Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

2

150 Nil C D Nil H L S 300 300 75 Auto-drains listed on page 95 are attached.

Air Slide Table

: 100 mm MXQ12B-75Z MXQ12B-100, 125Z 4.5 4.5 V = mm/s V = mm/s 4.0 4.0 V = 200 3.5 3.5 V = 200 3.0 3.0 2.5 2.5 V = 300 V = 300 2.0 2.0 1.5 1.5 V = 500 V = 500 1.0 1.0 0.5 0.5 0.0 0.0 0 50 100 150 200 250 300 0 20 40 60 80 100 120 140 160 180 Allowable overhang L [mm] L3: Overhang Allowable range: 180 mm Allowable overhang L [mm] L3: Overhang Allowable range: 300 mm 183 Model Selection MXQ

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Type Lube Non-lube Air-hydro 125 140 160 Bore size Nil N H Lube, Non-lube Air-hydro 125 140 160 180 200 250 300 125 mm 140 mm 160 mm 180 mm 200 mm 250 mm 300 mm 125 mm 140 mm 160 mm Mounting Bracket Part No. 125 140 160 180 200 250 300 Bore size (mm) For How to Order with auto switch, refer to page 6-9-7.

Battery-less

451 to 500 10 to 600 5 to 300 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 930 16 to 620 8 to 310 30 to 1200 20 to 850 10 to 300 In-line Stroke range 701 to 800 20 to 550 12 to 330 6 to 180 24

CATALOG

, 200, 300 40 100, 200, 300, 500 50 200, 300, 500 63 200, 300, 500 Courtesy of Steven Engineering, Inc. !

Table of Contents

111.5 23 19 240 M14 55.5 56 62 WA S T U VA VB WB Bore size (mm) X YY YL Z Over 25 st to 100 st Over 300 st Over 100 st to 200 st 200 Over 200 st to 300 st 42 Over 25 st to 100 st Over 300 st Over 100 st to 200 st 128 Over 200 st to 300 st 25 st or less 25 st or less 80 100 M12 x 1.75 24 28 100 198 156 180 140 28 52 54 75 128 300 92 178 M14 x 2.0 28 11 124 236 188 210 166 48 72 35 47 90 148

Made to Order

st Over 200 st to 300 st 30 st or less 25 st or less Over 300 st Over 300 st Over 30 st to 100 st Over 25 st to 100 st Over 100 st to 200 st Over 100 st to 200 st Over 200 st to 300 st Over 200 st to 300 st 30 st or less 25 st or less Over 300 st Over 300 st 12 16 20 25 32 40 50 63 300 300 167 167 20 24 24 24 300 300 300 300 171 172 174 174 24 24 24 28 105 105 117 117 40 44 44 44 121

Table of Contents

200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

A

A I L A B I L I T Y 12 25, 50, 100 20 25, 50, 100, 200 32 50, 100, 200, 300 40 100, 200, 300, 500 50 200, 300, 500 63 200, 300, 500 Courtesy of Steven Engineering, Inc. !

V100

or less 180 or less 30 or less 60 or less 300 or less 180 or less 0.8 1.4 100 90 20 14 13.2 Response time (1) (ms) VFN Max. operating frequency (c.p.m.) (2) DC AC DC AC 1.6 2.4 300 360 50 60 24 Weight (kg) 50 Hz Apparent power (VA) Inrush 60 Hz AC 50 Hz Holding 60 Hz Power consumption (W) DC Note 1) Based on JIS B 8375-1981.

Electric Actuator/Slider Type

Model L A B n D E LEFS32 -50 245 56 180 4 LEFS32 -100 295 106 230 4 LEFS32 -150 345 156 280 4 LEFS32 -200 395 206 330 6 2 300 LEFS32 -250 445 256 380 6 2 300 LEFS32 -300 495 306 430 6 2 300 LEFS32 -350 545 356 480 8 3 450 LEFS32 -400 595 406 530 8 3 450 LEFS32 -450 645 456 580 8 3 450 LEFS32 -500 695 506 630 10 4 600 LEFS32 -550 745 556 680 10 4 600 LEFS32 -600 795 606 730 10 4 600

CS1

Air Cylinder Series CS1 125, 140, 160, 180, 200, 250, 300 Variations CJ1 Basic style Standard variations Bore size (mm) Series Action Style Copper free Rod boot Page CJP CJ2 Standard Series CS1 125 140 160 180 200 250 300 Lube CM2 C85 Single rod Series CS1 Non-lube 1.10-2 CG1 (125 to 160 Only) 125 140 160 MB Air-hydro Series CS1 C95 Double acting CA1 125 140 160 180 200 250 300 Lube CS1 Double

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

1

st to 300 st 25 st or less Over 300 st Over 30 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 30 st or less 28 52 300 100 75 77 128 200 128 178 24 52 174 198 42 54 92 80 14.5 25.5 74 28 156 180 140 17.5 M12 x 1.75 32 40 50 63 117 117 12 16 20 25 24 24 24 28 33 34 36 38 200 121 122 124 124 48 48 48 52 45 46 48 50 300 171 172 174 174 83 84 86 88 124 200 200 300 300 105 105 167

Table of Contents

M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2 1 Heatless Air Dryer Series ID Model Heatless ID series is best when dry

Table of Contents

1.16 VFS Exhaust center VFS5400 VFS5410 55 or less 1.14 300 VS4 Pressure center VFS5500 55 or less VFS5510 1.14 VQ7 300 EVS Double check VFS5610 60 or less 1.99 180 VFN Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

200 Single rod CQ2 7-6-108 10 to 300 Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S 32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to

15

(Recommended height 6 mm) LC3F2 Motor Mounting Dimensions [mm] Dimensions [mm] Model n C D E LEJS63N-300 6 1 200 180 LEJS63N-400 8 2 400 80 LEJS63N-500 8 2 400 180 LEJS63N-600 10 3 600 80 LEJS63N-700 10 3 600 180 LEJS63N-800 12 4 800 80 LEJS63N-900 12 4 800 180 LEJS63N-1000 14 5 1000 80 LEJS63N-1200 16 6 1200 80 LEJS63N-1500 18 7 1400 180 Motor type FA FB FD NZ/Mounting type Z M5 x 0.8 7

smcmaintenancepartslist

NBR Valve seal Tube gasket Standard (non-lube) Piston gasket 125 140 160 180 200 250 300 CS1N125A-PS CS1N140A-PS CS1N160A-PS CS1N180A-PS CS1N200A-PS CS1N250A-PS CS1N300A-PS Retaining plate gasket Guide gasket Component part numbers: @3, @5, @6, @7, @8, #0. Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g).