REA/REB

70 100 300 500600 70 100 300 500600 Maximum speed U (mm/s) Maximum speed U (mm/s) 72 Sine Rodless Cylinder High Precision Guide Type Series REBH Max.

CY1

CY1H25 (Nm) 64 56 50 40 30 20 50 40 30 20 Model CY1H10 CY1H15 CY1H20 M2 2.5 16 16 M3 1.5 10 13 Model CY1H25 CY1HT25 CY1HT32 M2 26 85 96 M3 28 56 64 M1 1.5 10 13 M1 28 56 64 28 16 26 CY1H20 CY1H15 13 10 10 Moment Nm Moment Nm 2 3 4 5 22.5 3 4 5 CY1H10 M3 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 M1 M2 Piston speed mm/s Piston speed mm/s Static moment

CQ2

Mounting at non-rotating side Model C C' Model C D 55 60 65 70 75 80 85 90 95 100 65 70 75 80 85 90 95 100 105 65 70 75 80 85 90 95 100 105 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

3 4 5 CY1H20 CY1HT32 13 16 13 64 96 64 CY1H10 CY1H10 1.5 1 M3 1 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 Piston speed (mm/s) Piston speed (mm/s) M1 M2 Graph (3) Graph (2) Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pitch moment M1 = W L Yaw moment M3 = W (L A) Roll moment M2 = W L (mm) Model CY1H10 CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32

Electric Grippers

Compact Basic LEHZJ10L, LEHZJ16L 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 Pushing force/Trigger level [%] Pushing force/Trigger level [%] Pushing force and trigger level range Pushing force and trigger level range Pushing speed [mm/sec] Pushing speed [mm/sec] LEHZJ20L, LEHZJ25L 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 Pushing force

Air Cylinder Series CS1

32 40 8 60 55 34 39 28 4 5 M36 x 1.5 4 x 40 110 86.5 76.5 +0.1 0 0.1 0.3 0.080 0.142 40 50 8 67 70 44 32 4 5 M40 x 1.5 4 x 40 125 94.5 84.5 42.5 CG1 +0.1 0 0.1 0.3 0.080 0.142 40 50 8 67 70 44 40 4 5 115 105 M45 x 1.5 4 x 55 125 180, 200 250 300 42.5 +0.1 0 0.1 0.3 0.080 0.142 50 63 9 86 66 M56 x 2 53 50 5 6 144 132 5 x 65 160 75.5 MB +0.12 0 0.1 0.3 0.100 0.174 63 80 9 71 M64 x 2 66 63

Smooth Cylinder/Low Speed Cylinder

31 16.5 40 6 5.5 M10 x 1.25 17 29 M5 x 0.8 depth 7.5 19.5 2 22 10 14 8 Up to 300 38 20 40 6 5.5 M10 x 1.25 17 35.5 M5 x 0.8 depth 8 19.5 2 22 12 18 10 Up to 300 47 26 50 8 6 M14 x 1.5 19 44 M6 x 1 depth 12 27 2 30 16 25 14 Up to 300 58 32 58 11 7 M18 x 1.5 27 55 M8 x 1.25 depth 16 32 2 35 20 30 18 Up to 300 72 38 58 11 7 M18 x 1.5 27 69 M10 x 1.5 depth 16 32 2 35 20 32 18 Up to 300 89 50

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Bronze G: Grommet C U E 300 A T B IN F I M L K (D) 2 x Port size DS: DIN terminal DZ: DIN terminal with light GS: Grommet with PCB CS: Conduit U V E Applicable cable 6 to 12 U E 300 U E G1/2 500 NPT1/2 T T T DN: DIN terminal without connector WN: M12 connector E U E U T T [mm] Size Port size A B C D E F I K L M 70 1 1/4 132.6 26.5 42 125 21 51.5 43.5 67.5 57.5 53 80 1 1/2 139.3 30 42

Cylinder with Lock

63 300 80 300 100 300 *1 The maximum rod length of the MWB32-XC68 is 1800 mm.

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

REA/REB

5 3 4 5 CC M3 2 1.5 1 1 RB 0.5 0.5 M1 M2 J 70 100 300 500 600 70 100 300 500 600 DMaximum speed (mm/s) Maximum speed (mm/s) -X 20Data 10-2-77 77 Series REBH Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pitch moment M1= WL Yaw moment M3 = W(L A) Roll moment M2 = WL (mm) Model REBH15 REBH25 REBHT25 REBHT32 A 17.5 23.5

REA/REB

5 3 4 5 CC M3 2 1.5 1 1 RB 0.5 0.5 M1 M2 J 70 100 300 500 600 70 100 300 500 600 DMaximum speed (mm/s) Maximum speed (mm/s) -X 20Data 10-2-77 77 Series REBH Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pitch moment M1= WL Yaw moment M3 = W(L A) Roll moment M2 = WL (mm) Model REBH15 REBH25 REBHT25 REBHT32 A 17.5 23.5

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

A high filtration Mist Separator (Series NAFM) installed behind a regular filter (Series NAF) can prevent foreign particles from entering the valve. 10-32 Nom (M5) 13.0-17.3 (15-20) 1/8 NPTF 60.7-78.0 (70-90) 1/4 NPTF 104-121 (120-140) 3/8 NPTF 190-208 (220-240) 1/2 NPTF 242-260 (280-300) 3/4 NPTF 242-260 (280-300) Mounting Single-acting valves can be mounted in any direction.

AC Servo Motor Driver (Network card type ）

Load-side encoder initial 70.7 DB communication error 1 Load-side encoder initial communication Incompatible encoder (Note 6) 70.8 DB 70.A Load-side encoder initial communication Process error 1 DB 70.B Load-side encoder initial communication Process error 2 DB 70.C Load-side encoder initial communication Process error 3 DB 70.D Load-side encoder initial communication Process error 4 DB

Electric Actuators

2.2 2.2 Lead 10 (LEPS10J) 1.1 1.1 0 350 300 0 50 100 150 Speed [mm/s] 0 350 300 0 50 100 150 Speed [mm/s] 200 250 200 250 Force Conversion Graph (Guide) LEPS6 (Basic) 5.6 Lead 4 (LEPS6K) 4.5 Force [lbf] 3.4 Lead 8 (LEPS6J) 2.2 1.1 0 70 80 90 100 Set value of pushing force [%] Set value of pushing force [%] Duty ratio [%] Continuous pushing time [minute] 70 100 70 10 80 100 50 5 LEPS10 (Basic

Sine Rodless Cylinder Series REA/REB

Number of axes 10 150, 200, 300 Symbol Specifications 150, 200, 300, 400, 500 15 750 1 axis XB10 Intermediate stroke (Using exclusive body) 200, 300, 400, 500, 600 20 1000 X168 Helical insert thread specifications 200, 300, 400, 500, 600, 800 25 1200 25 200, 300, 400, 500, 600, 800, 1000 2 axes 1500 32 Note 1) Stroke exceeding the standard stroke will be available upon request for special

Air Cylinder Series CA2

Bore size Standard stroke Long stroke (L and F only) CS1 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 Symbol Specifications CS2 -XA Change of rod end shape 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 500, 600 -XB5 Oversized rod 50, 63 1200 Heat resistant (150C) -XB6 -XC3 Special port positions 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400

CA2

Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.

CL

Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75