MGG

, 200 11 depth 8 16 19 19 120 40 M8 x 1.25 depth 16 45 149 170 29 100 150 9 50 93 M12 x 1.75 depth 21 34 6.5 9 10 7 75, 100, 125 14 depth 10 16 19 19 120 40 45 M8 x 1.25 depth 16 149 170 29 100 150 9 50 93 M12 x 1.75 depth 21 34 6.5 9 10 7 150, 200, 250 14 depth 10 19 21 22 150 45 50 M10 x 1.5 depth 20 182 194 37 120 170 11 55 103 M14 x 2 depth 25 38 7 11 12 7 300 17 depth 12 For long strokes

ZP

150 100 250 150 200 60 200 180 120 0 20 0 0 40 30 0 10 30 20 104 or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration

Guide Cylinder Series MGG

35 54 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 120 14 16 10 100 35 6 35 135 20 80 118 6.6 40 73 80 106 35 60 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 140 17 19 10 120 40 9 45 170 20 100 150 9 50 93 95 134 50 75 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 170 23 21 10 150 45 9 50 194 25 120 170 11 55 103 115 152 56 90 M10 x 1.5 depth 20 M14 x

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Step Motor Controller

Note 2) For interface use, supply 24 VDC 10% 150 mA using an external source. Note 3) The failure (ALM) is ON during normal conditions.

CA2

Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.

Hydraulic Filters

150 150 190 190 65 65 65 75 75 75 85 85 72 72 72 86 86 86 106 106 90 90 90 115 115 115 145 145 110 110 110 130 130 130 170 170 6 6 6 6 6 6 8 8 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120

2 Phase Stepper Motor/Without Motor Brake Series LXP

LXPB2BC-175 LXPB2BC-200 34 44 52 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

C95

120 + 55(n-4)/2 n = 4, 8, 12, 16 160 125 125 + 55(n-4)/2 n = 4, 8, 12, 16 135 135 + 55(n-4)/2 n = 4, 8, 12, 16 135 135 135 + 55(n-4)/2 n = 4, 8, 12, 16 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 140 140 140 140 + 100(n-2) n = 2, 4, 6, 8 140 + 100(n-2) n = 2, 4, 6, 8 100 100 100 100 + 100(n-2) n = 2, 4, 6, 8 100 + 100(n-2) n = 2, 4, 6, 8 120 120 + 55(n-4)/2 n = 4, 8, 12, 16 110 110 + 55(n-4)/2

smcmaintenancepartslist

temperature (C) Note 2) 0 to 150 0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

Electric Slide Tables

16: LES25J 3 3 3 2 Lead 16: LES25J 2 1.5 2 2 1 1 1 1 0.5 0 100 200 300 400 500 0 0 0 50 100 150 200 250 300 350 400 450 0 0 0 100 200 300 400 500 0 50 100 150 200 250 300 350 400 450 Speed [mm/s] Speed [mm/s] Speed [mm/s] Speed [mm/s] 2 Series LES Cycle Time (Guide) 1.80 100 mm/s 1.60 1.40 1.20 200 mm/s Time [s] 1.00 300 mm/s 0.80 0.60 0.40 400 mm/s 0.20 30 40 50 60 70 80 90 100 110 120 130

ZP

150 100 250 150 200 60 200 180 120 0 20 0 0 40 30 0 10 30 20 104 or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration

Electric Actuators

120 120 120 80 80 80 80 40 40 40 40 0 0 0 0 0 0.44 0.88 0.32 1.76 2.2 0.0 0.88 1.76 2.64 3.53 4.4 0 0.44 0.88 0.32 1.76 2.2 0.0 0.88 1.76 2.64 3.53 4.4 Work load [lb] Work load [lb] Work load [lb] Work load [lb] 0 50 100 150 200 250 300 200 0 50 100 150 200 250 300 200 Overhang: L2 [mm] Overhang: L2 [mm] Overhang: L2 [mm] Overhang: L2 [mm] 160 160 L2 120 120 80 80 40 40 Horizontal mounting

C95

120 + 55(n-4)/2 n = 4, 8, 12, 16 160 125 125 + 55(n-4)/2 n = 4, 8, 12, 16 135 135 + 55(n-4)/2 n = 4, 8, 12, 16 135 135 135 + 55(n-4)/2 n = 4, 8, 12, 16 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 140 140 140 140 + 100(n-2) n = 2, 4, 6, 8 140 + 100(n-2) n = 2, 4, 6, 8 100 100 100 100 + 100(n-2) n = 2, 4, 6, 8 100 + 100(n-2) n = 2, 4, 6, 8 120 120 + 55(n-4)/2 n = 4, 8, 12, 16 110 110 + 55(n-4)/2

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

73 29 6.6 16 35 135 80 40 32 11 depth 8 M10 x 1.5 depth 18 M6 x 1 depth 12 152 75 120 22 50 134 40 95 19 150 93 32 9 19 45 170 100 50 40 14 depth 10 M12 x 1.75 depth 21 M8 x 1.25 depth 16 182 90 150 22 56 152 45 115 21 37 170 11 103 25 50 194 120 55 50 17 depth 12 M14 x 2 depth 25 M10 x 1.5 depth 20 Bore size (mm) For lock type For non-lock type Bore size (mm) Rod end lock Head end lock O

Table of Contents

AC DC 60 40 1 99 60 120 183 Application Example Maximum 40 N.C. (VX31) N.O. (VX31) C.O.

CV/MVGQ

Standard stroke (mm) Note) Bore size (mm) CC 25, 50, 75, 100, 125, 150 20 25, 50, 75, 100, 125, 150 25 Symbol Specifications RB 25, 50, 75, 100, 125, 150, 200 32 -XA Change of rod end shape 25, 50, 75, 100, 125, 150, 200, 250 40 J Note 1) Intermediate stroke other than above is manufactured upon receipt of order.

CV/MVGQ

Standard stroke (mm) Note) Bore size (mm) CC 25, 50, 75, 100, 125, 150 20 25, 50, 75, 100, 125, 150 25 Symbol Specifications RB 25, 50, 75, 100, 125, 150, 200 32 -XA Change of rod end shape 25, 50, 75, 100, 125, 150, 200, 250 40 J Note 1) Intermediate stroke other than above is manufactured upon receipt of order.

Air Cylinder

150 7 20 30 16 95 * Other dimensions are the same as basic type.