MB

175, 200, 250, 300, 350, 400, 450, 500, 600 C76 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 C85 100 Symbol Specifications 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Intermediate strokes are available.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

100 125 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 2000 2000 2000 2000 2000 2000 Minimum Stroke for Auto Switch Mounting 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 25, 50, 80, 100, 125, 160,

MLGP

80 80 100 100 80 10 10 80 6 10 100 25 26 50 51 6 10 100 200 200 300 300 25 26 50 51 Stroke (mm) Stroke (mm) Features 13 Low Profile Guide Cylinder with Lock Series MLGP Operating Range when Used as Stopper Warning 2.

MLGP

80 80 100 100 80 10 10 80 6 10 100 25 26 50 51 6 10 100 200 200 300 300 25 26 50 51 Stroke (mm) Stroke (mm) Features 13 Low Profile Guide Cylinder with Lock Series MLGP Operating Range when Used as Stopper Warning 2.

V100

Station n L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 4-4-27 28 Series SYJ500

Electric Actuator

Motor type LEYGlMlA Step motor (Servo/24 VDC) Servo motor (24 VDC) 200 mm/s 200 mm/s LEYGlMlB 125 mm/s 200 mm/s LEYGlMlC 75 mm/s 125 mm/s For the specifications below, operate the system at the load mass shown in the graph x 80%.

Table of Contents

(Adjustable) Hysteresis Data ON: when output is ON (Red) ON: when output is ON (Red) ON: when output is ON (OUT1: Red, OUT2: Green) Indicator light Trimmer adjustment 3 turns 200 degrees 3 turns 200 degrees 3 turns 200 degrees None 1 to 5 V 5% F .S.

LX

Positioning Time Guide (for Horizontal Mount) For transfer load of 6kg For transfer load of 0kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 200 50 10 1 200 100 50 10 1 10 10 10.1 20.1 5.1 1.1 0.2 20.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 40 40 2.6 5.1 1.3 0.3 0.1 5.1 2.6 1.3 0.3 0.1 80 80 1.3 2.6 0.7 0.2 0.1 2.6 1.3 0.7 0.2 0.1

smcmaintenancepartslist

For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

Table of Contents

5.6 100 8.2 115 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 2 60 VX3 No freezing Equivalent size VXA VN Pilot Operated Solenoid Valve Specifications LVC Pilot solenoid valve Electrical entry Coil rated voltage (V) AC (50/60/Hz) DC VO301-00T-X302 Conduit terminal 100 V, 200 V, Other voltage (Option) 24 V, Other voltage (Option) 15 to 10% of the rated voltage Class B or equivalent

LX

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 200 100 100 200 50 50 10 10 1 1 10 10 20.1 10.1 10.1 20.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 40 40 5.1 2.6 2.6 5.1 1.3 1.3 0.3 0.3 0.1 0.1 80 80 2.6 1.3 1.3 2.6 0.7 0.7 0.2 0.2 0.1 0.1

CATALOG VC10

ORIFICE SIZE Gas Liquid Inlet Exhaust AC DC AC DC Model ELW51 2 Way Normally Open ELW51G8XCCP ELW51H8XCCP (G or L) ELW51J8XCCP (G or L) ELW51V8XCCP (G or L) ELW51K8XCCP (G or L) 300 270 135 70 55 200 120 50 35 30 300 120 40 30 25 200 65 30 20 15 G 132 DE-ENERGIZED ENERGIZED H 364 J 116 V 564 K 332 600 250 150 100 85 50 15 200 80 50 25 20 600 250 150 100 85 50 15 200 80 50 25 20 Model ELW52

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

, 100, 125, 160, 200, 250, 320, 400, 500 1000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 1900 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 125 2000

CG1

25 50 75 100 125 150 200 All strokes All strokes 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 D-C7 D-C7 55 55 80 80 105 24.5 (27) 45.5 45.5 70.5 70.5 95.5 24.5 (27) 20.5 30 CA1 D-C8 D-C8 55 55 80 80 105 130 130 27 (29.5) 45.5 45.5 70.5 70.5 95.5 27 (29.5) 20.5 30 120.5 120.5 D-C73C D-C73C

ISO Cylinder

, 100 200 10 400 12 10, 25, 40, 50, 80, 100, 125, 160, 200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

TABLE OF CONTENTS

ORIFICE SIZE Gas Liquid Inlet Exhaust AC DC AC DC Model ELW51 2 Way Normally Open ELW51G8XCCP ELW51H8XCCP (G or L) ELW51J8XCCP (G or L) ELW51V8XCCP (G or L) ELW51K8XCCP (G or L) 300 270 135 70 55 200 120 50 35 30 300 120 40 30 25 200 65 30 20 15 G 132 DE-ENERGIZED ENERGIZED H 364 J 116 V 564 K 332 600 250 150 100 85 50 15 200 80 50 25 20 600 250 150 100 85 50 15 200 80 50 25 20 Model ELW52

15

(Recommended height 6 mm) Motor Mounting Dimensions [mm] Dimensions [mm] Model n C D E LEJS40N-200 6 1 200 80 LEJS40N-300 6 1 200 180 LEJS40N-400 8 2 400 80 LEJS40N-500 8 2 400 180 LEJS40N-600 10 3 600 80 LEJS40N-700 10 3 600 180 LEJS40N-800 12 4 800 80 LEJS40N-900 12 4 800 180 LEJS40N-1000 14 5 1000 80 LEJS40N-1200 16 6 1200 80 Motor type n FA FB FD NZ/Mounting type Z 2 M4 x 0.7 7 46 NY/

MGG

(mm) Bore size (mm) Stroke range (mm) AL AK AP AJ AI AH AG N AB M AA L K J I V B U T A O P S 63 80 100 12 14 60 180 158 250 228 100 25 66 25 180 135 117 65 108 228 192 30 M12 x 1.75 depth 23 Rc 1/4 200 72 75, 100, 125 150, 200, 250 300 16 14 70 200 178 284 262 115 27 76 30 214 160 138 75 128 262 224 M12 x 1.75 depth 28 Rc 3/8 35 230 89 16 16 80 226 200 326 300 125 30 80 32 245 190 153 85

Guide Cylinder Series MGG

(mm) Bore size (mm) 63 80 100 Stroke range (mm) S AK AL AP AA AB AG AH AI AJ B I J K L M N O P T U V A 14 12 60 200 25 25 228 250 158 180 228 65 117 135 180 66 100 1/4 72 30 192 108 M12 x 1.75 depth 23 75, 100, 125 150, 200 250, 300 14 16 70 230 30 27 262 284 178 200 262 75 138 160 214 76 115 3/8 89 35 224 128 M12 x 1.75 depth 28 16 16 80 280 32 30 300 326 200 226 304 85 153 190 245 80 125