V100

Lubrication Manual override Shock/Vibration resistance (2) Enclosure Non-locking push type 150/50 m/s2 Dustproof Note 1) Based on dynamic performance test, JIS B 8374-1981.

Magnetically Coupled Rodless Cylinder

Order 50, 100, 150, 200 300 6 50, 100, 150, 200, 250, 300 500 10 Symbol Specifications 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 15 -XB9 -XB13 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Low speed (15 to 50 mm/s) 1000 20 Ultra low speed (7 to 50 mm/s) 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Air-hydro 1500 32 Helical insert thread 100, 150, 200, 250, 300, 350

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

0.44 0.41 [0.41] 0.41 0.34 0.38 [0.38] 0.36 0.19 0.19 0.23 [0.12] 0.12 0.11 [0.11] 0.11 3 position VFR 130 VP4 Note) [ ]: Denotes the normal position.

SQ1000/2000

CP VVQZ2000 (For P, J kits) SSQ1000 4 B P 1 150 For station 1

Pin Clamp Cylinders

135 136 137 138 139 140 145 146 147 148 149 150 Guide pin diameter [mm] 11.5 11.6 11.7 11.8 11.9 12.0 12.5 12.6 12.7 12.8 12.9 13.0 13.5 13.6 13.7 13.8 13.9 14.0 14.5 14.6 14.7 14.8 14.9 15.0 Applicable hole diameter of workpiece [mm] For 12 For 13 For 14 For 15 Guide pin shape Round type/Diamond type Symbol 155 156 157 158 159 160 175 176 177 178 179 180 195 196 197 198 199 200 Guide pin

IZx-OMT0049

200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 1s 150 150 2s 200 200 0.5s 1s 2s 250

Basic type / Direct mount type Series CY3B/CY3R

, 200 300 Amount of Adjustment for Adjusting Bolt and Shock Absorber 50, 100, 150, 200, 250, 300 500 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 20 25 32 40 750 1000 Plate B Plate A Adjusting bolt 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 CY3B CY3R 1500 CY1S Shock absorbers 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 1500 CY1L Note) Intermediate

Cylinder with Lock

Bore size (mm) 40 50, 63 80, 100 Standard stroke (mm) Minimum mountable stroke for a cylinder with auto switch(es) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Caution Intermediate strokes other than the above are produced

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

Electric Actuator

3.28 3.28 200 3.66 3.66 30 3.68 3.59 50 4.10 4.01 100 4.80 4.72 150 5.73 5.64 200 6.48 6.39 250 7.23 7.14 300 7.80 7.72 30 6.42 50 6.99 100 8.20 150 9.44 200 10.9 250 12.0 300 13.0 Step motor Servo motor Product weight [lb] LEYG16L LEYG25L LEYG32L Stroke [mm] Model 30 1.85 1.85 50 2.14 2.14 100 2.51 2.51 150 3.15 3.15 200 3.48 3.48 30 3.70 3.62 50 4.17 4.08 100 4.63 4.61 150 5.64

Single Axis Electric Actuator Series LJ1H

15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Stroke + 150 (table movement range) 53 190 Z section 92 3.3 55 90 82 A section 5.8 1.7 4.8 Stroke + 393 135 A section detail (Switch groove) 92 Stroke + 32 3-8H10 depth 5 11.5 20 67 90 (T-slot pitch) 45 62 92 58 30 8-6.6 9.4 4.5 10 Stroke + 216 18 T-slot

Electric Grippers

Basic Compact LEHZ25 LEHZ25L 250 250 200 200 Overhang H [mm] Overhang H [mm] 70%, 40% 150 150 40% Pushing force 100% Pushing force 100% 100 100 70% 50 50 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Gripping point L [mm] Gripping point L [mm] LEHZ32 250 200 Overhang H [mm] 150 40% 100 Pushing force 100% 70% 50 0 0 50 100 150 200 250 Gripping point L [mm] LEHZ40 250 200 Overhang H [mm] 150

Compact Cylinder with Lock Series CLQ

70 CLS -20D -20D x 85 L x 100 L x 125 L x 75 L 85 100 125 75 -25D -25D x 90 L x 105 L x 130 L x 80 L 90 105 130 80 8.5 CLQ -30D -30D x 95 L x 110 L x 135 L x 85 L 95 110 135 85 -35D -35D 8.5 15.5 16.5 x 100 L x 115 L x 140 L x 90 L 100 115 140 90 RLQ -40D -40D x 105 L x 120 L x 145 L x 95 L 105 120 145 95 -45D -45D x 110 L x 125 L x 150 L x 100 L 110 125 150 100 MLU -50D -50D x 115 L x 130

CNA

Standard Strokes/ MXW Bore size (mm) 40 50, 63 80, 100 Standard stroke (mm) MXP 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 MG 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 MGP Stopping Accuracy MGQ Unit: mm MGG Operating piston speed (mm/s) Style of locking MGC 100 300

Cylinder with Lock

151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 150 175 40 56 41 23 12.5 25 37.5 50 75 100 125 150 175 200 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 225 250 100 76 61 29

Water-cooledThermo-chiller

Note 10) Weight in the dry state without circulating fluids 108 Thermo-chiller Series HRW Cooling Capacity Heating Capacity HRW002-H/008-H/015-H/030-H HRW002-HS/008-HS/015-HS/030-HS HRW002-H/008-H/015-H/030-H HRW002-HS/008-HS/015-HS/030-HS 0 50 70 90 110 130 150 170F 50 70 90 110 130 150 170 190F 35 7 HRW030-H 6 30 Heating capacity (kW) Cooling capacity (kW) Circulating fluid pressure (psi

Electric Actuator/Slider Type

630 420 210 1201 to 1300 540 360 180 1301 to 1400 470 310 150 1401 to 1500 410 270 130 Max. acceleration/deceleration [mm/s2] 20 (Refer to pages 45 to 47 for limit according to work load and duty ratio.)

AC Servo Motor Driver (Network card type ）

PA14] = 0) 360 = 0 360 = 0 360 = 0 360 = 0 50 50 50 50 330 330 330 330 150 210 150 210 150 210 150 210 Bit 7: 0 Bit 6: 0 Bit 7: 0 Bit 6: 1 Bit 7: 1 Bit 6: 0 Bit 7: 1 Bit 6: 1 The servo motor rotates in a direction specified with a sign of the position data.

Electric Actuator Triple Axis P&P Unit

Stroke+191 (23) Rreference plane (25) Stroke+15 130 21 63.5 Stroke+214 130 LG-240Z-Y 1 LG-240Z-Z 2 120 (23) 86 (90) Stroke+15 60 Stroke8 (For 100 to 150 strokes) 192 (For 200 to 1000 strokes) Stroke+191 Stroke+214 Select the unit specifications after confirming the Y and Z axes specifications. 1 ) For detailed dimensions and specifications, please refer to the body dimensions.