Combination Cylinder

150 42 50 59 76 92 100 110 130 160 180 14 18 18 22 26 71 80 99 117 131 11 11 14 17 17 M14 X 1.5 M18 X 1.5 MGQ M18 X 1.5 M22 X 1.5 MGG M26 X 1.5 Long stroke Dimensions except those below are same as one in table above.

C95

8, 12, 16 175 170 175 + 55(n-4)/2 n = 4, 8, 12, 16 185 185 + 55(n-4)/2 n = 4, 8, 12, 16 130 130 130 130 + 100(n-2) n = 2, 4, 6, 8 130 + 100(n-2) n = 2, 4, 6, 8 135 135 135 135 + 100(n-2) n = 2, 4, 6, 8 135 + 100(n-2) n = 2, 4, 6, 8 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 120 120 + 55(n-4)/2 n = 4, 8, 12, 16 160 160 + 55(n-4)/2 n = 4, 8, 12, 16 250 10 200

C95

8, 12, 16 175 170 175 + 55(n-4)/2 n = 4, 8, 12, 16 185 185 + 55(n-4)/2 n = 4, 8, 12, 16 130 130 130 130 + 100(n-2) n = 2, 4, 6, 8 130 + 100(n-2) n = 2, 4, 6, 8 135 135 135 135 + 100(n-2) n = 2, 4, 6, 8 135 + 100(n-2) n = 2, 4, 6, 8 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 120 120 + 55(n-4)/2 n = 4, 8, 12, 16 160 160 + 55(n-4)/2 n = 4, 8, 12, 16 250 10 200

Hygienic Design Cylinder Series HY

135 160 185 95 100 105 110 115 120 125 130 135 140 165 190 115 120 125 130 135 140 145 150 155 180 205 115 120 125 130 135 140 145 150 155 180 205 HY C M 10 13.5 9 9 13 D9.5 -X Individual -X Technical data 889 Series HY Specific Product Precautions 1 Be sure to read before handling.

Air Cylinder Series CM2

37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 125 101 to 150 88 92 92 96.5 151 to 200 101 105 105 201 to 300 126 130 130 301 to 400 151 155 155 401 to 500 176 180 180 101 to 150 168 172 174 206 151 to 200 181 185 187 219 201 to 300 206 210 212 244 301 to 400 231 235 237 269 401 to 500 256 260 262 294 Bore size 20 25 32 40 23.5 23.5

Air Cylinder

(mm) 40 50 63 80 +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 93 15 CA2-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 103 15 CA2-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 107 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 129 25 MB-S10 100 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 135 25 Double clevis pivot bracket Material: Cast iron B Z

MY1

Mass m Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 5mm 0mm 65mm 0.88kg 210 65 111 Z Wb 42.5mm 0mm 150mm 4.35kg 150 Wc 42.5mm 111mm 150mm 0.795kg Wd 42.5mm 210mm 150mm 0.5kg Y 42.5 5 n = a, b, c, d 3 Composite center of gravity calculation m = mn = 0.88 + 4.35 + 0.795 + 0.5 = 6.525kg 1 m X = x (mn x Xn) 1 6.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 0.5 x 150) = 138.5mm 1 m Y = x (mn x yn

Series VQ Metal Seal/Rubber Seal Body Ported

VQZ < >: AC Note 2) VQD Dimensions (mm) Equation L1=10.5n+14.5 L2=10.5n+25 n: Station (Max. 16) n L 1 16 15 182.5 193 262.5 273 14 172 182.5 250 260.5 13 161.5 172 237.5 248 12 151 161.5 225 235.5 11 140.5 151 212.5 223 10 130 140.5 212.5 223 9 119.5 130 200 210.5 8 109 119.5 187.5 198 7 98.5 109 175 185.5 6 88 98.5 162.5 173 5 77.5 88 150 160.5 4 67 77.5 150 160.5 3 56.5 67 137.5 148 2 46

Air Cylinder Series MB

177 202 51 25 12.5 25 150 227 89 37.5 50 75 100 125 102 114 127 152 177 202 51 25 12.5 25 150 227 37.5 50 75 100 125 101 114 126 139 164 189 214 56 29 12.5 25 150 239 175 200 264 289 37.5 50 75 100 125 101 114 126 139 164 189 214 61 29 12.5 25 150 239 175 200 264 289 125 10 75 27 20 30 40 60 80 100 120 130 140 150 170 190 210 120 230 270 140 160 180 200 250 290 310 With Mounting Bracket

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

V100

Lubrication Manual override Shock/Vibration resistance (2) Enclosure Non-locking push type 150/50 m/s2 Dustproof Note 1) Based on dynamic performance test, JIS B 8374-1981.

Magnetically Coupled Rodless Cylinder

Order 50, 100, 150, 200 300 6 50, 100, 150, 200, 250, 300 500 10 Symbol Specifications 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 15 -XB9 -XB13 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Low speed (15 to 50 mm/s) 1000 20 Ultra low speed (7 to 50 mm/s) 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Air-hydro 1500 32 Helical insert thread 100, 150, 200, 250, 300, 350

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

0.44 0.41 [0.41] 0.41 0.34 0.38 [0.38] 0.36 0.19 0.19 0.23 [0.12] 0.12 0.11 [0.11] 0.11 3 position VFR 130 VP4 Note) [ ]: Denotes the normal position.

SQ1000/2000

CP VVQZ2000 (For P, J kits) SSQ1000 4 B P 1 150 For station 1

Pin Clamp Cylinders

135 136 137 138 139 140 145 146 147 148 149 150 Guide pin diameter [mm] 11.5 11.6 11.7 11.8 11.9 12.0 12.5 12.6 12.7 12.8 12.9 13.0 13.5 13.6 13.7 13.8 13.9 14.0 14.5 14.6 14.7 14.8 14.9 15.0 Applicable hole diameter of workpiece [mm] For 12 For 13 For 14 For 15 Guide pin shape Round type/Diamond type Symbol 155 156 157 158 159 160 175 176 177 178 179 180 195 196 197 198 199 200 Guide pin

IZx-OMT0049

200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 1s 150 150 2s 200 200 0.5s 1s 2s 250

Basic type / Direct mount type Series CY3B/CY3R

, 200 300 Amount of Adjustment for Adjusting Bolt and Shock Absorber 50, 100, 150, 200, 250, 300 500 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 20 25 32 40 750 1000 Plate B Plate A Adjusting bolt 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 CY3B CY3R 1500 CY1S Shock absorbers 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 1500 CY1L Note) Intermediate

Cylinder with Lock

Bore size (mm) 40 50, 63 80, 100 Standard stroke (mm) Minimum mountable stroke for a cylinder with auto switch(es) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Caution Intermediate strokes other than the above are produced

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket