5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Nil R Internal pilot External pilot (B) (A) 4 2 A : Non-locking push type A (Extended) 2 Option Coil rated voltage (EA)(P)(EB) 5 1 3 3 2 1 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 position closed center (B) (A) 4 2 110 to 120 VAC, 50/60 Hz 4 3 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC B : Locking type B (Tool required) (EA)(P)(EB) 5 1 3 7 240 VAC, 50/60 Hz 9 Other 3 position exhaust center

AC Servo Motor Driver (Network card type ）

(b) When POL is enabled ([Pr. PA14] = 1) 360 = 0 360 = 0 360 = 0 360 = 0 330 330 330 330 50 50 50 50 210 150 210 150 210 150 210 150 Bit 7: 0 Bit 6: 0 Bit 7: 0 Bit 6: 1 Bit 7: 1 Bit 6: 0 Bit 7: 1 Bit 6: 1 The servo motor rotates in a direction specified with a sign of the position data.

MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

Electric Slide Tables

B C Radial clearance M W A Table 1 B side parallelism to A side Model LESH8 LESH16 LESH25 Refer to Table 1. B side parallelism to A side [mm] Model Stroke [mm] 50 75 100 150 Refer to Graph 1.

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Table of Contents

Metal bowl AL Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specifications Bracket mounting size Accessory specifications (mm) With pressure gauge With auto-drain Model Port size D C A B H 27 33 N 26 63 66 76 76 P F 25 30 41 50 50 G 20 24 35 40 40 K 4.5 5.5 7 9 9

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Air Cylinder

CM3 Auto Switch Proper Mounting Position (Centralized piping type, With end lock) CG1 (mm) Auto switch model D-H7l D-H7C D-H7lW D-H7BA D-H7NF CG3 D-C7l D-C80 D-C73C D-C80C D-G39A D-K39A D-A3lA D-A44A D-M9l(V) D-M9lW(V) D-M9lA(V) D-A9l(V) D-G5NT D-B5l D-B64 D-B59W JMB MB A B A B A B A B A B A B A B A B Bore size MB1 20 10.5 (8) 9.5 (7) 6.5 (4) 5.5 (3) 0.5 () 0 () 6 (4) 5 (3) 2.5 (0.5) 1.5

Refrigerated Air Dryers Series IDF/IDU

/Dimensions Terminal block A B C Transformer Applicable dryer Capacity Type Inlet voltage Outlet voltage Mass C 45 B 200 V (50 Hz) 200, 220 V (60 Hz) 220 V (50 Hz) 220 to 240 V (60 Hz) IDF-TR4000-5 275 259 240 14 kg IDF55E-30 IDF75E-30 IDU55E-30 IDU75E-30 380, 400, 415 V (50 Hz) 380 to 400, 400 to 415, 415 to 440 V (60 Hz) Threephase Singleturn 200 V (50 Hz) 200, 220 V (60 Hz) IDF-TR4000-

Proposals for Energy Saving

G E T D 7 9 Optional How to Order Pilot Valve Assemblies Pilot valve assemblies/Electrical entry Symbol Electrical entry Symbol Electrical entry 50 SF4 Z B E 1 G GS Manual override Rated voltage Nil Push type 1 100VAC, 50/60Hz B Slotted locking type 2 200VAC, 50/60Hz C Locking type 3110 to 120VAC, 50/60Hz 4220VAC, 50/60Hz 5 24VDC Optional E EZ Indicator light/Surge voltage suppressor 6

24

Contents 20 MGP20-B-PS Set of nos. above @4, @5, @6, @7, #5, $4, $5 50 MGP50-B-PS Set of nos. @4, @5, @6, @7, above #5, #6, $4, $5 63 MGP63-B-PS 80 MGP80-B-PS Set of nos. @4, @5, @6, @7, above $4, $5 100 MGP100-B-PS 25 MGP25-B-PS 32 MGP32-B-PS 40 MGP40-B-PS *: Each seal kit includes the parts listed above.

2 Phase Stepper Motor/Without Motor Brake Series LXP

(B contact) N.C. (B contact) Lead screw lead N.C. (B contact) N.C. (B contact) 6mm 12mm A B N.O. (A contact) N.O. (A contact) Stroke N.O. (A contact) 50mm 75mm 100mm 125mm 150mm 170mm 200mm 50 75 100 125 150 170 200 N.O. (A contact) Use a driver with CE marking.

Magnetically Coupled Rodless Cylinder

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

VFR

T (EA)(P)(EB) 5 1 3 Option 2 position double (B) (A) 4 2 Electrical entry 2 Coil rated voltage E: Grommet terminal D: DIN terminal (EA) (P)(EB) 5 1 3 3 2 1 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 position closed center 110 to 120 VAC, 50/60 Hz (B) (A) 4 2 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC 3 (EA) (P)(EB) 5 1 3 7 240 VAC, 50/60 Hz 9 Other 3 position exhaust center Option (B) (A) 4

Electric Actuator with Integrated Guide

(B contact) 3 wire GXL-N12FTB Switch specifications (SUNX Corporation) GXL-N12FT(B) Part no.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

D side VQC SY9000-50-2A-C8 SY9000-50-2A-C10 SY9000-50-2A-C12 SY9000-50-2A-02 SY9000-50-2A-03 SY9000-18-2 SY9000-11-2 C8: A/B port 8 One-touch fitting C10: A/B port 10 One-touch fitting !2 Manifold block assembly SQ 1 C12: A/B port 12 One-touch fitting How to install lead wire cover 02: A/B port Rc 1/4 Lead wire cover is only used for double solenoid valves.

2/3 Port Valve

Electrical entry G Grommet Voltage C Conduit 2 200V AC 50/60Hz 1 100V AC 50/60Hz D DIN terminal T Conduit terminal 3 110V AC 50/60Hz Refer to table q for configuration. 4 220V AC 50/60Hz 7 240V AC 50/60Hz 8 48V AC 50/60Hz 9 Other (only AC) Table q Voltage-Electrical Entry-Options Caution Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) Class B G C

Table of Contents

-(N)PF2W5--2 B 120 1.6 23 48.2 60 Wiring Brown (1) DC (+) Main circuit Black (4) OUT 50 60 34 55 White (2) NC/Analog output Blue (3) DC () 4-4.5 2-Port size 6 50 40 Use this sensor by connecting to SMC remote type display unit Series PF2W3.

SY

D side Type 41P Type 42P SY9000-50-2A-C8 SY9000-50-2A-C10 SY9000-50-2A-C12 SY9000-50-2A-02 SY9000-50-2A-03 SY9000-18-2 SY9000-11-2 C8: A/B port 8 One-touch fitting C10: A/B port 10 One-touch fitting !2 Manifold block assembly 1 C12: A/B port 12 One-touch fitting How to install lead wire cover 02: A/B port Rc 1/4 Lead wire cover is only used for double solenoid valves.