2

0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) AR40-A Rc1/2 AR40-06-A Rc3/4 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 0 0 1000 2000 3000 Flow rate L/min (ANR) Flow rate L/min (ANR) 183 Regulator Series AR10-A to AR40-A Pressure Characteristics (Representative values) Conditions: Inlet pressure 0.7 MPa,

Battery-less

2000 2000 2000 2000 1500 1500 1500 1500 L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10

Electric Actuator/Slider Type

900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 800 400 1500 1000 500 Note 3) Max. speed [mm/s] Stroke range Actuator specications 601 to 700 930 620 310 1410 940 470 701 to 800 750 500 250 1140 760 380 801 to 900 930 620 310 901 to 1000 780 520 260 Max. acceleration/deceleration [mm/s2] 20 (Refer to pages 7 to 9 for limit

Slider Type Ball Screw Drive/11-LEFS Series

1500 1500 1500 1000 1000 1000 1000 L7 [mm] L7 [mm] L7 [mm] L7 [mm] Y 500 500 500 500 Mey m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work

CATALOG

Collision Speed (mm/s) 200 200 1500 200 1500 Max.

Mechanically Jointed Rodless Cylinder Series MY2

Shock Absorber Specifications RB 0806 RB 1007 RB 1412 RB 2015 RB 2725 Model Max. energy absorption (J) 2.9 5.9 19.6 58.8 147 Stroke absorption (mm) 6 7 12 15 25 Max. impact speed (mm/s) 1500 1500 1500 1500 1500 Max. operating frequency (cycle/min) 80 70 45 25 10 Extended 1.96 4.22 6.86 8.34 8.83 Spring force (N) Compressed 4.22 6.86 15.98 20.50 20.01 Operating temperature range (C) 5 to 60

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Weight/MY2C MY2C/m1 MY2C/m2 MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load weight Nm Load weight Nm Load weight Nm MY2C40 MY2C40 MY2C40 10 10 10 MY2C25 MY2C25 MY2C25 5 5 5 4 4 4 MY2C16 MY2C16 3 3 3 MY2C16 2 2 2 1 1 1 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500

A

Collision Speed (mm/s) 200 200 1500 200 1500 Max.

Compact

] Horizontal/Bottom mounting 1000 1000 800 800 L2 L2 [mm] L2 [mm] 600 600 m Y 400 400 200 200 0 0 2 4 6 8 10 0 0 5 10 15 20 Work load [kg] Work load [kg] 2000 2000 1500 1500 m L3 [mm] L3 [mm] 1000 1000 L3 Z 500 500 0 0 2 4 6 8 10 0 0 5 10 15 20 Work load [kg] Work load [kg] 2000 2000 1500 1500 L4 L4 [mm] L4 [mm] 1000 1000 X m 500 500 0 0 2 4 6 8 10 0 0 5 10 15 20 Work load [kg] Work load

MY2

1500 1500 1500 1500 Max. operating frequency (cycles/min) 80 70 45 25 10 Extended 1.96 4.22 6.86 8.34 8.83 Spring force (N) Compressed 4.22 6.86 15.98 20.50 20.01 Operating temperature range (C) 5 to 60 Stroke Adjusting Unit Specifications 16 25 40 Bore size (mm) Unit symbol L H L H L H RB0806 RB1007 RB1007 RB1412 RB1412 RB2015 MY2H Shock absorber model RB1007 RB1412 RB1412 RB2015 RB2015

Electric Actuator

54 300, 400, 500, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 25 AC servo motor 54 300, 400, 500, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000, 2500 32 54 300, 400, 500, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000, 2500, 3000

Mechanically Jointed Rodless Cylinders

1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Refer to page 27 for the MY3M.

Ionizer

1000 500 0 500 1000 1500 2000 0 Electrostatic potential (V) Sensor head 641 A RoHS Ionizer Series IZS31 How to Order 780 Ionizer IZS31 Made to Order Refer to the below table.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEC Y 10 5 5 Motorless 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 2500 3000 LAT Speed [mm/s] Speed [mm/s] When the stroke of the LEJB40 series exceeds 1000 mm, the work load is 10 kg.

Electric Actuators

L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Max. impact speed (mm/s) 1500 1500 1500 1500 1500 Note 2) Use at a piston speed within the absorption capacity range. Refer to features page 8.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

Support Guide/11-LEFG Series

[kg] 2000 2000 2000 2000 1500 1500 1500 1500 L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0