1

, 275, 300 (CXWM16 to 25) 225, 250 (CXWM32) 225, 250, 275 (CXWL16 to 25) 225 (CXWL32) CXWM 16, 20, 25, 32 25 to 200 CXWL 16, 20, 25, 32 225, 250, 275 25 to 200 ML1 25, 32, 40 1001 to 2000 100 to 1000 CY3B 20, 25, 32, 40 2001 to 3000 100 to 1000 CY1B 50, 63 From 2001 200 to 2000 2001 to 4000 (25, 32) 2001 to 5000 (40) 2001 to 6000 (50, 63) REA 25, 32, 40, 50, 63 200 to 1000 (5), 10, 15, 20

C76

1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Stroke Bore 32 68 (93) 118 139 143 164 168 189 214 97 (122) 147 172 172 197 197 222 247 140 (165) 190 224 215 249 240 274 299 40 89 (114) 122 (147) 174 (199) ( ): In the case of non-rotating 6-10-24 25 Series C76 Air Cylinder: Standard/Non-rotating Type Single Acting, Spring Return/Extended

C76

1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Stroke Bore 32 68 (93) 118 139 143 164 168 189 214 97 (122) 147 172 172 197 197 222 247 140 (165) 190 224 215 249 240 274 299 40 89 (114) 122 (147) 174 (199) ( ): In the case of non-rotating 6-10-24 25 Series C76 Air Cylinder: Standard/Non-rotating Type Single Acting, Spring Return/Extended

Guide Cylinder Series MGG

4 1000st 900st 3 800st 700st 2 600st st: Stroke (mm) 400st 500st 1 100st 200st 300st 0 0 50 100 150 200 250 300 350 400 450 500 550 600 Allowable end load F (N) MGGM 100Stroke 8 (Slide bearing type) 7 6 Deflection Y (mm) 5 1300st 1200st 4 1100st 1000st 3 900st 800st 2 600st 700st st: Stroke (mm) 400st 500st 1 100st 200st 300st 0 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750

Series SV

197.9 17 13 260.5 250 208.4 11.5 14 273 262.5 218.9 12.5 15 285.5 275 229.4 13.5 16 298 287.5 239.9 14.5 L1 L2 L3 L4 Note) The width of type E (Matsushita Electric Works) and type G (Rockwell Automation) SI units is 24.3mm greater.

MGP

The intermediate strokes that do not use a spacer are made to order "XB10" shown on p.5.4-1. 125, 150, 175, 200, 250 MGP 10, 20, 30, 40, 50, 75, 100 12 16 M L MXS 20 25 MGP 20, 30, 40, 50, 75,100, 125, 150, 175, 200 M L 250, 300, 350, 400 MXQ 32 40 50 63 80 100 MXF MGP 25, 50, 75, 100, 125, 150, 175, 200 M L 250, 300, 350, 400 MXW OUT IN MXP Theoretical Force (N) MG Rod diameter (mm) Operating

Combination Cylinder

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

Table of Contents

D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style . 231 231 232 233 234 237 239 239 239 240 240 241 242 242 243 244 246 248 249 250 254 254 255 256 257 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 262 262 263 263 264 265 271 273 274 274 275 276 283 287 288 290 292

LEKF-OMZ0035

C2 LECSC2-T 200 to 230 2 2 S2 LECSS2-T 200 to 240 5 5 N2 LECSN2-T 200 to 240 A 10 E2 LECSN2-T-E 200 to 240 92 LECSN2-T-9 200 to 240 I/O cable length P2 LECSN2-T-P 200 to 240 Nil Without cable H Without cable Connector only 1 1.5 [m] Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 -9- AC servo motor LECY* series L E K F S

Hydraulic

Bore size (mm) 20 NTH-025 17 19.6 M10 x 1.25 16.5 6 25 NTH-032 19 21.9 M12 x 1.25 18 7 32 NTH-040 22 25.4 M16 x 1.5 21 10 40 NTH-050 27 31.2 M20 x 1.5 26 12 50 NTH-060 32 37 M24 x 1.5 31 14 63 NTH-080 41 47.3 M30 x 1.5 40 17 80 NTH-100 55 63.5 M39 x 1.5 54 20 100 NTH-125 70 80.8 M48 x 1.5 69 26 Weights Unit: g Standard stroke (mm) 5 Bore size (mm) 10 15 20 25 30 35 40 45 50 75 100 218 240

1.1

block C 45 B A 220 4 x 11 (mm) A B 240 C 14 Transformer part no.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(121) Single Double 2 position 4.1 0.41 1.1 4.1 0.29 1.0 Closed center Exhaust center 3.0 0.43 0.80 2.6 0.41 0.72 1 4 10-SY740--02 2.6 1.1 [0.49] 0.42 0.35 [0.48] 0.71 4.7 [1.7] 5.3 [2.3] 0.63 0.39 [0.49] 0.49 1.3 [0.65] 2.2 3 position 239 (110) 245 (116) 287 (158) 253 (124) Pressure center 242 (113) 284 (155) 218 (89) 237 (108) 221 (92) 242 (113) 225 (96) 250 (121) Single Double 2 position

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(Lead wire Red: +, Black: ) 220 VAC, 50/60 Hz VP4 Locking type (Tool required) 3 position exhaust center 240 VAC, 50/60 Hz 12 VDC 100 VDC S0700 Locking type VFS3000 (P .1130) 3 position pressure center 6.8 6.5 (Lever) VQ Locking type (lever) is not available for body ported Series VFS2000/3000.

24

T U VA VB WA WB X XA XB 75 st or less Over 75 st to 175 st Over 175 st to 250 st Over 250 st 75 st or less Over 75 st to 175 st Over 175 st to 250 st Over 250 st 20 81 54 72 44 44 120 200 300 39 77 117 167 28 3 3.5 25 91 64 82 50 44 120 200 300 39 77 117 167 34 4 4.5 MGPM (Slide bearing)/A, DB, E Dimensions MGPL (Ball bushing), MGPA (High precision ball bushing)/A, DB, E Dimensions [mm]

Electric Actuator

5 Series LECP6 20 7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (24 VDC) Series LECA6 11 2.5 12 to 500 12 LEFS25A

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

275 51 75 112 250 64 12.5 25 37.5 50 100 103 250 225 86 200 241 175 216 30 150 191 341 125 166 316 30 100 141 291 56 75 128 266 68 12.5 25 37.5 50 116 103 250 225 91 200 241 175 216 32 150 191 341 125 166 316 32 100 141 291 56 75 128 266 76 12.5 25 37.5 50 116 130 200 180 119 160 140 220 40 120 200 320 100 180 300 40 80 160 280 75 60 150 260 82 10 20 30 40 140 240 60 ISO Standards Air

Magnetically Coupled Rodless Cylinder

Order 50, 100, 150, 200 300 6 50, 100, 150, 200, 250, 300 500 10 Symbol Specifications 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 15 -XB9 -XB13 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Low speed (15 to 50 mm/s) 1000 20 Ultra low speed (7 to 50 mm/s) 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Air-hydro 1500 32 Helical insert thread 100, 150, 200, 250, 300, 350

CE

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC MVGQ CC Please consult with SMC separately for a BCD cable with connector.

CE

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC MVGQ CC Please consult with SMC separately for a BCD cable with connector.

Air Slide Table

300 0 0 50 100 150 200 250 300 350 400 L3: Overhang Allowable range: 300 mm L3: Overhang Allowable range: 400 mm Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.