6, 8 100 + 45 (n 4)/2 n = 4, 8, 12, 16 90 + 45 (n 4)/2 n = 4, 8, 12, 16 With n pcs. With 2 pcs.

10

80 9 2 12 100 50 120 39.5 80 100 12 4 16 126 63 153 45 100 120 14 4 16 150 75 178 54 Head flange: (G) / Locking at head end: (-Hl) Cushion valve 4 x FD Port FY FB ZZ + Stroke FT FZ FX -Wl -Hl/-Rl [mm] Bore size [mm] FB FD FT FX FY FZ ZZ ZZ D32 50 7 10 64 32 79 149 40 55 9 10 72 36 90 158 50 70 9 12 90 45 110 176 63 80 9 12 100 50 120 176 80 100 12 16 126 63 153 220 100 120 14 16 150 75 178

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) Refer to Manifold Option on page 100.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 24 11.

Table of Contents

DC Specification Temperature rise (C) Note) Temperature rise (C) Note) Model Power consumption (W) 45 45 60 Model Power consumption (W) 45 45 60 VX21 VX22 VX23 VX21 VX22 VX23 4.5 7 10.5 4.5 7 10.5 AC Specification AC Specification Apparent power (VA) Holding 19 16 43 35 62 52 Apparent power (VA) Holding 22 18 46 38 64 54 Temperature rise (C) Note) Temperature rise (C) Note) Model Model Inrush

LJ1H

Refer to page 100 for part numbers. 73

ZP

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of

Table of Contents

VAC, 100 VDC or less.

MB

Z Bore size (mm) Z B DA DB DL DU DC DX DE DR DO DT DS DH DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 32 40 50 63 80 100 125 32 40 50 63 80 100 125 33 33 45 45 65 65 75 46 52 65 75 95 114 136 32 32 43 43 64 64 78 22 22 30 30 45 45 60 10 10 11.5 11.5 14 14 15 44 44 60 60 86 86 110 14 14 20 20 30 30 32 62 62 81 81 111 111 136 6.6 6.6 9 9 11 11 13.5 15 15 18 18 22 22

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

10 D-Y69/Y7PV D-Y7WV 10 + 30 n = 2, 4, 6, 8 (n 2) 2 100 + 30 n = 4, 8, 12, 16 (n 4) (n 4) (n 4) 2 90 + 30 n = 4, 8, 12, 16 2 95 + 30 n = 4, 8, 12, 16 n 2 2 (Different sides, Same side), 1 115 130 20 120 125 n D-Y7BAL 20 + 45 n = 2, 4, 6, 8 (n 2) 2 (n 4) (n 4) (n 4) (n 4) 2 115 + 45 n = 4, 8, 12, 16 120 + 45 n = 4, 8, 12, 16 125 + 45 n = 4, 8, 12, 16 130 + 45 n = 4, 8, 12, 16 2 2

C95

6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1, 2 20 20 85 90 90 100 105 110 Y7BAL 20 + 45 (n 2)/2 20 + 45 (n 2)/2 85 + 45 (n 4)/2 90 + 45 (n 4)/2 90 + 45 (n 4)/2 100 + 45 (n 4)/2 105 + 45 (n 4)/2 110 + 45 (n 4)/2 n n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8,