Aluminum High Vacuum Angle Valve

0 2-1 o 0.2 153 188 q 190 138 O-ring Part No.

JIS Standard Hydraulic Cylinder

V 200 V or less 3-wire (NPN equiv.) 5 V Yes Grommet Relay PLC No Yes No A54 A64 A59W 12 V 2-wire 24 V A33 A34 A44 Terminal conduit PLC Relay PLC Yes 100 V, 200 V Grommet DIN terminal Diagnostic indication (2-color indicator) B59W 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

IZx-OMT0049

Flow Pressure characteristics Measuring method schematic 1) With High speed 2) With Energy saving 3) With Energy saving Static neutralization cartridge high-efficiency cartridge Static neutralization cartridge 600 200 1000 IZT4250 IZT4250 IZT4250 232 180 900 232 232 500 160 800 190 190 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 190 140 700 400 L/min(ANR) L/min

CM2

201 to 300 301 to 400 401 to 500 68 81 93 106 131 156 17 36 20 62 9 10 40 40 25 60 112 122 72 85 97 110 135 160 185 17 36 25 64 9 10 40 40 32 60 114 124 72 85 97 110 135 160 185 17 36 32 88 10 11 53 53 40 77 143.5 154 77 90 102 115 140 165 190 19 46 40 With rod boot (mm) ZZ Symbol Z l Stroke 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 1 to 50 51 to 100 101 to 150 151 to 200

LJ1H

VAC For single phase 200 VAC CNP1 NFB MC CNP1 NFB MC L1 L1 Three phase 200 to 230 VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and

5

, 250, 300, 350, 400, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175

Table of Contents

How to Order Valves. 181 182 183 183 183 183 185 186 189 189 189 190 190 191 192 193 194 194 194 194 195 195 195 196 197 198 198 198 199 199 199 200 201 202 203 204 207 209 210 211 212 216 218 218 219 220 224 226 227 227 228 229 231 233 233 234 235 238 239 239 239 242 242 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Table of Contents

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

25 37.5 50 87 100 325 300 250 275 225 250 200 225 175 200 150 175 125 150 25 100 125 51 75 112 69 64 12.5 25 37.5 50 87 100 325 316 250 291 225 266 200 241 175 216 150 191 125 166 30 100 141 56 75 128 86 68 12.5 25 37.5 50 103 116 341 316 250 291 225 266 200 241 175 216 150 191 125 166 32 100 141 56 75 128 91 76 12.5 25 37.5 50 103 116 341 300 200 280 180 260 160 240 140 220 120 200 100 180

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

details, refer to pages 190 to 199.)

Compact Rotary Actuator Series CRQ2

The rotation angle can be adjusted between 90 and 190.

CRB2/CRBU2/CRB1

270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 10 1.2 1.5 15 2.9 3.7 20 6.1 7.9 30 15 20.2 21 25 40 31.5 41 30 32 49 51 66 68 70 73 94 97 118 121 88 93 138 143 188 193 186 197 281 292 376 387 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34 48 52 98 104 136 146 272 294 50 Single vane Double vane 63 80 100

CL

Bore e f 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 1 to 50 12.5 12.5 12.5 12.5 20 25 32 40 68 72 72 77 35 35 35

Table of Contents

100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Rotary Table

less 31 49 37 5 or less 20 190 35 62 50 10 or less 39 66 33 5 or less 30 190 39 68 43 10 or less 43 72 29 5 or less 50 190 49 83 33 10 or less 53 87 22 5 or less 70 190 54 95 30 10 or less 58 99 21 5 or less 100 190 61 108 27 10 or less 65 112 18 5 or less 200 190 81 139 21 10 or less 85 143 15 5 or less Operating range m: Value of the operating range Lm of a single auto switch converted

Air Cylinder Series MB

214 61 29 12.5 25 150 239 175 200 264 289 125 10 75 27 20 30 40 60 80 100 120 130 140 150 170 190 210 120 230 270 140 160 180 200 250 290 310 With Mounting Bracket Refer to Basic/(B) for other dimensions and with rod boot.

Table of Contents

-XC12 to -XC21: Change of Angle Adjusting Range (0 to 100, 90 to 190) . -XC22: Without Inner Rubber Bumper, -XC30: Fluoro Grease. -X6: Shaft, Parallel Key Made of Stainless Steel Spec. Series MSQ Rotary Table Rack & Pinion Style Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 . Features. Model Selection .

SYJ300/500/700

Solenoid Valve for 200 V, 220 VAC Specifications Manual Override Operation Warning Warning Solenoid valves with grommet and L/M type plug connector AC specifications have a built-in rectifier circuit in the pilot section to operate the DC coil. With 200 V, 220 VAC specification pilot valves, this built-in rectifier generates heat when energized.

MGG

(mm) Bore size (mm) Stroke range (mm) AL AK AP AJ AI AH AG N AB M AA L K J I V B U T A O P S 63 80 100 12 14 60 180 158 250 228 100 25 66 25 180 135 117 65 108 228 192 30 M12 x 1.75 depth 23 Rc 1/4 200 72 75, 100, 125 150, 200, 250 300 16 14 70 200 178 284 262 115 27 76 30 214 160 138 75 128 262 224 M12 x 1.75 depth 28 Rc 3/8 35 230 89 16 16 80 226 200 326 300 125 30 80 32 245 190 153 85

CL

(The lock-up cylinder can operate at 50 to 200 mm/s.)