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If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. #40 9 Filter Rc3/8 20m FQ1011N-10-T020-B-X61 Note Note) The filter shown above cannot be directly connected to the thermo-chiller.

B Contact output signal 3 selected alarm Sets the alarm selected for the contact output signal 3. ---(AL.01)6 1: Default when CO02 is set to PRO1 or PRO2. 4: Default when CO23 is set to A.SEL. 2: Default when CO15 is set to SW-A or SW-B. 5: Default when CO26 is set to A.SEL. 3: Default when CO19 is set to SW-A or SW-B. 6: Default when CO29 is set to A.SEL.

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

Lock keys ( ref er t o P8) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 90% 100% 120% 100% 0% 0% 10% 20% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 20% t o 90% of t he rat ed val ue. ( D EFAU LT VALU E: 0% ) ( N ot e 2) : The pressure of l ess t han 0%

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 9 Filter Rc3/8 20m FQ1011N-10-T020-B-X61 Note Note) The filter shown above cannot be directly connected to the thermo-chiller.

-H0374 22 CE1-R 20m 200m 5m 20m * A DC12V 0.3A B AWG24 DC12V 0.3A CEU2 CE2 U 25mm 400 200mm 1 R25 100 / 23 7-3 7-3-1 2 (AC100V,15%) 1 24V10%,0.4A) 4 CEU2 3 2 1 END / 1. 2.

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore Size: 40mm, Port Thread Type: Rc, Stroke: 100mm, Body Option: M (Rod End Male Threads), Locking Direction: B (Retraction Locking)

Magnet: Built-in, Mounting: Double Clevis, Bore Size: 40mm, Port Thread Type: Rc, Stroke: 100mm, Body Option: Rod End Male Threads, Locking Direction: Retraction Locking, By-Pass Piping: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

AL-31S JIS B 2401G35 5 pcs. u O-ring NBR JIS B 2401G35 1 pc. JIS B 2401G35 1 pc. JIS B 2401G35 3 pcs.

A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulphuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A D A A C A 8 Magnesium hydroxide A B A A B A 9 Acetylene A A A A A A 10 Formic

A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A A A D C A 8 Magnesium hydroxide A A A B B A 9 Acetylene A A A A A A 10 Formic

HA AT (G) (B) (D) ID (H) AMG Purge air for dehumidification AFF AM Misc.

Accessories Nil B None (standard) With bracket Note) When symbol B is indicated, a bracket assembly with a part number shown in the table below is included as an accessory.

Install the separately connected controller and high voltage power B : M4 thread B : M4 thread supply module by at location B using M4 screw (x 6). Refer to 6. Dimensions for details. B : M4 thread B : M4 thread .Adding a high voltage power supply module a. High voltage power supply module to be added should be Connected by D-sub connector at location C.

. 02 Total length: 2m Note: For 3m and 10m, use a standard product. 19 20 Total length: 20m Total length: 19m 8 Doc.

General rules relating to systems JIS B 9960-1: Safety of machinery Electrical equipment of machines (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety, etc *2) Labor Safety and Sanitation Law, etc.

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).