Air Cylinder

37.5 50 75 100 125 52 65 77 90 115 140 165 40 41 46 77 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 54 67 79 92 117 142 167 Bore size Female Rod End (mm) With Air Cushion With Rod Boot (mm) (mm) ZZ JH JW 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 158 171 183 196 221 246 271 23.5 10.5 25 162 175 187 200 225 250 275 23.5 10.5 32 164 177 189 202 227 252

CQ2

Mounting at non-rotating side Model C C' Model C D 55 60 65 70 75 80 85 90 95 100 65 70 75 80 85 90 95 100 105 65 70 75 80 85 90 95 100 105 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85

Combination Cylinder

Bore e f 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 1 to 50 12.5 12.5 12.5 12.5 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 1 to 50 68 72 72 77 20 25 32 40 68 72 72 77 35 35 35

CXWM/CXWL

90 90 90 Model CXWM20-50 CXWM20-75 CXWM20-100 CXWM20-125 CXWM20-150 CXWM20-175 CXWM20-200 52 77 102 127 152 177 202 64 89 114 139 164 189 214 34.5 34.5 39.5 44.5 57 69.5 82 Note) For 25 stroke, the shock absorber is mounted on a single side of the plate.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

, 250, 320, 400, 500 1000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 1900 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 125 2000 Made to Order (For

CL

(The lock-up cylinder can operate at 50 to 200 mm/s.)

Step Motor Controller

(50/60 Hz) Single phase 170 to 253 VAC Main power supply 3.0 1.5 24 VDC 21.6 to 26.4 VDC 0.5 6 inputs 4 outputs 1 M (when differential receiver), 200 k (when open collector) 0 to 65535 (Command pulse unit) 3 rotations Parameter setting USB communication 32 to 131F (0 to 55C) (No freezing) 90 or less (No condensation) 4 to 149F (20 to 65C) (No freezing) 90 or less (No condensation) Between

Mechanically Jointed Rodless Cylinder Series MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 m 160 160 150 150 140 140 (2400) (2400) (2400) (2400) (2400) (2400) l 130 130 (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) m l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600

15

300 200 Lead 8: LEY32DB 200 100 Lead 16: LEY32DA 100 Lead 20: LEY32A 0 60 30 120 90 0 60 30 120 90 Ratio to rated torque [%] Ratio to rated torque [%] * When using the force control or speed control, set the maximum value to be no more than 90% of the rated torque.

Rotary Table/

Rotation 90 Rotation 90 Rotation 9 Rotary Table Series MSQ Construction o i t !

LJ1H

temperature range [C] Operating humidity range [%RH] Storage temperature range [C] Storage humidity range [%RH] Insulation resistance [M ] Weight [g] 90 or less (No condensation) 20 to 65 (No freezing) 90 or less (No condensation) Between case and SG: 10 (500 VDC) 600 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 Model Compatible motor capacity [W] 100 200 100 200 Absolute 18-bit encoder Compatible

Series KV2 Fittings

100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/100 100/200 100/100 100/100 50/100 50/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation. 6 Series KV2 90 Female Elbow KV2LF_ _-_ _ L1 Applicable Tube M D1 D2 L2 Hex Thread D3 D4 App.

Single Axis Electric Actuator Series LJ1H

Model LC7R-K1A (Refer to page 200 for details.)

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Table of Contents

(100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80 (90) 82 (92) Normally open Normally closed VXR215006 04 06 04 VXR2152, 1 1 VXR2262-10 VXR2272-12 80 90 125 101 (112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1

V100

Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Main circuit of switch MSM022P1A 200 Output Black lead wire 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation HC-PQ23 200 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yaskawa Electric Corporation Blue lead wire 200/230 SGDE-02AP SGME-02AF12 H S For motor mounting dimensions, refer to the dimensions for series LJ1 30 on page 143 as a reference for mounting and design

CS1

90 43 31 to 1000 Lube Non-lube Air-hydro 1/2 M30 X 1.5 160 161 128 212 112 255 M14 X 1.5 50 47 36 59 16 15 20 90 43 14 19 31 35 to 1000 3/4 M36 X 1.5 18.5 180 182 144 236 118 275 M16 X 1.5 53 56 20 19 40 90 59 43 14 17 36 39 to 1200 3/4 M40 X 1.5 115 18.5 200 204 162 265 132 320 M18 X 1.5 60 63 24 25 17 39 45 70 48 20 41 to 1200 Lube Non-lube 3/4 1 M45 X 1.5 115 18.5 225 226 182 280 150

ISO Cylinder

200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

MY1

(400) 200 l l MY1HT63 MY1HT50 100 2.