VQ7-6/7-8

(double) 155 (3 position) 44 145 (double) 55 155 (3 position) 77.5 Bottom port drawing 153.5 165.5 121 12 14 PB PA 5 3 R 21 39 54 65 4-Rc1/8 (pilot pressure exhaust port) P SMC R1 R2 17 17 6-Rc3/8 (ports P, R) 26.5 26.5 L: Dimensions n: Stations Formula 10 9 8 7 6 5 4 3 2 1 L1 L1 = 43n + 64 494 451 408 365 322 279 236 193 150 107 L2 L2 = 43n + 76 506 463 420 377 334 291 248 205 162 119 7

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT HF3100A-UN M8 26.5 2-6.5 8 M8 145 1 165 3 M6 380 1 400 5 160 3 TF3005C-TX TX3020C-TX TF3030C-TX [Unit: mm] 3-M4 6-R3.25 length8 M4 M4 M4 3 M4 Approx.12.2 125 2 140 1 155 2 16 16 IN Approx.67.5 3 100 1 100 1 290 2 150 2 308 5 Approx.160 332 5 170 5 12 34 12.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Q CE-compliant 150 Body Ported Series SY9000 23 Type How to Order Valve 5 L SY 9 1 20 02 Series 9 SY9000 Made to Order Nil X90 Main valve fluoro rubber (Refer to page 332.)

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

AC Servo Motor Driver (Network card type ）

PA14] = 0) 360 = 0 360 = 0 360 = 0 360 = 0 50 50 50 50 330 330 330 330 150 210 150 210 150 210 150 210 Bit 7: 0 Bit 6: 0 Bit 7: 0 Bit 6: 1 Bit 7: 1 Bit 6: 0 Bit 7: 1 Bit 6: 1 The servo motor rotates in a direction specified with a sign of the position data.

CM2

CS1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 C76 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

CM2

CA1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 CS1 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

LJ1H

6 Work piece mounting reference plane 80 5H10 depth 8 8 x M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 60 50 (43) Stroke + 125 (table movement range) 232 Z section 3.3 30 90 83 A section 5.8 1.7 4.8 80 Stroke + 400 A section detail (Switch groove) T-nut 11.5 40 (T-slot pitch) 36 45 4.5 9.4 3 x 5H10 depth 5 10 18 Stroke + 145

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

, 200 10 (3/8) 050. 100. 150, 200 16 (5/8) 050, 100, 150, 200 6 (1/4) 10 (3/8) 16 (5/8) T E C H N I C A L SPECIFICATIONS Fluid Air Proof Pressure 1MPa / 145 PSI MaxImum Operating Pressure 0.7MPa / 100 PSI 6 0.14MPa / 21 PSI Minimum Operating Pressure 10, 16 0.1MPa / 14 PSI Ambient and Fluid Temperature -10C~+70C (14~158F) Cushion Rubber Cushion (Standard) Lube None (Non-lube) Stroke Tolerance

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable

Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2WB18010DC C (D) Q2WB20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2WB18020DC C (D) Q2WB20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2WB18030DC C (D) Q2WB20030DC M18 x 155 l M18 x 165 l 155 165 36 39 C (D) Q2WB18040DC C (D) Q2WB20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2WB18050DC

CV/MVGQ

Standard stroke (mm) Note) Bore size (mm) CC 25, 50, 75, 100, 125, 150 20 25, 50, 75, 100, 125, 150 25 Symbol Specifications RB 25, 50, 75, 100, 125, 150, 200 32 -XA Change of rod end shape 25, 50, 75, 100, 125, 150, 200, 250 40 J Note 1) Intermediate stroke other than above is manufactured upon receipt of order.

CV/MVGQ

Standard stroke (mm) Note) Bore size (mm) CC 25, 50, 75, 100, 125, 150 20 25, 50, 75, 100, 125, 150 25 Symbol Specifications RB 25, 50, 75, 100, 125, 150, 200 32 -XA Change of rod end shape 25, 50, 75, 100, 125, 150, 200, 250 40 J Note 1) Intermediate stroke other than above is manufactured upon receipt of order.

CG1

25, 50, 75, 100, 125, 150, 200 Option Double knuckle joint (with pins) 25, 50, 75, 100, 125, 150, 200, 250, 300 Order Made Made to order 40/50/63 Pins and snap rings for double knuckle joint are included, not mounted.

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

Compressed Air Cleaning Filter Series

(6B) C 300(12B) 760 D 795 150 E 300 270 F 520 1033 G 1318 3 H 3 887 J 620 AMD801/811 AMD91 972 AMD800/810/90/100 ORIENTATION IN OUT 3 x H holes IN OUT Label Drain (mm) Model 500 A 300 B 200(8B) C 300 D 1300 E 1430 F 1520 G 20 H Connection (Flange) 50(2B), 80(3B)JIS 10K FF flange 50(2B), 80(3B), 100(4B)JIS 10K FF flange 100(4B), 150(6B)JIS 10K FF flange 870 M20 x l500 AMD100 720 M16 x l400

Hydraulic Filters

150 150 190 190 65 65 65 75 75 75 85 85 72 72 72 86 86 86 106 106 90 90 90 115 115 115 145 145 110 110 110 130 130 130 170 170 6 6 6 6 6 6 8 8 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120

Water-cooledThermo-chiller

Pump Capacity HRW002-H HRW002-HS Circulating fluid: Fluorinated fluids Circulating fluid temperature: 68F (20C) HRW008-H/015-H/030-H HRW008-HS/015-HS/030-HS Circulating fluid: Fluorinated fluids Circulating fluid temperature: 68F (20C) 0 1 2 4 3 5 gpm 145 4 2 8 6 gpm 10 14 12 145 Outlet pressure [60 Hz] 130 130 Circulating fluid pressure (psi) 120 120 100 100 Outlet pressure [50 Hz] 90 90

VQ7-6/7-8

(Double) 44 145 (Double) 155 (3 position) 55 155 (3 position) 77.5 Bottom ported drawing 165.5 153.5 121 PA 14 PB 12 5 1 R 3 65 54 4-1/8 P 39 (Pilot pressure EXH port) 21 MC R2 R1 (P , R port) 6-3/8 17 17 26.5 26.5 L Dimension n: Stations 10 9 8 7 6 5 4 3 2 1 Formula L1 L1 = 43n + 64 494 451 408 365 322 279 236 193 150 107 L2 L2 = 43n + 76 506 463 420 377 334 291 248 205 162 119 3-10-12

VQ7-6/7-8

(Double) 44 145 (Double) 155 (3 position) 55 155 (3 position) 77.5 Bottom ported drawing 165.5 153.5 121 PA 14 PB 12 5 1 R 3 65 54 4-1/8 P 39 (Pilot pressure EXH port) 21 MC R2 R1 (P , R port) 6-3/8 17 17 26.5 26.5 L Dimension n: Stations 10 9 8 7 6 5 4 3 2 1 Formula L1 L1 = 43n + 64 494 451 408 365 322 279 236 193 150 107 L2 L2 = 43n + 76 506 463 420 377 334 291 248 205 162 119 3-10-12