Air Slide Table

30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height

NCQ2/CQ2

H thread effective depth C Auto switch Auto switch L L A + Stroke B + Stroke A + Stroke B + Stroke 20 32 40 50 63 80 100 12 Bore size 10, 20, 30 40, 50, 75 100 10, 20, 30 40, 50, 75 100 10, 20, 30 40, 50, 75 100 10, 20, 30 40, 50, 75 100 10, 20, 30 40, 50, 75 100 10, 20, 30 40, 50, 75 100 Stroke (mm) 15, 25 5, 10, 20 30, 40, 50 5, 15, 25 35, 45 5, 15, 25 35, 45 15, 25 35, 45 15, 25 35, 45

CQ2

Bore size 12, 16 Bore size Standard stroke 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 20, 25 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 20, 25 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50, 63 80, 100 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 50, 75, 100 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Auto Switch Mounting Bracket Part No.

Smooth Cylinder/Low Speed Cylinder

CDQ2YB325 10 15 20 25 30 35 40 45 50 75 -100 CDQ2YB405 10 15 20 25 30 35 40 45 50 75 -100 CDQ2YB5010 15 20 25 30 35 40 45 50 75 -100 CDQ2YB6310 15 20 25 30 35 40 45 50 75 -100 CDQ2YB8010 15 20 25 30 35 40 45 50 75 -100 CDQ2YB10010 15 20 25 30 35 40 45 50 75 -100 CQ-M8 x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 135L x 160L CQ-M10 x 75L x 80L x 85L x 90L x 95L x 100L x 105L

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Besides, be certain that a snap ring is placed firmly into the groove of rod cover before supplying air at the time of installment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50, 63 80, 100 32, 40 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50,

Table of Contents

0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

5

+ 30 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) Same surface 100 + 100 (n 2) (n = 2, 3, 4) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 1 10 75 80 90 2 Different surfaces 35 75 80 90 Same surface 55 n Different surfaces 35 + 3 (n 2) (n = 2, 3, 4) 75 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8) Note

Air Cylinder Series MB

(n = 4, 8, 12, 16) n 2 (Different surfaces) 2 (Same surface) 60 90 65 95 75 100 80 105 85 110 90 125 D-A3 D-G39 D-K39 65 + 30 (n 2) (n = 2, 4, 6, 8) 75 + 30 (n 2) (n = 2, 4, 6, 8) 80 + 30 (n 2) (n = 2, 4, 6, 8) 85 + 30 (n 2) (n = 2, 4, 6, 8) 90 + 30 (n 2) (n = 2, 4, 6, 8) 60 + 30 (n 2) (n = 2, 4, 6, 8) n (Different surfaces) 90 + 100 (n 2) (n = 2, 4, 6, 8) 100 + 100 (n 2) (n = 2,

Electric Actuator/Slider Type

, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 7 15 29 7 17 35 10 22 44 Pushing force lbf [N] Note 3) (Set value: 45 to 90%) Max. speed [mm/s] 900 450 225 1200 600 300 1000 500 250 Pushing speed [mm/s] Note 4) 35 or less 30 or less 30 or less Max. acceleration/deceleration

ZP

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

Battery-less

50 100 150 200 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Product weight [kg] 1 1.14 1.37 1.66 1.83 1.7 1.89 2.21 2.63 2.97 3.31 3.57 2.95 3.21 3.76 4.32 4.99 5.48 5.92 Series LEYG16LmE LEYG25LmE LEYG32LmE Stroke [mm] 30 50 100 150 200 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Product weight [kg] 1.01 1.14 1.31 1.6 1.75 1.71 1.92 2.16 2.59 2.85 3.17 3.41 2.95 3.22 3.61

1

to 200 st Over 200 st to 300 st Over 300 st Over 25 st to 100 st Over 100 st to 200 st 25 st Over 300 st Over 25 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 25 st or less Over 300 st Over 30 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 30 st or less Over 300 st Over 25 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 25 st or less Over 300 st Over 30 st to

Made to Order

Dust resistant actuator Bore size (mm) Standard stroke Minimum operating pressure 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 0.1 MPa 50 to 100 0.1 MPa MGPM Bore size Stroke XC92 Auto switch Suffix Dust resistant actuator Suffix Standard stroke 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 25, 50, 75, 100, 125

ZP

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

CATALOG VC10

E53JJ8XCCM E53KJ8XCCM E53KK8XCCM E53NJ8XCCM E53NK8XCCM 200 150 150 100 60 50 30 30 200 150 150 100 60 50 30 30 1/32 3/64 3/64 1/16 3/32 3/32 1/8 1/8 1/32 3/64 1/16 1/16 1/16 3/32 1/16 3/32 .022 .055 .055 .075 .156 .156 .230 .230 020 .048 .075 .075 .075 .156 .075 .075 MODEL E54 3 Way Normally Open E54GG8XCCM E54HH8XCCM E54JJ8XCCM E54JK8XCCM E54KK8XCCM E54JN8XCCM E54KN8XCCM 150 125 100 75

Table of Contents

Weight (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 90 270 180 90 270 180 180 270 180 270 180 90 270 Rotating angle Single vane Double vane 469 47.1 263 140 142 143 72 47.5 258 255 491 480 72 73 47 Body of rotary actuator Auto switch unit + 2 switches 30 50 60 46.5 30 Angle adjuster 30 90 150 203 47 90 100 90 100 90 90 100 90 100 100 Rotating angle 158 308

TABLE OF CONTENTS

E53JJ8XCCM E53KJ8XCCM E53KK8XCCM E53NJ8XCCM E53NK8XCCM 200 150 150 100 60 50 30 30 200 150 150 100 60 50 30 30 1/32 3/64 3/64 1/16 3/32 3/32 1/8 1/8 1/32 3/64 1/16 1/16 1/16 3/32 1/16 3/32 .022 .055 .055 .075 .156 .156 .230 .230 020 .048 .075 .075 .075 .156 .075 .075 MODEL E54 3 Way Normally Open E54GG8XCCM E54HH8XCCM E54JJ8XCCM E54JK8XCCM E54KK8XCCM E54JN8XCCM E54KN8XCCM 150 125 100 75

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Besides, be certain that a snap ring is placed firmly into the groove of rod cover before supplying air at the time of installment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50, 63 80, 100 32, 40 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50,

Air Cylinder Series CA2

(n 2) (n = 2, 4, 6, 8, ) 90 + 30 (n 2) (n = 2, 4, 6, 8, ) D-A3 D-G39 D-K39 Different surfaces MQ With n 100 + 100 (n 2) (n = 2, 3, 4, ) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Same surface RHC 1 10 35 55 80 90 75 Different surfaces Same surface With 2 RZQ 80 90 75 35 + 30 (n 2) (n = 2, 3, 4, ) 75 + 30 (n 2) (n = 2, 4, 6, 8, ) 80 + 30 (n 2) (n = 2, 4, 6, 8, ) 90 + 30 (n 2) (n = 2, 4, 6

High Vacuum Angle Valve

-1-1 XLG160-30-1H-1 100 XLA100-30-1 XLA100A-30-1 XLA100-30-1H XLA100A-30-1H XLAV100-30-1 XLAV100A-30-1 XLC100-30-1-1 XLC1 00-30-1H-1 XLF100-30-1 XLF100A-30-1 XLF100-30-1H XLF100A-30-1H XLFV100-30-1 XLFV100A-30-1 XLD100-30-1 XLD100-30-1H XLDV100-30-1 XLG100-30-1-1 XLG100-30-1H-1 80 XLA80-30-1 XLA80A-30-1 XLA80-30-1H XLA80A-30-1H XLAV80-30-1 XLAV80A-30-1 XLC80-30-1-1 XLC80-30-1H-1 XLCV80