Air Fittings & Tubing

T (M) L2 L1 M Nylon Urethane 1 4 13 13 M12 X 1 3.2 KQ2E23-02 3.4 2.9 17 14 14 31.5 15 15.5 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 M12 X 1 4 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 15 35 KQ2E04-02 17 KQ2E06-01 11 28 31.5 30 15 17 M14 X 1 19 KQ2E06-03 17 33.5 29 KQ2E06-02 15 6 13.1 10.4 17 17 17 KQ2E08-01 7.5 27.5 28 26.1 18.0 8 18.5 19 KQ2E08-02 13 33 27 17 M16 X 1 19 KQ2E08

smcmaintenancepartslist

) 04 T-interface Note 6) Note 7) Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round

Compact Manifold Regulator Series ARM5

L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 5.3 28 5.5 84 SMC SMC SMC SMC 8 52.5 39 3 5 11.5 6 L2 dimension DIN rail part no.

SYJ300/500/700

H: Approx. 600 (Lead wire length) 31.5 [38.5] 70.6 [72.8] (Light/Surge voltage suppressor) 2-3.2 (For mounting) 23.5 10.9 74.2 [76.4] + 28 25 16.1 21 31.5 [38.5] 18 10 (Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (MO): SYJ72-WO-01 (-F) Approx. 300 (Lead

A

28 80 22 Courtesy of Steven Engineering, Inc. !

KJ

KQ2L07-03S KQ2L09-01S KQ2L09-02S KQ2L09-03S KQ2L11-02S 27.5 29.5 24.5 28.5 30.5 29.5 20.5 13.2 10 28 29.5 28 30 31.5 32.5 14 17 12 14 17 17 3 8 Connection thread Applicable tubing 1 8 1 4 3 8 5 16 23.5 15.2 12 6 18.5 1 4 3 8 KQ2L11-03S 31.5 17.9 34 17 33 59 28 3 8 7 21 25.5 17 1 2 1 4 KQ2L11-04S KQ2L13-02S 35.5 31.5 36.5 36.5 22 9 17 1 2 22 3 8 KQ2L13-03S 33.5 21.7 38.5 36 62 28 17 9.6

SY

Grommet (G), (H): SY3240(R)-01 Scale: 35% G H With interface regulator 141 15 68.5 [75] 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01 M type plug connector (M): SY3240(R)-M-01 Grommet .

Table of Contents

-ASD330F-01-08 10-ASD230F-M5-06 2.

F

21 7 64 1/2 1/4 KQY13-35S 17.46 21.7 17 28 31.5 36.5 22 9 34 1/2 3/8 KQY13-36S 17.46 21.7 17 28 33.5 38.5 22 9.6 43 1/2 1/2 KQY13-37S 22.23 21.7 17 28 37.5 40 22 9.6 69 Courtesy of Steven Engineering, Inc. !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Grommet terminal: Double VFS2210-E-01 02 Closed center VFS2310-E-01 02 Exhaust center VFS2410-E-01 02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 With light/surge voltage suppressor 151 (3 position: 159) Lead wire O.D.

VFS

Description Material Connection fitting A Connection fitting B Gasket A Gasket B O-ring O-ring O-ring Adapter plate Adapter plate assembly AXT625-7A AXT625-28-3A For 01 For 01T For 01T1 For 01C For 01F For 01SU For 01 01T 01SU Steel plate AXT625-4-1 AXT625-5 AXT625-17 AXT625-16 18 x 15 x 1.5 10.5 x 7.5 x 1.5 8 x 5 x 1.5 AXT625-6 AXT625-28-1A (Terminal section with adapter plate) AXT625-28

Metal Seal/Rubber Seal Series VQ Body Ported

For details, refer to page 2-4-28. Note 2) For details, refer to page 2-4-29.

0.55

Conditions Body Ported Body ported Series CJ2 Series CM2 Series MB, CA2 Series CS1 Tubing x Length T0604 x 1 m T0806 x 1 m VF1120-01 Speed controller AS3002F-06 AS3002F-08 AN101-01 Silencer Tubing x Length T0604 x 1 m T1075 x 1 m VF3130-02 Speed controller AS3002F-06 AS4002F-10 AN110-01 Silencer T1075 x 1 m T1209 x 1 m Tubing x Length T0604 x 1 m VF5120-03 AS4002F-10 AS4002F-12 Speed

Speed Controller with Indicator

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

SX

SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

2-Color Display Digital Flow Switch Series PFM

) 1 IN 3 18 2 x 3.4 IN OUT 2 x one-touch fitting 68 28 8 2 x 2.6 depth 5 913 Series PFM7 Dimensions PFM7S-(N)01/(N)02/F01 98 76 58 48 Width across flats 17 18 OUT1 OUT2 10.2 DC (+) DC () 43 1 51.5 (Max. 58.5) IN OUT (34.2) 13 1 IN 3 18 2 x port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 2 x 3.4 28 20 8 3 x 2.6 depth 5 PFM7S-(N)01L/(N)02L/F01L 88 58 48 18 OUT2 OUT1 10.2 DC (+) DC () 13 43 1 51.5

Modular F.R.L. Unit

AC20C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 Y200 IS1000M-20 Model Description AC25C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AC30C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AC40C G46-10-02 GC3-10AS G46-2-02 GC3-2AS AC40C-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS Round Square embedded type 1.0MPa Note 1) Note 2) Pressure gauge Attachments Accessories Round Square embedded type N.O.

AC Servo Motor Driver (Pulse input type/Positioning type ）

PB45] 0 Notch depth Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55

ARM10/11

x n)+36 18 28 28 5.3 F.R.L.