Table of Contents

Up to 700 80 7 RS Q G 25 25 1500 250 Up to 700 80 12 32 32 1500 250 Up to 1000 80 21 RS H A 40 40 1500 250 Up to 1000 80 33 50 50 1500 250 Up to 1200 RZQ 80 47 63 63 1500 250 Up to 1200 80 84 MI W S 80 80 1500 250 Up to 1400 80 127 100 100 1500 250 Up to 1500 80 196 CEP1 Note 1)The cylinder performance may not be as expected when stroke is shorter than recommended stroke (1 to 249 stroke

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

C4 C6 C8 Stations n L1 L2 L3 L4 2 3 4 5 6 7 8 9 10 135.5 148 160.5 185.5 198 210.5 235.5 248 260.5 125 137.5 150 175 187.5 200 225 237.5 250 105 121 137 153 169 185 201 217 233 15 13.5 11.5 16 14.5 12.5 17 15.5 13.5 C4 C6 C8 SS5Y5-45FUStations B-Q 2 3 4 5 6 7 8 9 10 Stations n L1 L2 L3 L4 148 173 185.5 198 210.5 235.5 248 260.5 285.5 137.5 162.5 175 187.5 200 225 237.5 250 275 123 139 155

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 2000 2000 2000 2000 2000 2000 Minimum Stroke for Auto Switch Mounting 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Refer

5 Port Solenoid Valve Series VQZ1000/2000/3000

190 210 230 250 170 290 310 330 Note) The L dimension of 2 to 3 stations is the same.

Industrial Filters

110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100 3400 83 150 160 170 120 170 10 FGELC Note 2) 1200 4400 120 190 200 220 150 230 20 FGETC FGGSB 160 270 300 320 290 360 FGGLB FGGSC 200 300 320 340 320 370 FGGLC FGGSD 230 320 330 350 330 370 FGGLD Note 1) Indicates flow rate in L/min under atmospheric

Mechanically Jointed Rodless Cylinder Series MY1

, 275, 300 15, 25 225, 250, 275, 300 (CXWM16 to 25) 225, 250 (CXWM32) 16, 20, 25, 32 MY1H 50 to 600 601 to 1500 (1000 for 16 to 20 only) 16, 20, 25, 32, 40 CXWM MY2C 100 to 2000 2001 to 5000 (Up to 3000 for 16) 16, 25, 40 25 to 200 CXWL 225, 250, 275 (CXWL16 to 25) 225 (CXWL32) MY2H/HT 50 to 600 601 to 1500 (Up to 1000 for 16) 16, 25, 40 ML1 100 to 1000 1001 to 2000 25, 32, 40 MY3A MY3B MY3M

CQ2

operating part kg m2: Load weight kg V: Piston speed m/s 10 40 32 25 5.0 4.0 3.0 Unit: g Table 2: Weight of cylinder operating part/Without magnet 20 2.0 16 Cylinder stroke (mm) Bore (mm) 5 10 15 20 25 30 35 40 45 50 75 100 1.0 12 5 6 7 8 10 11 12 0.5 0.4 0.3 9 11 13 15 17 19 16 15 18 21 24 27 31 34 37 40 44 20 0.2 24 28 33 37 42 46 51 55 60 64 25 0.1 45 52 60 68 76 84 92 100 107 115 170

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) Note 2) Dimensions Formula L1 = 10.5n + 14.5, L2 = 10.5n + 25 n: Station (Maximum 16 stations) n L 1 2 46 56.5 225 235.5 3 56.5 67 237.5 248 4 67 77.5 250 260.5 5 77.5 88 250 260.5 6 88 98.5 262.5 273 7 98.5 109 275 285.5 8 109 119.5 287.5 298 9 119.5 130 300 310.5 10 130 140.5 312.5 323 11 140.5 151 312.5 323 12 151 161.5 325 335.5 13 161.5 172 337.5 348 14 172 182.5 350 360.5 15

C76

1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 40 96 146 171 196 120 170 195 220 97 147 172 197 97 147 172 197 129 179 204 229 254 154 204 229 254 279 122 172 197 222 247 122 172 197 222 247 6-10-25 26 Series C76 Dimensions [First angle projection] Single acting/Spring return,

C76

1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 40 96 146 171 196 120 170 195 220 97 147 172 197 97 147 172 197 129 179 204 229 254 154 204 229 254 279 122 172 197 222 247 122 172 197 222 247 6-10-25 26 Series C76 Dimensions [First angle projection] Single acting/Spring return,

C95

, 320, 400, 500 40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.

NCG/CG1

CG1 With Rod Boot CG1 Built-in One-touch Fittings CG1 Air-hydro Bore size (mm) l f e h IJ JH JW ZZ (11.5) (14.5) 20 25 32 40 50 63 80 100 126(134) 133(141) 135(143) 150(159) 170(182) 170(182) 191(205) 191(205) 30 30 35 35 40 40 52 62 55 62 62 70 78 78 80 80 27 32 38 48 59 72 59 71 16 17 17 17 17 18 10 7 Bore size (mm) Bore size (mm) S GA ZZ GB HD HH PD (11.5) (17.5) (11.5) (19.5) 20 25 32

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(182) (25) (13) 170(182) MB1 h + l 191(205) ZZ + l + Stroke 191(205) CA2 The minimum stroke with rod boot is 20 mm.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Bore size (mm) Standard stroke 125, 150, 175, 200, 250, 300 32, 40, 50, 63, 80, 100 Caution Manufacture of Intermediate Stroke Snap Ring Installation/Removal Description Spacer is installed in the standard stroke body. Exclusive body (-XB10) Refer to How to Order for the standard model no. on page 7-6-121. Suffix -XB10 to the end of standard model no. on page 7-6-121. 1.

Electric Rotary Table

: EtherNet/IP (35) 31 (87.9) 82 (35) 31 1 (85) 82 1 For body mounting 4.5 4.5 For body mounting 152.2 152.2 170 161 170 161 18.2 18.2 4.5 For body mounting 4.5 For body mounting Trademark DeviceNet is a trademark of ODVA.

Electric Actuator

Electric Actuator Series LEYG Guide Rod Type Pushing force (lbf) Vertical work load (lb) Screw lead (mm) Speed (mm/s) Stroke (mm) Controller series Specifications Series Page 15 to 500 8 to 250 4 to 125 18 to 500 9 to 250 5 to 125 24 to 500 12 to 250 6 to 125 15 to 500 8 to 250 4 to 125 18 to 500 9 to 250 5 to 125 3.3 7.7 16.5 15.4 33 64 19.8 44 90.4 3.3 7.7 16.5 4.4 11.0 24.3 8.5 16.6 31.7

Compact Rotary Actuator Series CRQ2

Specifications Air (Non-lube) Fluid 10, 15 Applicable size 0.7 MPa Max. operating pressure 0.15 MPa Min. operating pressure M5 x 0.8 Port size 80 to 100, 170 to 190, 350 to 370 Rotation Applicable shaft type S, W, X, Y, Z, T, J, K Auto switch Mountable Refer to page 247 for other specifications. Refer to page 250 for other specifications.

Tie-rod Type Hydraulic Cylinder

250 100 35 123 193 273 1/5 stroke 125 R2.5 42 170 162 234 20 16 100 170 252 100 35 123 193 275 160 R2.5 52 212 200 284 24 20 108 187.5 280 120 38 131 210.5 303 406 CHA Series Tie-rod Type Hydraulic Cylinder Double Acting/Single Rod Rod trunnion type: CHAU Z CHQ 2 x Rc P 4 x J Air release Cushion adjustment screw GB GB TT V T Width across flats G CHK MM R (max.)

Single Axis Electric Actuator Series LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1

SY

186 202 218 234 250 266 282 298 314 330 Stations n L1 L2 Type 42 manifold ...