V100

28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5

Table of Contents

L unit 1000 1000 Air cushion Adjusting bolt 500 400 300 500 400 300 0.5 200 200 100 1 2 3 4 5 10 20 30 1002 3 5 10 20 50 40 50 30 100 Shock absorber m2, m3max m1max m2max m3max m1max 2.

2

IDF-TR1700-6, 7 IDF-TR2000-9 IDF-TR2000-10, 11 IDF-TR1700-5 IDF-TR1700-6, 7 IDF-TR2000-9 IDF-TR2000-10, 11 IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 IDF-TB404 IDF15E1-10 7 653 450 420 66 427 557 300 300 352 243 343 300 352 243 343 397 IDF22E-30 IDF-TB405 12 630 600 IDF22E-20 773 70 805 IDF37E-30 IDF-TB406 710 680 13 675 IDF37E-20 943 IDF55E-30 437 IDF-TB409

Table of Contents

40 50 40 DMGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 -X 20 20 MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph

Electric Actuator/Slider Type

6: LEFS25B 10 10 Lead 12: LEFS25A 5 5 Lead 12: LEFS25A 0 0 0 100 200 300 400 500 600 Speed: V [mm/s] 0 100 200 300 400 500 600 Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 50 50 Lead 8: LEFS32B 40 40 Work load: W [kg] Work load: W [kg] 30 30 Lead 16: LEFS32A Lead 8: LEFS32B 20 20 10 10 Lead 16: LEFS32A 0 0 Speed: V [mm/s] 0 100 200 300 400 500 600 0 100 200 300 400 500 600

Table of Contents

Piston A Piston A C A A Piston B Piston B First-stage extension First-stage retraction Piston A Piston A B A C A C Piston B Piston B Second-stage extension Second-stage retraction 10-10-4 5 3 Position Cylinder Series RZQ Weight Weight Table Unit: kg Cylinder stroke Bore size (mm) 25-5 50-5 75-5 100-5 125-5 150-5 175-5 200-5 250-5 300-5 32 40 50 63 0.81 0.88 0.94 1.01 1.07 1.13 1.20 1.26 1.39

Electric Actuators

5 5 120 130 5 5 Driver input/output signal list (CN-1/F connector) Driver dimensions For LJ1, LG1, LX Pin no.

CATALOG

20 14 72 M10x1.5 7 18 5 80 300 37 40 101 50 25 20 89 M10x1.5 11 22 5 100 300 37 40 101 60 30 20 110 M12x1.75 11 26 7 *Trunnion mounting threads in flats NA are not available for 80, 100 bores.

Air Slide Table

9 8 8 Load mass m [kg] Load mass m [kg] 7 7 6 6 5 5 4 4 V = 200 V = 200 3 3 2 2 V = 300 1 1 V = 300 0 0 20 40 60 80 100 120 140 160 180 200 0 0 50 100 150 200 250 300 L3: Overhang Allowable range: 200 mm L3: Overhang Allowable range: 300 mm Allowable overhang L [mm] Allowable overhang L [mm] 170 MXQ Series Determine the overhang.

Table of Contents

6 12 LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Rated voltage Electrical entry For DC 24, 12 VDC/ 100, 110, 200, 220 VAC DIN terminal M plug connector L plug connector 24, 12, 6, 5, 3 VDC M8 connector Grommet 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC (10-SY5000/7000 only) G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire WO: Without

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-www.stevenengineering.com VZS VFS VS4 (Mounting hole) VQ7 2-M5 x 0.8 (PE port) EVS VFN (Piping port) L plug connector (L) VZ3 20-L-M5 M plug connector (M) VZ3 20-M-M5 3 4 5 3 4 5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor Built-in One-touch fittings VZ3 20-DIN terminal (D) VZ3 20-D-M5 3 4 5 3 4 5 C4 C6 MAX. 10 2-One-touch fitting (A, B port) Applicable

Battery-less

X Me 200 m 100 0 Work load m [kg] 0 1 2 3 4 5 600 Horizontal/Bottom 500 L2 400 L2 [mm] 300 Y Me m 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 Me 500 400 L3 [mm] m 300 L3 Z 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 500 L4 400 L4 [mm] 300 X Me 200 m 100 0 Work load m [kg] 0 1 2 3 4 5 600 Me 500 400 m L5 [mm] 300 Wall L5 Y 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 500 400 L6 [mm] L6 300 Z

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): 10-SYJ3 43-L-M5 M plug connector (M): 10-SYJ3 43-M-M5 M8 Connector (WO): 10-SYJ3 43-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5[115.9] R1 P R2 R1 P R2 R1 P R2 91.9[96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6[39.8

A

20 14 72 M10x1.5 7 18 5 80 300 37 40 101 50 25 20 89 M10x1.5 11 22 5 100 300 37 40 101 60 30 20 110 M12x1.75 11 26 7 *Trunnion mounting threads in flats NA are not available for 80, 100 bores.

Table of Contents

VZS2000/3000 Caution 5.

SX

With surge voltage suppressor S With light/surge voltage suppressor Z Pilot type Rated voltage Electrical entry 5 24 VDC 6 12 VDC Nil Internal pilot R External pilot Grommet L plug connector M plug connector G: Lead wire length 300 mm MN: Without lead wire M: With lead wire (Length 300 mm) L: With lead wire (Length 300 mm) V 6 VDC S 5 VDC R 3 VDC Common specifications LN: Without lead wire

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEFS32lll-250l 445 256 380 6 2 300 LEFS32lll-300l 495 306 430 6 2 300 LEFS32lll-350l 545 356 480 8 3 450 LEFS32lll-400l 595 406 530 8 3 450 LEFS32lll-450l 645 456 580 8 3 450 LEFS32lll-500l 695 506 630 10 4 600 LEFS32lll-550l 745 556 680 10 4 600 LEFS32lll-600l 795 606 730 10 4 600 LEFS32lll-650l 845 656 780 12 5 750 LEFS32lll-700l 895 706 830 12 5 750 LEFS32lll-750l 945 756 880 12 5 750

SYJ3000/5000/7000

. 300 (Lead wire length) 33 48.5 [55.5] Refer to page 1-5-79 for dimensions with connector cable.

15

(Recommended height 5 mm) Dimensions [mm] Stroke L A B n D E 150 389 156 328 4 150 200 439 206 378 6 2 300 250 489 256 428 6 2 300 300 539 306 478 6 2 300 350 589 356 528 8 3 450 400 639 406 578 8 3 450 450 689 456 628 8 3 450 500 739 506 678 10 4 600 550 789 556 728 10 4 600 600 839 606 778 10 4 600 650 889 656 828 12 5 750 700 939 706 878 12 5 750 750 989 756 928 12 5 750 800 1039 806